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Onoprienko et al., 2015 - Google Patents

Characterization of Ti-BCN films deposited by dc magnetron sputtering of bicomponent Ti/B4C target

Onoprienko et al., 2015

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Document ID
9416361207867764684
Author
Onoprienko A
Ivashchenko V
Timofeeva I
Sinelnitchenko A
Butenko O
Publication year
Publication venue
Journal of Superhard Materials

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Snippet

Quaternary Ti-BCN films have been deposited onto Si (100) substrates by dc magnetron sputtering of bi-component Ti/B4C target in an Ar/N2 gas mixture with different amounts of nitrogen in the mixture (from 0 to 50%). The X-ray diffraction, X-ray photoelectron …
Continue reading at dspace.nbuv.gov.ua (PDF) (other versions)

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