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Xue et al., 2021 - Google Patents

Growth and characterization of InN nanopillar-crystals on steering-crystal-formed multi-crystalline Si substrates

Xue et al., 2021

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Document ID
4072743610095695292
Author
Xue H
Shiraishi K
Izuka Y
Saito S
Taniguchi S
Saito T
Sato Y
Publication year
Publication venue
Journal of Crystal Growth

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The growth of InN nanopillar crystals on steering-crystal-formed multi-crystalline Si substrates was investigated. It has been proved that the (In) GaN steering nanopillar crystals could be used to control the alignment of InN. In this study, by inserting InGaN crystals and …
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    • H01L21/02381Silicon, silicon germanium, germanium
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