[go: up one dir, main page]

Lai et al., 1997 - Google Patents

Optimization and performance of high-resolution micro-optomechanical thermal sensors

Lai et al., 1997

Document ID
4903721866453672361
Author
Lai J
Perazzo T
Shi Z
Majumdar A
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

The ability to detect optically the deflections of microfabricated bi-material cantilever beams with 3 pm resolution has allowed the measurement of temperature, optical power, and energy with 2 μK, 76 pW, and 15 fJ resolution, respectively. The thickness ratio of the two …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/005—Investigating or analyzing materials by the use of thermal means by investigating specific heat

Similar Documents

Publication Publication Date Title
Lai et al. Optimization and performance of high-resolution micro-optomechanical thermal sensors
Thundat et al. Microcantilever sensors
Li et al. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications
Onaran et al. A new atomic force microscope probe with force sensing integrated readout and active tip
Stark et al. Higher harmonics imaging in tapping-mode atomic-force microscopy
Djurić Mechanisms of noise sources in microelectromechanical systems
Hierlemann et al. Application-specific sensor systems based on CMOS chemical microsensors
Lavrik et al. Cantilever transducers as a platform for chemical and biological sensors
US6312959B1 (en) Method using photo-induced and thermal bending of MEMS sensors
Loui et al. The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing
Palacio et al. Normal and lateral force calibration techniques for AFM cantilevers
Toda et al. Cantilever beam temperature sensors for biological applications
Hurley et al. Measurement of Poisson’s ratio with contact-resonance atomic force microscopy
Sone et al. Picogram mass sensor using resonance frequency shift of cantilever
Bosse et al. Physical mechanisms of megahertz vibrations and nonlinear detection in ultrasonic force and related microscopies
Wu et al. A bi-material microcantilever temperature sensor based on optical readout
Rahimi et al. Methane sensing at room temperature using photothermal cantilever deflection spectroscopy
Oden Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure
Adams et al. Piezoelectric self-sensing of adsorption-induced microcantilever bending
Kamppinen et al. Nanomechanical resonators for cryogenic research
Rangelow Scanning proximity probes for nanoscience and nanofabrication
Mere et al. On-chip silicon photonics based grating assisted vibration sensor
Kapa et al. Moisture measurement using porous aluminum oxide coated microcantilevers
Harley Advances in piezoresistive probes for atomic force microscopy
Datskos et al. Detection of infrared photons using the electronic stress in metal–semiconductor cantilever interfaces