[go: up one dir, main page]

Zeggari et al., 2010 - Google Patents

Design and fabrication of a new two-dimensional pneumatic micro-conveyor

Zeggari et al., 2010

Document ID
5003958674684328222
Author
Zeggari R
Yahiaoui R
Malapert J
Manceau J
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

This paper presents the design, fabrication and testing of a new two-dimensional pneumatic conveyor for micro-chips manipulation. The conveyor can levitate and move flat objects to a desired position using controlled air-flow. The structure consists of a sandwich of silicon …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81B—MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components

Similar Documents

Publication Publication Date Title
Yahiaoui et al. A MEMS-based pneumatic micro-conveyor for planar micromanipulation
Van Brussel et al. Assembly of microsystems
Beyeler et al. Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field
Breguet et al. Stick and slip actuators: design, control, performances and applications
Lv et al. A novel MEMS electromagnetic actuator with large displacement
Liu et al. A MEMS stage for 3-axis nanopositioning
CN102581854B (en) Piezoelectric driving micro gripper
Sanchez-Salmeron et al. Recent development in micro-handling systems for micro-manufacturing
Zeggari et al. Design and fabrication of a new two-dimensional pneumatic micro-conveyor
WO2001018857A1 (en) Process for fabrication of 3-dimensional micromechanisms
Zhang et al. Micro-masonry of MEMS sensors and actuators
Benouhiba et al. Development and characterization of thinned PZT bulk technology based actuators devoted to a 6-DOF micropositioning platform
Bučinskas et al. Robotic micromanipulation: A) actuators and their application
Sabri et al. Fabrication and characterization of microstacked PZT actuator for MEMS applications
Fearing Micro structures and micro actuators for implementing sub-millimeter robots
Shahinpoor Potential applications of electroactive polymer sensors and actuators in MEMS technologies
Vikramaditya et al. Microassembly of hybrid magnetic MEMS
Yahiaoui et al. A new two-dimensional actuator for air flow micro-manipulation
Mayyas et al. Design tradeoffs for electrothermal microgrippers
Suthisomboon et al. Design and Simulation of XZ MEMS Micropositioning with 3D-Complex Structure
Gao et al. A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication
CN202438997U (en) Mini-sized piezoelectric driving type clamping device
Pernod et al. MEMS for flow control: technological facilities and MMMS alternatives
Kim et al. Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for a MEMS XYZ stage
Mousavi et al. A novel su-8 microgripper with external actuator for biological cells manipulation