Solzbacher et al., 2000 - Google Patents
A modular system of SiC-based microhotplates for the application in metal oxide gas sensorsSolzbacher et al., 2000
- Document ID
- 5595459601939605926
- Author
- Solzbacher F
- Imawan C
- Steffes H
- Obermeier E
- Möller H
- Publication year
- Publication venue
- Sensors and Actuators B: Chemical
External Links
Snippet
A modular system of SiC-based microhotplates with integrated IDC for the use in metal oxide gas sensors is presented. Basic building block of the sensors is a 1 μm thick polycrystalline 3C-SiC membrane, which acts as supporting structure. A 200 nm thick HfB2 thin film heater …
- 229910010271 silicon carbide 0 title abstract description 26
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