Pandiyan et al., 2006 - Google Patents
Modelling & simulation of novel three arm MEMS actuators & its applicationPandiyan et al., 2006
View PDF- Document ID
- 5624311239117636850
- Author
- Pandiyan J
- Umapathy M
- Balachandar S
- Arumugam M
- Ramasamy S
- Gajjar N
- Publication year
- Publication venue
- Journal of Physics: Conference Series
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Snippet
This paper presents the design and Finite Element Model (FEM) simulation of a novel electrothermal microactuators and arrays. It is a single material microactuator which deflects at its tips by differential thermal expansion of its constituent parts. The electrothermal …
- 238000004088 simulation 0 title abstract description 13
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