[go: up one dir, main page]

Okuyama et al., 1989 - Google Patents

Pyroelectric IR-CCD image sensor

Okuyama et al., 1989

Document ID
583712274044290687
Author
Okuyama M
Togami Y
Ohnishi J
Hamakawa Y
Kimata M
Denda M
Publication year
Publication venue
Ferroelectrics

External Links

Snippet

A room-temperature-operated infrared image sensor CCD having 64× 32 infrared-sensitive MOS gates has been developed by combining a pyroelectric material and a Si-CCD. A pyroelectric LiTaO3, plate is attached to the Si CCD with dielectric materials such as glycerin …
Continue reading at www.tandfonline.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/10—Radiation pyrometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry using electric radiation detectors using resistors, thermistors, or semi-conductors sensitive to radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/02—Details
    • G01J5/04—Casings Mountings
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L37/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L37/02—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof using thermal change of dielectric constant, e.g. working above and below Curie point, e.g. pyroelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof

Similar Documents

Publication Publication Date Title
US7564021B2 (en) Pyroelectric sensor
CA2118597C (en) Thin film pyroelectric imaging array
US10378961B2 (en) Thermal pattern sensor
US5572060A (en) Uncooled YBaCuO thin film infrared detector
Okuyama et al. PbTiO3 ferroelectric thin film gate fet for infrared detection
WO1996024165A9 (en) UNCOOLED YBaCuO THIN FILM INFRARED DETECTOR
Takayama et al. Pyroelectric infrared array sensors made of c-axis-oriented La-modified PbTiO3 thin films
Hashimoto et al. Si monolithic microbolometers of ferroelectric BST thin film combined with readout FET for uncooled infrared image sensor
Ploss et al. Characterization of materials for integrated pyroelectric sensors
US5283438A (en) Monolithic infrared detector with pyroelectric material
Okuyama et al. Pyroelectric infrared-CCD image sensor using LiTaO3
US6576904B1 (en) Transition edge detector technology for high performance IR focal plane arrays
Okuyama et al. Pyroelectric IR-CCD image sensor
Ploss et al. Integrated pyroelectric detector arrays with the sensor material PVDF
JP3626007B2 (en) Infrared detector circuit and infrared two-dimensional image sensor
US6437331B1 (en) Bolometer type infrared sensor with material having hysterisis
Setiadi et al. A 3× 1 integrated pyroelectric sensor based on VDF/TrFE copolymer
US5451786A (en) Uncooled mis capacitor for infrared detection
Bravina et al. Pyroelectricity: some new research and application aspects
Zhu et al. Application of ferroelectric BST thin film prepared by MOD for uncooled infrared sensor of dielectric bolometer mode
Okuyama et al. Pyroelectric Infrared Sensor Using PbTO3 Thin Film
Okuyama et al. Basic characterisitics of an infrared CCD with a pyroelectric gate
JP2576259B2 (en) Infrared sensor
Pevtsov et al. Pyroelectric properties of thin ferroelectric films and their applications for integrated circuits
JP2725494B2 (en) Infrared detector