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Valdrè, 1965 - Google Patents

A double-tilting heating stage for an electron microscope

Valdrè, 1965

Document ID
5902820536937409238
Author
Valdrè U
Publication year
Publication venue
Journal of Scientific Instruments

External Links

Snippet

An electron microscope specimen holder is described which allows specimens to be heated to 800 C with a very small heat input and tilting of the specimen by at least 20 in all azimuths. The heating unit is of the furnace type. Both specimen and heating coil are located in a small …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

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