Liu et al., 2006 - Google Patents
Mems arrayed scanning probes for soft nanolithographyLiu et al., 2006
View PDF- Document ID
- 6318396578367327144
- Author
- Liu C
- Li S
- Publication year
- Publication venue
- ECS Transactions
External Links
Snippet
In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and …
- 238000005329 nanolithography 0 title abstract description 19
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y40/00—Manufacture or treatment of nano-structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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