Kenton et al., 2010 - Google Patents
Design, characterization, and control of a monolithic three-axis high-bandwidth nanopositioning stageKenton et al., 2010
View PDF- Document ID
- 635937111050516742
- Author
- Kenton B
- Leang K
- Publication year
- Publication venue
- Proceedings of the 2010 American Control Conference
External Links
Snippet
A new three-axis serial-kinematic nanopositioning stage developed for high-bandwidth applications such as video-rate scanning probe microscopy (SPM) is presented. The stage employs uniquely designed compliant flexures for guiding the motion of the sample platform …
- 238000010192 crystallographic characterization 0 title description 3
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