[go: up one dir, main page]

Sirohi et al., 1999 - Google Patents

Fundamental understanding of piezoelectric strain sensors

Sirohi et al., 1999

Document ID
6684333253471338330
Author
Sirohi J
Chopra I
Publication year
Publication venue
Smart Structures and Materials 1999: Smart Structures and Integrated Systems

External Links

Snippet

This paper investigates the behavior of piezoelectric elements as strain sensors. Strain is measured in terms of the charge generated by the element as a result of the direct piezoelectric effect. Strains from piezoceramic and piezofilm sensors are compared with …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/16—Selection of materials
    • H01L41/18—Selection of materials for piezo-electric or electrostrictive devices, e.g. bulk piezo-electric crystals
    • H01L41/187—Ceramic compositions, i.e. synthetic inorganic polycrystalline compounds incl. epitaxial, quasi-crystalline materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/31—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/083—Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1132—Sensors

Similar Documents

Publication Publication Date Title
Sirohi et al. Fundamental understanding of piezoelectric strain sensors
Wang et al. Theoretical analysis of the sensor effect of cantilever piezoelectric benders
Shi et al. Functionally graded piezoelectric cantilever beam under load
Smits et al. The constituent equations of piezoelectric bimorphs
Lee Theory of laminated piezoelectric plates for the design of distributed sensors/actuators. Part I: Governing equations and reciprocal relationships
Hagood et al. Simultaneous sensing and actuation using piezoelectric materials
Sirohi et al. Fundamental understanding of piezoelectric strain sensors
Lee Layerwise laminate analysis of functionally graded piezoelectric bimorph beams
Lee et al. Theoretical modeling, experiments and optimization of piezoelectric multimorph
Li et al. Quasi-static thermo-electro-mechanical behaviour of piezoelectric stack actuators
Wang et al. Lead-free piezoceramic macro-fiber composite actuators toward active vibration control systems
Hadidi et al. A novel self-powered, high-sensitivity piezoelectric vibration sensor based on piezoelectric combo effect
Wilkie et al. Anisotropic laminar piezocomposite actuator incorporating machined PMN–PT single-crystal fibers
Inman et al. Structural and machine design using piezoceramic materials: a guide for structural design engineers
Ying et al. Exact solutions of functionally gradient piezothermoelastic cantilevers and parameter identification
Fairweather Designing with active materials: an impedance based approach
JPH10209517A (en) Piezoelectric element
Chandran et al. Crescent: a novel piezoelectric bending actuator
Zhou et al. Dielectric and piezoelectric performance of soft PZT piezoceramics under simultaneous alternating electromechanical loading
Xu et al. Key issues on flextensional piezoelectric energy harvester developments
EP0650642A1 (en) Ceramic deflection device
Nguyen et al. Modeling of ferroelectric micro-cantilever actuator
Singh et al. A finite element computational framework for enhanced photostrictive performance in 0–3 composites
Kang et al. A ferroelectric/ferroelastic energy harvester: Load impedance and frequency effects
Xiang et al. Static analysis of a multilayer piezoelectric actuator with bonding layers and electrodes