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Sun et al., 2019 - Google Patents

Improvement of SPAD Photon Detection Efficiency with Diffraction Window Layer

Sun et al., 2019

Document ID
6916099972385757725
Author
Sun F
Wu Z
Zhu S
Xu Y
Publication year
Publication venue
2019 China Semiconductor Technology International Conference (CSTIC)

External Links

Snippet

A new structure is proposed for single photon avalanche diodes (SPADs) to improve photon detection efficiency (PDE) in 180 nm CMOS process. This structure is achieved with a diffraction window layer which is manufactured in the first intermetallic dielectric (IMD1) …
Continue reading at ieeexplore.ieee.org (other versions)

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