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Almutairi et al., 2012 - Google Patents

Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers

Almutairi et al., 2012

Document ID
7300239426547801224
Author
Almutairi B
Kraft M
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

Electromechanical multi stage noise shaping (MASH) sigma–delta modulator (ΣΔM) has the advantages of inherent stability, high dynamic range, and high overload input level compared with the single loop sigma–delta-modulator approach. In this paper, a fourth order …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M3/00—Conversion of analogue values to or from differential modulation
    • H03M3/30—Delta-sigma modulation
    • H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
    • H03M3/412—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution
    • H03M3/422—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only
    • H03M3/43—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only the quantiser being a single bit one
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M3/00—Conversion of analogue values to or from differential modulation
    • H03M3/30—Delta-sigma modulation
    • H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
    • H03M3/436—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type
    • H03M3/438—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type the modulator having a higher order loop filter in the feedforward path
    • H03M3/454—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type the modulator having a higher order loop filter in the feedforward path with distributed feedback, i.e. with feedback paths from the quantiser output to more than one filter stage

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