[go: up one dir, main page]

Laidoudi et al., 2022 - Google Patents

High overtone acoustic resonator HBAR based on IDT's/c-tilted ZnO/Si for timing applications

Laidoudi et al., 2022

Document ID
7542765134237895575
Author
Laidoudi F
Medjili F
Caliendo C
Hamidullah M
Kanouni F
Boubenider F
Publication year
Publication venue
2022 19th International Multi-Conference on Systems, Signals & Devices (SSD)

External Links

Snippet

In this paper, the frequency characteristics of high overtone bulk acoustic modes, generated by interdigital transducers IDT's on c-tilted ZnO/Si, are theoretically and experimentally investigated. The origin and characteristics of high overtone acoustic modes in ZnO …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes

Similar Documents

Publication Publication Date Title
Song et al. Thermal conductivity of aluminum scandium nitride for 5G mobile applications and beyond
Krishnamoorthy et al. Properties of high sensitivity ZnO surface acoustic wave sensors on SiO2/(1 0 0) Si substrates
Yanagitani et al. C-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes
US10270420B2 (en) Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients
Wang et al. Low‐temperature coefficient bulk acoustic wave composite resonators
Dubois et al. Solidly mounted resonator based on aluminum nitride thin film
García-Gancedo et al. Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
Chu et al. An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure
Iriarte Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond
Zeng et al. High-temperature thin film lithium niobium oxide transducers for bolts
Machado et al. Generation and propagation of superhigh-frequency bulk acoustic waves in ga as
Clement et al. On the effectiveness of lateral excitation of shear modes in AlN layered resonators
Laidoudi et al. High overtone acoustic resonator HBAR based on IDT's/c-tilted ZnO/Si for timing applications
Chen et al. Development of human IgE biosensor using Sezawa-mode SAW devices
Tomar et al. Temperature stability of ZnO thin film SAW device on fused quartz
Hickernell Measurement techniques for evaluating piezoelectric thin films
Patel et al. Fabrication and RF characterization of zinc oxide based film bulk acoustic resonator
Dubois et al. Aluminum nitride thin films for high frequency applications
Alekseev et al. Attenuation and trapping of acoustic energy in composite microwave resonators based on YAG single crystals
Kvashnin et al. Peculiarities of microwave Lamb wave excitation in composite SAW resonator based on diamond substrate
Benetti et al. P2H-3 Guided Lamb Waves in AlN Free Strips
Alekseev et al. Study of spatial distribution of piezoelectric properties of ZnO films by acoustic resonator spectroscopy
Yanagitani Shear mode piezoelectric thin film resonators
Floer et al. Diamond/ZnO/LiNbO 3 structure for packageless acoustic wave sensors
Lee et al. Study of Low-Frequency Narrow Bandwidth Surface Acoustic Wave Sensor for Liquid Applications