Yadav et al., 2019 - Google Patents
A two-terminal bistable electrothermally actuated microswitchYadav et al., 2019
- Document ID
- 7629981630679342231
- Author
- Yadav D
- Murthy N
- Palathingal S
- Shekhar S
- Giridhar M
- Ananthasuresh G
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
An improved design of an electrothermally actuated two-terminal bistable microswitch is the focus of this paper. The proposed design has bimodal bistability which is obtained by using a pair of arches, a V-beam electrothermal actuator, and a novel initially retracting actuator …
- 238000000034 method 0 abstract description 7
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Yadav et al. | A two-terminal bistable electrothermally actuated microswitch | |
| Masters et al. | A self-retracting fully compliant bistable micromechanism | |
| Wilcox et al. | Fully compliant tensural bistable micromechanisms (FTBM) | |
| Baker et al. | On-chip actuation of an in-plane compliant bistable micromechanism | |
| Zhu et al. | Bidirectional electrothermal actuator with Z-shaped beams | |
| WO2007084341A2 (en) | Hysteretic mems thermal device and method of manufacture | |
| Wang et al. | A micromachined RF microrelay with electrothermal actuation | |
| Yang et al. | Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers | |
| Chae et al. | A hybrid RF MEMS switch actuated by the combination of bidirectional thermal actuations and electrostatic holding | |
| Huang et al. | A novel single-actuator bistable microdevice with a moment-driven mechanism | |
| Pandiyan et al. | Design and simulation of MEMS-based digital-to-analog converters for in-plane actuation | |
| Park et al. | Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation | |
| US8232858B1 (en) | Microelectromechanical (MEM) thermal actuator | |
| Kedia et al. | Simulation, design, fabrication, and testing of a MEMS resettable circuit breaker | |
| US7126446B2 (en) | Self-retracting fully compliant bistable micromechanism | |
| Gray Jr et al. | Magnetically bistable actuator: Part 2. Fabrication and performance | |
| US7893799B1 (en) | MEMS latching high power switch | |
| US7714691B2 (en) | Versatile system for a locking electro-thermal actuated MEMS switch | |
| WO2003003396A1 (en) | Self-retracting fully compliant bistable micromechanism | |
| US7138748B2 (en) | Method of enlarging a travel of piezoelectric sensor and MEMS switch employing the same | |
| Gropp et al. | Electrostatic parallel-plate MEMS switch on silicon-ceramic-composite-substrates | |
| Enikov et al. | Micro-mechanical switch array for meso-scale actuation | |
| Mallick et al. | Design and simulation of MEMS based thermally actuated positioning system | |
| Aziz et al. | Reconfigurable MEMS latching-type capacitors for high power applications | |
| Patowari et al. | Comparative study of different micro-thermal actuators for micro-electro-mechanical-system application |