Vitale et al., 2016 - Google Patents
Electrothermal actuation of vanadium dioxide for tunable capacitors and microwave filters with integrated microheatersVitale et al., 2016
- Document ID
- 7912600440997770689
- Author
- Vitale W
- Petit L
- Moldovan C
- Fernández-Bolaños M
- Paone A
- Schüler A
- Ionescu A
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
We report the fabrication, modeling and characterization of novel microwave tunable capacitors based on the metal-insulator transition (MIT) of Vanadium Dioxide (VO 2) as a future replacement solution for microelectromechanical capacitive switches. We present the …
- 239000003990 capacitor 0 title abstract description 36
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/2005—Electromagnetic photonic bandgaps [EPB], or photonic bandgaps [PBG]
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
- H01P1/127—Strip line switches
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/08—Strip line resonators
- H01P7/082—Microstripline resonators
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
- H01P3/08—Microstrips; Strip lines
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Vitale et al. | Electrothermal actuation of vanadium dioxide for tunable capacitors and microwave filters with integrated microheaters | |
| Molaei et al. | Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation | |
| Casu et al. | Vanadium oxide bandstop tunable filter for Ka frequency bands based on a novel reconfigurable spiral shape defected ground plane CPW | |
| Lee et al. | Epitaxial VO2 thin film-based radio-frequency switches with thermal activation | |
| Sazegar et al. | Compact tunable phase shifters on screen-printed BST for balanced phased arrays | |
| US20180190436A1 (en) | Tunable electronic nanocomposites with phase change materials and controlled disorder | |
| Abdellatif et al. | Low loss, wideband, and compact cpw-based phase shifter for millimeter-wave applications | |
| Wang et al. | Tunable inductors using vanadium dioxide as the control material | |
| Casu et al. | A reconfigurable inductor based on vanadium dioxide insulator-to-metal transition | |
| Kundu et al. | A tunable band-stop filter using a metamaterial structure and MEMS bridges on a silicon substrate | |
| Casu et al. | Tunable rf phase shifters based on vanadium dioxide metal insulator transition | |
| Dey et al. | Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures | |
| Givernaud et al. | Tunable band stop filters based on metal-insulator transition in vanadium dioxide thin films | |
| Domingue et al. | Design methodology and optimization of distributed MEMS matching networks for low-microwave-frequency applications | |
| Bouyge et al. | Reconfigurable split rings based on MEMS switches and their application to tunable filters | |
| Dey et al. | Extensive performance evaluations of RF MEMS single-pole-multi-throw (SP3T to SP14T) switches up to X-band frequency | |
| US9590284B1 (en) | Self-limiting filters for band-selective interferer rejection or cognitive receiver protection | |
| Huitema et al. | Highly integrated VO2-based antenna for frequency tunability at millimeter-wave frequencies | |
| Bajpai et al. | Fabrication process improvement of high isolation of RF MEMS switch for 5 G applications | |
| Attar et al. | Low temperature superconducting tunable bandstop resonator and filter using superconducting RF MEMS varactors | |
| Tan et al. | Planar tunable HTS microwave filter with patterned ferroelectric thin film | |
| Sakamaki et al. | Evaluation of the temperature dependence of dielectric properties using probe-backside reflection method at millimeter-wave frequencies | |
| Nasserddine | Millimeter-wave phase shifters based on tunable transmission lines in MEMS technology post-CMOS process | |
| Vaha-Heikkila et al. | $ G $-Band Distributed Microelectromechanical Components Based on CMOS Compatible Fabrication | |
| Vitale et al. | Tunable capacitors and microwave filters based on vanadium dioxide metal-insulator transition |