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Manzanares et al., 2012 - Google Patents

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

Manzanares et al., 2012

Document ID
819154843401990692
Author
Manzanares A
de Espinosa F
Publication year
Publication venue
Ultrasonics

External Links

Snippet

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or damping of, acoustic waves, e.g. sound

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