[go: up one dir, main page]

Lu et al., 2020 - Google Patents

Lamb wave resonator loaded non-reciprocal RF devices

Lu et al., 2020

View PDF
Document ID
8577841054564483387
Author
Lu T
Schneider J
Zou X
Tiwari S
Yao Z
Carman G
Candler R
Wang Y
Publication year
Publication venue
2020 IEEE/MTT-S International Microwave Symposium (IMS)

External Links

Snippet

In this paper we explore parametric amplification on the Lamb wave acoustic platform for the purpose of developing nonlinear and non-reciprocal devices. The strength of the acoustic wave platform over the electromagnetic platform is its low loss and short wavelength at radio …
Continue reading at par.nsf.gov (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezo-electric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezo-electric resonator
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B1/00—Details
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B19/00—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source

Similar Documents

Publication Publication Date Title
Lu et al. RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook
Yang et al. 10–60-GHz electromechanical resonators using thin-film lithium niobate
Hagelauer et al. From microwave acoustic filters to millimeter-wave operation and new applications
Lu et al. Enabling higher order Lamb wave acoustic devices with complementarily oriented piezoelectric thin films
Cassella et al. Aluminum nitride cross-sectional Lamé mode resonators
US7365619B2 (en) BAW apparatus
US10673407B2 (en) Microelectromechanical resonant circulator
Lu et al. Gigahertz low-loss and high power handling acoustic delay lines using thin-film lithium-niobate-on-sapphire
Koohi et al. Negative piezoelectric-based electric-field-actuated mode-switchable multilayer ferroelectric FBARs for selective control of harmonic resonances without degrading K eff ²
Lu et al. Lithium niobate phononic crystals for tailoring performance of RF laterally vibrating devices
Colombo et al. Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators
Lu et al. Acoustic loss in thin-film lithium niobate: An experimental study
Li et al. Low phase noise RF oscillators based on thin-film lithium niobate acoustic delay lines
WO2007145127A1 (en) Composite resonator
Cho et al. Acoustic delay lines in thin-film lithium niobate on silicon carbide
Gong et al. Lithium niobate MEMS devices and subsystems for radio frequency signal processing
Lu et al. GHz low-loss acoustic RF couplers in lithium niobate thin film
JP2005529535A (en) Adjustable filter and frequency adjustment method
US7148604B2 (en) Piezoelectric resonator and electronic component provided therewith
Nguyen et al. Spurious-free lithium niobate bulk acoustic resonator for piezoelectric power conversion
Lu et al. Lamb wave resonator loaded non-reciprocal RF devices
Wu et al. High-Q Resonator–Inductor Using LiNbO₃ Plate for Frequency Tuning in 1–5 GHz
Barrera et al. Frequency and Bandwidth Design Toward Millimeter-Wave Thin-Film Lithium Niobate Acoustic Filters
Branch et al. Investigation of a solid-state tuning behavior in lithium niobate
Ralib et al. Silicon compatible Acoustic wave resonators: Design, fabrication and performance