Ganesan et al., 2004 - Google Patents
A Sensor Data Based Online SPRT for End Point Detection in CMPGanesan et al., 2004
- Document ID
- 8791097509361882105
- Author
- Ganesan R
- Das T
- Publication year
- Publication venue
- IISE Annual Conference. Proceedings
External Links
Snippet
An abstract of a study by Ganessan and Das presenting a robust statistical method for online detection of end point in Chemical Mechanical Planarization (CMP) is presented. The method applies Wald's sequential probability ratio test for variance on wavelet decomposed …
- 238000001514 detection method 0 title abstract description 12
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
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