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Han et al., 2000 - Google Patents

Parylene-diaphragm piezoelectric acoustic transducers

Han et al., 2000

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Document ID
9048153609153986788
Author
Han C
Kim E
Publication year
Publication venue
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No. 00CH36308)

External Links

Snippet

This paper reports the fabrication of piezoelectric acoustic transducers built on a 1.5/spl mu/m thick parylene (both flat 5,000/spl times/5,000/spl mu/m/sup 2/square and dome- shaped 2,000/spl mu/m-radius diaphragm with circular clamped boundary on a silicon …
Continue reading at engineering.purdue.edu (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials

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