Kim et al., 2005 - Google Patents
Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systemsKim et al., 2005
- Document ID
- 9319983069846355294
- Author
- Kim H
- In C
- Yoon G
- Kim J
- Publication year
- Publication venue
- Journal of mechanical science and technology
External Links
Snippet
In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived …
- 229910052451 lead zirconate titanate 0 title abstract description 44
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