Englander et al., 2003 - Google Patents
Local synthesis of silicon nanowires and carbon nanotubes on microbridgesEnglander et al., 2003
View PDF- Document ID
- 9841967777728929081
- Author
- Englander O
- Christensen D
- Lin L
- Publication year
- Publication venue
- Applied Physics Letters
External Links
Snippet
Resistive heating of microline resistors was used to activate vapor-deposition synthesis of silicon nanowires and carbon nanotubes in a room-temperature chamber. The process is compatible with on-chip microelectronics and eliminates the necessity of postsynthesis …
- 239000002070 nanowire 0 title abstract description 31
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B31/00—Carbon; Compounds thereof
- C01B31/02—Preparation of carbon; Purification; After-treatment
- C01B31/0206—Nanosized carbon materials
- C01B31/022—Carbon nanotubes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B31/00—Carbon; Compounds thereof
- C01B31/02—Preparation of carbon; Purification; After-treatment
- C01B31/04—Graphite, including modified graphite, e.g. graphitic oxides, intercalated graphite, expanded graphite or graphene
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