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Englander et al., 2003 - Google Patents

Local synthesis of silicon nanowires and carbon nanotubes on microbridges

Englander et al., 2003

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Document ID
9841967777728929081
Author
Englander O
Christensen D
Lin L
Publication year
Publication venue
Applied Physics Letters

External Links

Snippet

Resistive heating of microline resistors was used to activate vapor-deposition synthesis of silicon nanowires and carbon nanotubes in a room-temperature chamber. The process is compatible with on-chip microelectronics and eliminates the necessity of postsynthesis …
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Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B31/00Carbon; Compounds thereof
    • C01B31/02Preparation of carbon; Purification; After-treatment
    • C01B31/0206Nanosized carbon materials
    • C01B31/022Carbon nanotubes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B31/00Carbon; Compounds thereof
    • C01B31/02Preparation of carbon; Purification; After-treatment
    • C01B31/04Graphite, including modified graphite, e.g. graphitic oxides, intercalated graphite, expanded graphite or graphene

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