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Erler et al., 2013 - Google Patents

C2. 3-A monolithic integrated MEMS in a 350 nm technology for filter monitoring applications

Erler et al., 2013

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Document ID
10126572084828426593
Author
Erler K
Horstmann J
Neubert M
Seidel R
Pohle A
Gross C
Rönisch A
Gabriel P
et al.
Publication year
Publication venue
Proceedings SENSOR 2013

External Links

Snippet

This paper presents a system which combines a modern 350 nm mixed-signal CMOS technology with a MEMS technology for monitoring of the filter contamination level of suction and filtering systems. Therefore the system includes a piezoresistive pressure sensor, a …
Continue reading at scholar.archive.org (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

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