Hopman et al., 2006 - Google Patents
Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishingHopman et al., 2006
View PDF- Document ID
- 10713369388028409136
- Author
- Hopman W
- de Ridder R
- Selvaraja S
- Bostan C
- Gadgil V
- Kuipers L
- Driessen A
- Publication year
- Publication venue
- Photonic Crystal Materials and Devices III (ie V)
External Links
Snippet
We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused …
- 238000003801 milling 0 title abstract description 32
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
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