Kim et al., 2017 - Google Patents
A cracking-assisted micro-/nanofluidic fabrication platform for silver nanobelt arrays and nanosensorsKim et al., 2017
- Document ID
- 12999803278039451097
- Author
- Kim D
- Ha D
- Zhou Q
- Thokchom A
- Lim J
- Lee J
- Park J
- Kim T
- Publication year
- Publication venue
- Nanoscale
External Links
Snippet
Nanowires (NWs) with a high surface-to-volume ratio are advantageous for bio-or chemical sensor applications with high sensitivity, high selectivity, rapid response, and low power consumption. However, NWs are typically fabricated by combining several nanofabrication …
- 238000004519 manufacturing process 0 title abstract description 41
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
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