Barth et al., 2011 - Google Patents
A bistable shape memory microvalveBarth et al., 2011
View PDF- Document ID
- 13129275616000336376
- Author
- Barth J
- Megnin C
- Kohl M
- Publication year
- Publication venue
- 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
External Links
Snippet
This paper presents the layout, fabrication and performance characteristics of a first-of-its- kind bistable shape memory microvalve that uses two counteracting shape memory alloy (SMA) microbridges for switching and magnetic layers to maintain the switching states in …
- 229910001285 shape-memory alloy 0 abstract description 52
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Micro-valves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
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