Sinha, 2018 - Google Patents
Optimization of LPCVD-SiNx Membranes for Micro-hotplate/Nano-reactorsSinha, 2018
View PDF- Document ID
- 1349860710219979166
- Author
- Sinha S
- Publication year
External Links
Snippet
Micro-hotplate and Micro-hotplate integrated Nano-reactors are a revolution for in-situ observations in Transmission Electron Microscopy (TEM) imaging. They currently operate at about 400oC without any problems. The SiNx membranes of micro-hotplate and Nano …
- 239000012528 membrane 0 title abstract description 19
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements
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