Qin et al., 2013 - Google Patents
Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking controlQin et al., 2013
View PDF- Document ID
- 13597402626697106260
- Author
- Qin Y
- Shirinzadeh B
- Tian Y
- Zhang D
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
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This paper presents fundamental issues in establishing a decoupled XY stage for micro/nano positioning and manipulation applications. In the proposed XY stage, two piezoelectric actuators (PEAs) generate motions, and the cross-axis couplings are …
- 230000003068 static 0 title abstract description 14
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