Yerganian, 2000 - Google Patents
Ceramic Element Bonding For Piezoelectric MotorsYerganian, 2000
View PDF- Document ID
- 13779193563770287209
- Author
- Yerganian S
- Publication year
External Links
Snippet
This paper briefly describes the methods used to epoxy bond PZT ceramic to stators used in 8-mm piezoelectric motors. It also includes a discussion of the advantages of metallic bonds over epoxy, and beginning work with metallic bonds made by silver diffusion bonding and tin …
- 239000000919 ceramic 0 title abstract description 20
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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