Moulton et al., 2001 - Google Patents
Micromechanical devices with embedded electro-thermal-compliant actuationMoulton et al., 2001
- Document ID
- 14954356627710277534
- Author
- Moulton T
- Ananthasuresh G
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
At the micro-scale, thermal actuation provides larger forces compared to the widely-used electrostatic actuation. In this paper, we highlight another advantage of thermal actuation, viz. the ease with which it can be utilized to achieve a novel embedded electro-thermal …
- 238000000034 method 0 abstract description 36
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