[go: up one dir, main page]

Bergers, 2013 - Google Patents

Anelasticity in Al-alloy thin films: an experimental analysis

Bergers, 2013

View PDF
Document ID
15634513378162055583
Author
Bergers L
Publication year

External Links

Snippet

Micro-electromechanical systems (MEMS) enable novel high-tech applications in, eg, aerospace, biomedicine, consumer electronics and wireless communications. By integrating electrical and mechanical functionalities at the micrometer to the millimeter length scale they …
Continue reading at research.tue.nl (PDF) (other versions)

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0286Miniature specimen; Testing on micro-regions of a specimen
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/025Geometry of the test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/0202Control of the test
    • G01N2203/0212Theories, calculations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/42Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0069Fatigue, creep, strain-stress relations or elastic constants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/022Environment of the test
    • G01N2203/0222Temperature
    • G01N2203/0226High temperature; Heating means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0016Tensile or compressive
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/20Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices

Similar Documents

Publication Publication Date Title
CN100405040C (en) Film tensile loading device and film deformation measurement method under scanning microscope environment
Knauss et al. Mechanical measurements at the micron and nanometer scales
Haque et al. A review of MEMS-based microscale and nanoscale tensile and bending testing
CN101158629B (en) Scanning Electron Microscope Electron Backscattering Diffraction In-Situ Stretching Device and Measurement Method
Imrich et al. In situ TEM microcompression of single and bicrystalline samples: insights and limitations
US6755075B2 (en) Ultra micro indentation testing apparatus
Kiener et al. Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM
Bergers et al. Measuring time-dependent deformations in metallic MEMS
Banks‐Sills et al. A Methodology for Accurately Measuring Mechanical Properties on the Micro‐Scale
Bergers et al. Characterization of time-dependent anelastic microbeam bending mechanics
Alfreider et al. Extracting information from noisy data: strain mapping during dynamic in situ SEM experiments
Wang et al. Principle and methods of nanoindentation test
Wheeler et al. Insights gained through image analysis during in situ micromechanical experiments
Celik et al. Simulations of nanowire bend tests for extracting mechanical properties
Bergers Anelasticity in Al-alloy thin films: an experimental analysis
Espinosa et al. A novel experimental technique for testing thin films and MEMS materials
Sansoz et al. A force-matching method for quantitative hardness measurements by atomic force microscopy with diamond-tipped sapphire cantilevers
Wheeler et al. Small scale mechanical characterization of thin foil materials via pin load microtesting
Sadeghian et al. Demonstration of parallel scanning probe microscope for high throughput metrology and inspection
Bergers et al. Measuring time-dependent mechanics in metallic MEMS
EP4273533A1 (en) Strain measurement apparatus and method for measuring mechanical strain
WO2011048110A1 (en) Method for determining the response of a contractile or expansible biological material
Liu et al. Applications and challenges of digital image correlation in the microscopic environment
Nautiyal et al. In-Situ Mechanics: Experimental Tools and Techniques
Wang Investigation of the mechanical behavior of freestanding polycrystalline gold films deposited by evaporation and sputtering methods