Tripathy et al., 2008 - Google Patents
GaN and ZnO freestanding micromechanical structures on silicon‐on‐insulator substratesTripathy et al., 2008
View PDF- Document ID
- 16953294013336191845
- Author
- Tripathy S
- Vicknesh S
- Wang L
- Lin V
- Oh S
- Grover R
- Zang K
- Arokiaraj J
- Tan J
- Kumar B
- Gong H
- Shannigrahi S
- Ramam A
- Chua S
- Publication year
- Publication venue
- physica status solidi (a)
External Links
Snippet
Using a combination of selective dry etching techniques, surface micro‐machined GaN and ZnO micromechanical structures are demonstrated on silicon‐on‐insulator (SOI) substrates. The dry releasing technique employs a controlled gas phase pulse etching with non‐plasma …
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide 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[Zn]=O 0 title abstract description 87
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