Schmitt et al., 2017 - Google Patents
Implementation of smooth nanocrystalline diamond microstructures by combining reactive ion etching and ion beam etchingSchmitt et al., 2017
- Document ID
- 1803486517902978107
- Author
- Schmitt J
- Nelissen W
- Wallrabe U
- Völklein F
- Publication year
- Publication venue
- Diamond and Related Materials
External Links
Snippet
Due to its extraordinary properties diamond can be used as mold in a hot embossing process which allows the replication of micro-optical structures. For this application a low surface roughness is indispensable. We investigated the ability of ion beam etching (IBE) to …
- 239000010432 diamond 0 title abstract description 77
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