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Huang et al., 2012 - Google Patents

Fabrication of large-area three-dimensional microstructures on flexible substrates by microtransfer printing methods

Huang et al., 2012

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Document ID
18384996130844160563
Author
Huang C
Zeng X
Jiang H
Publication year
Publication venue
Journal of microelectromechanical systems

External Links

Snippet

This paper presents two robust microtransfer printing methods, namely, multiple transfer printing and peeling microprinting methods, to fabricate three-dimensional (3-D) and high- aspect-ratio microelectromechanical systems (MEMS) structures over large areas on flexible …
Continue reading at mnsa.ece.wisc.edu (PDF) (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40—Plastics, e.g. foam, rubber
    • B29C33/405—Elastomers, e.g. rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems

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