Dubuc et al., 2004 - Google Patents
Smart MEMS concept for high secure RF and millimeterwave communicationsDubuc et al., 2004
- Document ID
- 2736341799887947417
- Author
- Dubuc D
- Saddaoui M
- Melle S
- Flourens F
- Rabbia L
- Ducarouge B
- Grenier K
- Pons P
- Boukabache A
- Bary L
- Takacs A
- Aubert H
- Vendier O
- Roux J
- Plana R
- Publication year
- Publication venue
- Microelectronics Reliability
External Links
Snippet
This paper presents a fully suspended MEMS based technology to assess the smart microsystem concept. The demonstrator is a redundancy ring for millimeterwave space communication. Reliability investigations are presented showing that the membrane is …
- 239000012528 membrane 0 abstract description 21
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
- H01P1/127—Strip line switches
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