Gkotsis et al., 2007 - Google Patents
Thin film crystal growth template removal: Application to stress reduction in lead zirconate titanate microstructuresGkotsis et al., 2007
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- 2740722670034055877
- Author
- Gkotsis P
- Kirby P
- Saharil F
- Oberhammer J
- Stemme G
- Publication year
- Publication venue
- Applied Physics Letters
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Snippet
A key issue for the design and reliability of microdevices is process related; residual stresses in the thin films from which they are composed, especially for sol-gel deposited Pb (Zr x, Ti 1− x) O 3 ceramics, where use of Pt as a template layer, though essential for the nucleation …
- 239000010409 thin film 0 title abstract description 11
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