Gonda et al., 1999 - Google Patents
Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrologyGonda et al., 1999
- Document ID
- 3218855033175781234
- Author
- Gonda S
- Kurosawa T
- Tanimura Y
- Publication year
- Publication venue
- Measurement Science and Technology
External Links
Snippet
A centro-symmetrical, monolithic three-dimensional fine-motion stage was investigated in terms of its static and dynamic characteristics. The outer frame with the size of a 100 mm cube includes differently sized, concentric X/Y/Z linear motion stages. The yaw, pitch and roll …
- 238000006073 displacement reaction 0 abstract description 38
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical means
- G01B5/004—Measuring arrangements characterised by the use of mechanical means for measuring coordinates of points
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6467761B1 (en) | Positioning stage | |
| Roy et al. | Design and characterization of a two-axis, flexure-based nanopositioning stage with 50 mm travel and reduced higher order modes | |
| Vermeulen et al. | Design of a high-precision 3D-coordinate measuring machine | |
| Polit et al. | Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing | |
| Smith | Flexures: elements of elastic mechanisms | |
| Torralba et al. | Large range nanopositioning stage design: A three-layer and two-stage platform | |
| US9371855B2 (en) | Flexure based linear and rotary bearings | |
| Liu et al. | A flexure-based long-stroke fast tool servo for diamond turning | |
| US6484602B1 (en) | Six-degree of freedom micro-positioner | |
| US7348709B2 (en) | Heavy-load nanopositioner with dual-parallel flexure design | |
| US20100275717A1 (en) | Precision positioning device | |
| Lyu et al. | Design of a compliant vertical micropositioning stage based on lamina emergent mechanisms | |
| Gonda et al. | Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology | |
| US7117724B1 (en) | Flexure-beam actuator and stage for micro- and nano-positioning | |
| Zhao et al. | High-precision compliant mechanism for lens XY micro-adjustment | |
| US20190032759A1 (en) | Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance | |
| Furutani et al. | Nanometre-cutting machine using a Stewart-platform parallel mechanism | |
| Seugling et al. | A six-degree-of-freedom precision motion stage | |
| Wang et al. | Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning platform | |
| Chetwynd et al. | X-ray interferometer calibration of microdisplacement transducers | |
| Kim et al. | Metrological atomic force microscope using a large range scanning dual stage | |
| Qi et al. | A novel 2-DOF compound compliant parallel guiding mechanism | |
| Balkrishna Rasiklal | AI and ML-Enhanced Nano Positioning for Large-Scale XY Scanning Applications | |
| US20030033703A1 (en) | Positioning stage | |
| Bowen et al. | Sub-nanometre transducer characterization by X-ray interferometry |