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Pasquini et al., 2005 - Google Patents

STM tips fabrication for Critical Dimension Measurements

Pasquini et al., 2005

Document ID
3337838845811203442
Author
Pasquini A
Picotto G
Pisani M
Publication year
Publication venue
Scanning Probe Microscopy: Characterization, Nanofabrication and Device Application of Functional Materials: Proceedings of the NATO Advanced Study Institute on Scanning Probe Microscopy: Characterization, Nanofabrication and Device Application of Functional Materials Algarve, Portugal 1–13 October 2002

External Links

Snippet

In this contribution a method is described for sharpening Tungsten (W) tips through a two- step electrochemical etching. In the first step, under strong reaction conditions, we obtain a long hyperbolic cone, while in the second with a micropositioner we bring only the apex of …
Continue reading at link.springer.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper

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