[go: up one dir, main page]

Feng-Bo et al., 2014 - Google Patents

Fabrication of tunable [Al2O3: Alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties

Feng-Bo et al., 2014

View PDF
Document ID
3519328803230911728
Author
Feng-Bo S
Yu D
Yong-Qiang Y
Ping C
Ya-Hui D
Xiao W
Dan Y
Kai-wen X
Publication year
Publication venue
Organic Electronics

External Links

Snippet

The optical and barrier properties of thin-film encapsulations (TFEs) for top-emitting organic light-emitting diodes (TEOLEDs) were investigated using TFEs fabricated by stacking multiple sets of inorganic–organic layers. The inorganic moisture barrier layers were …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/52—Details of devices
    • H01L51/5237—Passivation; Containers; Encapsulation, e.g. against humidity
    • H01L51/5253—Protective coatings
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/52—Details of devices
    • H01L51/5237—Passivation; Containers; Encapsulation, e.g. against humidity
    • H01L51/524—Sealing arrangements having a self-supporting structure, e.g. containers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/52—Details of devices
    • H01L51/5203—Electrodes
    • H01L51/5206—Anodes, i.e. with high work-function material
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/56—Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/28—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
    • H01L27/32—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
    • H01L27/3241—Matrix-type displays
    • H01L27/3244—Active matrix displays
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0032—Selection of organic semiconducting materials, e.g. organic light sensitive or organic light emitting materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2251/00—Indexing scheme relating to organic semiconductor devices covered by group H01L51/00
    • H01L2251/50—Organic light emitting devices
    • H01L2251/53—Structure
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001—Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00

Similar Documents

Publication Publication Date Title
Feng-Bo et al. Fabrication of tunable [Al2O3: Alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties
TWI590503B (en) Edge blocking film for electronic devices
Yang et al. Realization of thin film encapsulation by atomic layer deposition of Al2O3 at low temperature
Jeong et al. Highly reliable hybrid nano-stratified moisture barrier for encapsulating flexible OLEDs
Seo et al. Laminated graphene films for flexible transparent thin film encapsulation
RU2672102C2 (en) Organic electroluminescent device
Yong-Qiang et al. High barrier properties of transparent thin-film encapsulations for top emission organic light-emitting diodes
Kim et al. Optimization of Al 2 O 3/TiO 2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
Park et al. High-performance thin H: SiON OLED encapsulation layer deposited by PECVD at low temperature
Park et al. Inorganic/organic multilayer passivation incorporating alternating stacks of organic/inorganic multilayers for long-term air-stable organic light-emitting diodes
Hamanaka et al. Investigating the influence of the solution-processing method on the morphological properties of organic semiconductor films and their impact on OLED performance and lifetime
CN111769206A (en) Thin film permeation barrier systems for substrates and devices and methods of making the same
Xiao et al. The improvement of thin film barrier performances of organic–inorganic hybrid nanolaminates employing a low-temperature MLD/ALD method
Najafabadi et al. Highly efficient inverted top-emitting green phosphorescent organic light-emitting diodes on glass and flexible substrates
Yun et al. Thermally evaporated SiO thin films as a versatile interlayer for plasma-based OLED passivation
Duan et al. High-performance barrier using a dual-layer inorganic/organic hybrid thin-film encapsulation for organic light-emitting diodes
Liu et al. Improved performance of quantum dot light-emitting diodes by hybrid electron transport layer comprised of ZnO nanoparticles doped organic small molecule
Kwon et al. A systematic study of the interactions in the top electrode/capping layer/thin film encapsulation of transparent OLEDs
Keum et al. The Role of Metallic Dopants in Improving the Thermal Stability of the Electron Transport Layer in Organic Light‐Emitting Diodes
TW201505226A (en) Organic light emitting display device
Tsai et al. Flexible fluorescent white organic light emitting diodes with ALD encapsulation
KR100569607B1 (en) Protective film formation method of organic light emitting element
Kim et al. Thin film passivation of organic light emitting diodes by inductively coupled plasma chemical vapor deposition
Saikia et al. Characterization of organic light-emitting diode using a rubrene interlayer between electrode and hole transport layer
Wong et al. Co-sputtered oxide thin film encapsulated organic electronic devices with prolonged lifetime