[go: up one dir, main page]

Marquardt et al., 2022 - Google Patents

Correlation between properties of direct current magnetron sputtered thin niobium nitride films and plasma parameters

Marquardt et al., 2022

View HTML
Document ID
372774075178157203
Author
Marquardt R
Cipo J
Schlichting F
Kolhatkar G
Kohlstedt H
Kersten H
Publication year
Publication venue
Thin Solid Films

External Links

Snippet

Superconducting thin films of NbN on SiO 2 are prepared at ambient temperature by direct current magnetron sputtering with varying external deposition parameters, ie pressure, target-substrate distance, and power. Internal deposition parameters such as the plasma …
Continue reading at www.sciencedirect.com (HTML) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/22—Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
    • H01L39/223—Josephson-effect devices
    • H01L39/225—Josephson-effect devices comprising high Tc ceramic materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2464—After-treatment, e.g. patterning

Similar Documents

Publication Publication Date Title
Dannenberg et al. Reactive sputter deposition of titanium dioxide
Yagi et al. Analysis on thermal properties of tin doped indium oxide films by picosecond thermoreflectance measurement
Marquardt et al. Correlation between properties of direct current magnetron sputtered thin niobium nitride films and plasma parameters
Ortolani et al. Low-energy electrodynamics of superconducting diamond
Friedrich et al. Onset of phase diffusion in high kinetic inductance granular aluminum micro-SQUIDs
Licata et al. Correlation between thickness dependent nanoscale structural chemistry and superconducting properties of ultrathin epitaxial NbN films
Haberkorn Thickness dependence of the flux-flow velocity and the vortex instability in nanocrystalline γ-Mo2N thin films
Shibalov et al. Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
Blatter et al. Enhancement of the vortex critical velocity in superconducting/normal metal bilayers
Baskaran et al. High upper critical field in disordered niobium nitride superconductor
Siegel et al. Structural, electrical and optical studies of gold nanostructures formed by Ar plasma-assisted sputtering
Portesi et al. Fabrication of Au/Ti TESs for optical photon counting
Islam et al. Time-domain thermoreflectance measurement of the thermal diffusivity of Nb thin films
Wang et al. Layer-dependent charge density wave phase transition stiffness in 1T-TaS2 nanoflakes evidenced by ultrafast carrier dynamics
Huebener et al. Low-temperature scanning electron microscopy for studying inhomogeneities in thin-film high-T c superconductors
Bareli et al. Substrate influence on low energy electron beam processing of YBa2Cu3O7− δ thin films
Iosad et al. Properties of (nb 0.35, ti 0.15) x ni 1− x thin films deposited on silicon wafers at ambient substrate temperature
Yadav et al. Evaluation of a-NbGe films as a candidate material for superconducting nanowire single-photon detector (SNSPD) applications
Pepe et al. Novel superconducting proximized heterostructures for ultrafast photodetection
Taketoshi et al. Effect of synthesis condition on thermal diffusivity of molybdenum thin films observed by a picosecond light pulse thermoreflectance method
Pan et al. Layered ferromagnet/superconductor heterostructures: Nonequilibrium quasiparticle dynamics and photodetector applications
Zhao et al. Combining an in situ device fabrication and six-probe electrical transport measurement system with low-energy electron microscopy
Nevgasimov et al. Inversion of the temperature coefficient of resistance of chromium films as the result of their nanocrystalline structure
Phelps et al. Absence of an energy gap in measurements of Cu-O superconductors with high-resolution electron-energy-loss spectroscopy
Díaz et al. Rapid vortex flux motion in GdBa2Cu3O7− d nanobridges