[go: up one dir, main page]

Fu et al., 2010 - Google Patents

Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

Fu et al., 2010

View PDF
Document ID
3902299375179658395
Author
Fu Y
Luo J
Du X
Flewitt A
Li Y
Markx G
Walton A
Milne W
Publication year
Publication venue
Sensors and Actuators B: Chemical

External Links

Snippet

Recent developments on the preparation and application of ZnO films for acoustic wave- based microfluidics and biosensors are reviewed in this paper. High quality and strongly textured ZnO thin films can be prepared using many technologies, among which RF …
Continue reading at home.eps.hw.ac.uk (PDF) (other versions)

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated micro-fluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories

Similar Documents

Publication Publication Date Title
Fu et al. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review
Connacher et al. Micro/nano acoustofluidics: materials, phenomena, design, devices, and applications
Du et al. Microfluidic pumps employing surface acoustic waves generated in ZnO thin films
US11695384B2 (en) Acoustic resonator device with controlled placement of functionalization material
Flewitt et al. ZnO based SAW and FBAR devices for bio-sensing applications
Nair et al. Acoustic biosensors and microfluidic devices in the decennium: Principles and applications
JP6882280B2 (en) Acoustic resonator devices, as well as manufacturing methods that provide airtightness and surface functionalization.
US8360753B2 (en) Micro fluidic transportation device and method for manufacturing the same
JP6898344B2 (en) BAW sensor fluid system with increased dynamic measurement range
US10458982B2 (en) Fluidic device including BAW resonators along opposing channel surfaces
Liu et al. Surface acoustic wave based microfluidic devices for biological applications
US10393704B2 (en) Multi-frequency BAW mixing and sensing system and method
US11486859B2 (en) Fluidic device with fluid port orthogonal to functionalized active region
US10812045B2 (en) BAW sensor with enhanced surface area active region
White Acoustic sensors for physical, chemical and biochemical applications
Luo et al. Acoustic wave based microfluidics and lab-on-a-chip
Durmuş et al. Acoustic-based biosensors
CN103472129A (en) Resonance sensor for fluid environment detection
Luo et al. Integrated ZnO film based acoustic wave microfluidics and biosensors
Fu et al. Aluminium nitride thin film acoustic wave device for microfluidic and biosensing applications
CN112449743A (en) Sensor with droplet retention structure
Fu et al. Piezoelectric zinc oxide and aluminum nitride films for microfluidic and biosensing applications
TWI333068B (en) Flexural plate wave (fpw) biosensor for detecting immunoglobulin-e (ige)
Lee et al. A surface acoustic wave-based immunosensing device using a nanocrystalline ZnO film on Si
García-Gancedo et al. Sensors based on SAW and FBAR technologies