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AU2001284866A1 - Smart load port with integrated carrier monitoring and fab-wide carrier management system - Google Patents

Smart load port with integrated carrier monitoring and fab-wide carrier management system

Info

Publication number
AU2001284866A1
AU2001284866A1 AU2001284866A AU8486601A AU2001284866A1 AU 2001284866 A1 AU2001284866 A1 AU 2001284866A1 AU 2001284866 A AU2001284866 A AU 2001284866A AU 8486601 A AU8486601 A AU 8486601A AU 2001284866 A1 AU2001284866 A1 AU 2001284866A1
Authority
AU
Australia
Prior art keywords
fab
management system
load port
carrier
smart load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001284866A
Inventor
Raymond S. Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of AU2001284866A1 publication Critical patent/AU2001284866A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU2001284866A 2000-08-15 2001-08-14 Smart load port with integrated carrier monitoring and fab-wide carrier management system Abandoned AU2001284866A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US64046300A 2000-08-15 2000-08-15
US09640463 2000-08-15
US09641032 2000-08-16
US09/641,032 US6591162B1 (en) 2000-08-15 2000-08-16 Smart load port with integrated carrier monitoring and fab-wide carrier management system
PCT/US2001/025344 WO2002015234A2 (en) 2000-08-15 2001-08-14 Carrier monitoring and fab-wide carrier management systems

Publications (1)

Publication Number Publication Date
AU2001284866A1 true AU2001284866A1 (en) 2002-02-25

Family

ID=27093559

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001284866A Abandoned AU2001284866A1 (en) 2000-08-15 2001-08-14 Smart load port with integrated carrier monitoring and fab-wide carrier management system

Country Status (8)

Country Link
US (1) US6591162B1 (en)
EP (1) EP1316050A4 (en)
JP (1) JP5054879B2 (en)
KR (1) KR20030038703A (en)
CN (1) CN1244067C (en)
AU (1) AU2001284866A1 (en)
TW (1) TW544724B (en)
WO (1) WO2002015234A2 (en)

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US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
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JP6024433B2 (en) * 2012-12-10 2016-11-16 東京エレクトロン株式会社 Substrate processing apparatus, substrate processing system, and method for detecting abnormality in transfer container
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US9570331B2 (en) * 2014-07-30 2017-02-14 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer cassette with electrostatic carrier charging scheme
JP6451453B2 (en) * 2015-03-31 2019-01-16 Tdk株式会社 GAS PURGE DEVICE, LOAD PORT DEVICE, PURGE CONTAINER CONTAINER STAND, AND GAS PURGE METHOD
KR101547177B1 (en) * 2015-04-03 2015-08-27 (주)상아프론테크 Wafer receptacle
JP6689672B2 (en) * 2016-05-25 2020-04-28 信越ポリマー株式会社 Substrate storage container, management system thereof, and substrate storage container management method
JP6689673B2 (en) * 2016-05-25 2020-04-28 信越ポリマー株式会社 Board storage container management system
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Also Published As

Publication number Publication date
US6591162B1 (en) 2003-07-08
CN1244067C (en) 2006-03-01
JP2004517463A (en) 2004-06-10
WO2002015234A2 (en) 2002-02-21
CN1466732A (en) 2004-01-07
KR20030038703A (en) 2003-05-16
JP5054879B2 (en) 2012-10-24
WO2002015234A3 (en) 2002-06-06
TW544724B (en) 2003-08-01
EP1316050A2 (en) 2003-06-04
EP1316050A4 (en) 2007-11-28

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