CA2419316C - Microcommutateur bistable - Google Patents
Microcommutateur bistable Download PDFInfo
- Publication number
- CA2419316C CA2419316C CA002419316A CA2419316A CA2419316C CA 2419316 C CA2419316 C CA 2419316C CA 002419316 A CA002419316 A CA 002419316A CA 2419316 A CA2419316 A CA 2419316A CA 2419316 C CA2419316 C CA 2419316C
- Authority
- CA
- Canada
- Prior art keywords
- switch
- center body
- stable
- spring arms
- mems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003068 static effect Effects 0.000 claims abstract description 21
- 238000000576 coating method Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 40
- 238000005381 potential energy Methods 0.000 abstract description 6
- 239000000835 fiber Substances 0.000 description 35
- 238000000034 method Methods 0.000 description 19
- 238000003780 insertion Methods 0.000 description 12
- 230000037431 insertion Effects 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000725 suspension Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2001/008674 WO2002075428A1 (fr) | 2001-03-16 | 2001-03-16 | Microcommutateur bistable |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2419316A1 CA2419316A1 (fr) | 2002-09-26 |
| CA2419316C true CA2419316C (fr) | 2009-08-18 |
Family
ID=21742415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002419316A Expired - Lifetime CA2419316C (fr) | 2001-03-16 | 2001-03-16 | Microcommutateur bistable |
Country Status (2)
| Country | Link |
|---|---|
| CA (1) | CA2419316C (fr) |
| WO (1) | WO2002075428A1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7039268B2 (en) * | 2004-03-29 | 2006-05-02 | Japan Aviation Electronics Industry Limited | Optical device |
| CN104241035B (zh) * | 2014-09-01 | 2016-08-24 | 清华大学 | 一种双段式静电驱动微机械开关 |
| CN110600289B (zh) * | 2019-08-30 | 2021-04-13 | 中国传媒大学 | 一种可复位mems双稳态触发器 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4126107C2 (de) * | 1991-08-07 | 1993-12-16 | Bosch Gmbh Robert | Beschleunigungssensor und Verfahren zur Herstellung |
| EP0927376B1 (fr) * | 1996-09-20 | 2002-04-10 | Ascom AG | Commutateur a fibres optiques et procede de production correspondant |
| DE19811660C1 (de) * | 1998-03-18 | 1999-04-22 | Karlsruhe Forschzent | Faseroptischer Modulator |
| US5977858A (en) * | 1998-07-31 | 1999-11-02 | Hughes Electronics Corporation | Electro-thermal bi-stable actuator |
| US6229640B1 (en) * | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
-
2001
- 2001-03-16 WO PCT/US2001/008674 patent/WO2002075428A1/fr active Application Filing
- 2001-03-16 CA CA002419316A patent/CA2419316C/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2419316A1 (fr) | 2002-09-26 |
| WO2002075428A1 (fr) | 2002-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6303885B1 (en) | Bi-stable micro switch | |
| US6388359B1 (en) | Method of actuating MEMS switches | |
| US6535663B1 (en) | Microelectromechanical device with moving element | |
| Marxer et al. | Micro-Opto-Mechanical 2\; *\; 2 Switch for Single-Mode Fibers Based on Plasma-Etched Silicon Mirror and Electrostatic Actuation | |
| US7183633B2 (en) | Optical cross-connect system | |
| US6498870B1 (en) | Micromachined optomechanical switches | |
| US6996306B2 (en) | Electrostatically operated micro-optical devices and method for manufacturing thereof | |
| US6813412B2 (en) | Mems element having perpendicular portion formed from substrate | |
| Chen et al. | A low voltage micromachined optical switch by stress-induced bending | |
| US20070120438A1 (en) | Electrostatic control device | |
| EP1055281A1 (fr) | Microrupteur optique a micro-organe de commande electrostatique et son procede d'utilisation | |
| EP1211544A2 (fr) | Atténuateur optique et séparateur de faisceau variable | |
| CA2419316C (fr) | Microcommutateur bistable | |
| US20030012545A1 (en) | Broad-band variable optical attenuator | |
| US6801682B2 (en) | Latching apparatus for a MEMS optical switch | |
| CA2419309C (fr) | Procede de declenchement de commutateurs mems | |
| JP2004526177A (ja) | 光学的マイクロアクチュエータおよびこのマイクロアクチュエータを使用した光学素子ならびに光学的マイクロアクチュエータの製造方法 | |
| EP1218790A2 (fr) | Dispositif micro-electromecanique a element mobile | |
| Aksyuk et al. | Low insertion loss packaged and fiber-connectorized Si surface-micromachined reflective optical switch | |
| US6993218B2 (en) | Optical switch and optical switch array | |
| US6480646B2 (en) | Micro-mirror and actuator with extended travel range | |
| CA2419380A1 (fr) | Commutateur a fibres optiques lenticulaire, conique | |
| Hoffmann et al. | Fibre-optical MEMS switches based on bulk silicon micromachining | |
| Hsieh et al. | Low-actuation-voltage MEMS for 2-D optical switches | |
| Hoffmann et al. | An electrostatically actuated 1 x 2 moving-fiber switch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKEX | Expiry |
Effective date: 20210316 |