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CN104199182B - Two-step diffraction phase imaging method and corresponding phase retrieval method - Google Patents

Two-step diffraction phase imaging method and corresponding phase retrieval method Download PDF

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CN104199182B
CN104199182B CN201410505828.2A CN201410505828A CN104199182B CN 104199182 B CN104199182 B CN 104199182B CN 201410505828 A CN201410505828 A CN 201410505828A CN 104199182 B CN104199182 B CN 104199182B
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diffracted light
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CN104199182A (en
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徐媛媛
王亚伟
季颖
梁敏捷
张力
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Jiangsu University
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Abstract

本发明公开了一种两步衍射相位成像方法及对应相位恢复方法,利用光栅衍射的0级先后与+1级和‑1级衍射光形成两步共几何光路干涉图样,具有高度的稳定性,然后计算两干涉图样之差以消除背景光强,继而运用希尔伯特变换恢复样品的相位信息。相比离轴干涉常用的相位恢复方法,本发明无需高通滤波,高频信息保留完整,相位恢复速率快,而且该成像方法适用于所有的离轴干涉,包括轻微离轴干涉。本发明在相位显微方面具有广泛的实用价值与应用前景,特别是在透明样品,如生物细胞相位成像以及相位测量等应用领域。

The invention discloses a two-step diffraction phase imaging method and a corresponding phase recovery method, which utilizes the 0th order of grating diffraction and the +1st order and -1 order diffracted light to form a two-step co-geometric optical path interference pattern, which has a high degree of stability, Then calculate the difference between the two interference patterns to eliminate the background light intensity, and then use the Hilbert transform to recover the phase information of the sample. Compared with the phase recovery method commonly used in off-axis interference, the present invention does not require high-pass filtering, high-frequency information is preserved intact, and the phase recovery rate is fast, and the imaging method is applicable to all off-axis interference, including slight off-axis interference. The invention has wide practical value and application prospect in phase microscopy, especially in the application fields of transparent samples such as biological cell phase imaging and phase measurement.

Description

一种两步衍射相位成像方法及对应相位恢复方法A Two-step Diffraction Phase Imaging Method and Corresponding Phase Restoration Method

技术领域technical field

本发明属于干涉显微成像技术领域,具体涉及一种基于光栅衍射的两步衍射相位显微成像方法以及相应的相位恢复运算方法。The invention belongs to the technical field of interference microscopic imaging, and in particular relates to a two-step diffraction phase microscopic imaging method based on grating diffraction and a corresponding phase recovery operation method.

背景技术Background technique

光学显微技术为微观事物的观察开启了一扇大门,在生物学以及医学等领域发挥了重要作用。众多的生物样品,如活细胞,大部分是透明的,表现为相位物体。利用相位与强度之间转换的相位成像技术可对这些样品进行无损伤的清晰成像。目前,干涉相位显微技术是其中的主流技术,具有测量速度快、分辨率高等优点。Optical microscopy technology has opened a door for the observation of microscopic things, and has played an important role in the fields of biology and medicine. Numerous biological samples, such as living cells, are mostly transparent and appear as phase objects. These samples can be imaged clearly and without damage using phase imaging techniques that convert between phase and intensity. At present, interferometric phase microscopy is the mainstream technology, which has the advantages of fast measurement speed and high resolution.

2004年美国Gabriel Popescu教授提出傅里叶相位显微技术,利用样品的散射光与非散射光分别作为物场与参考场,使之发生共几何光路同轴干涉,结合相移技术,采集多幅干涉图以实现相位成像。类似技术还有美国专利技术US2009290156(A1)(空间光干涉显微镜与细胞组织的傅里叶变换光散射传输方法)。该类技术相位成像高度稳定,相位恢复运算简便,不足的是精确调控相移在实际中是比较困难的,而且多次相移也不利于样品的动态实时测量。相比之下,离轴干涉具有单次拍摄特性,可以很好地用于相位物体快现象的研究。如麻省理工学院专利技术CN20110374950.7(用于希尔伯特相位成像的系统和方法),它基于典型的马赫-曾德尔干涉光路,利用希尔伯特积分变换处理单幅干涉图以实现干涉相位成像。又如2006年瑞士Lyncee Tec SA公司基于离轴干涉首次推出了数字全息显微镜(DHM-1000),可直接观测样品的三维形貌和相位分布。然而此类技术中物光与参考光采用分离光路干涉,易受外界振动、环境干扰等影响。对此,共光路的离轴干涉相位成像被提出。如衍射相位显微技术以及它的延伸技术利用光栅的衍射特性在不牺牲稳定性的前提下,实现了快速成像。但它与其他离轴干涉一样,不能够充分利用CCD的分辨率和空间带宽,而且在相位恢复过程中需要通过高通滤波消除背景像,容易造成高频信息的缺失。继而,一类结合相移技术的轻微离轴干涉技术被提出,如美国杜克大学Adam Wax教授通过控制两偏振片实现的两步轻微离轴干涉。该技术在相位恢复运算中采用两干涉图样相减消除不需要的背景像,无需高通滤波保证了样品信息的完整。但是相移需要事后通过拟合背景条纹确定,一定程度上增加了相位恢复的复杂性。另外,此技术采用的是双光路的干涉显微,不具备共光路优势。In 2004, Professor Gabriel Popescu of the United States proposed Fourier phase microscopy technology, which uses the scattered light and non-scattered light of the sample as the object field and the reference field respectively, so that coaxial interference of co-geometric optical paths occurs, and combined with phase shifting technology, multiple images are collected. Interferograms for phase imaging. Similar technology also has US patent technology US2009290156 (A1) (Spatial Light Interference Microscope and Cell Tissue Fourier Transform Light Scattering Transmission Method). The phase imaging of this type of technology is highly stable, and the phase recovery operation is simple. The disadvantage is that it is difficult to precisely control the phase shift in practice, and multiple phase shifts are not conducive to the dynamic real-time measurement of the sample. In contrast, off-axis interferometry has a single-shot property, which can be well used for the study of fast phenomena in phase objects. For example, MIT patent technology CN20110374950.7 (system and method for Hilbert phase imaging), it is based on a typical Mach-Zehnder interference optical path, and uses Hilbert integral transformation to process a single interferogram to achieve Interferometric phase imaging. Another example is the digital holographic microscope (DHM-1000) first launched by Lyncee Tec SA in Switzerland in 2006 based on off-axis interference, which can directly observe the three-dimensional shape and phase distribution of samples. However, in this type of technology, the object light and the reference light use separate optical paths to interfere, which is easily affected by external vibration and environmental interference. In this regard, off-axis interferometric phase imaging with a common optical path is proposed. For example, the diffraction phase microscopy technique and its extended techniques utilize the diffraction characteristics of gratings to achieve fast imaging without sacrificing stability. However, like other off-axis interferences, it cannot make full use of the resolution and spatial bandwidth of the CCD, and it needs to eliminate the background image through high-pass filtering during the phase recovery process, which may easily cause the loss of high-frequency information. Then, a kind of slight off-axis interference technology combined with phase shift technology was proposed, such as the two-step slight off-axis interference achieved by Professor Adam Wax of Duke University in the United States by controlling two polarizers. In the phase recovery operation, the technology uses the subtraction of two interference patterns to eliminate unnecessary background images, without the need for high-pass filtering to ensure the integrity of sample information. However, the phase shift needs to be determined by fitting the background fringes afterwards, which increases the complexity of phase recovery to a certain extent. In addition, this technology uses the interference microscope with two optical paths, which does not have the advantage of a common optical path.

综上所述,现有技术中可从单幅离轴干涉图解调相位信息,但离轴干涉不能充分利用CCD空间带宽,常用的背景像高通滤波也会造成高频信息缺失;虽然也有一些技术采用两幅干涉图,如文中提到的Adam Wax提出的两步轻微离轴干涉,但采用的是双光路干涉成像系统,不稳定,且需要器件来实现相移,并需要单独测量。To sum up, in the prior art, the phase information can be demodulated from a single off-axis interferogram, but off-axis interferometry cannot make full use of the spatial bandwidth of the CCD, and the commonly used background image high-pass filter will also cause the loss of high-frequency information; although there are some The technology uses two interferograms, such as the two-step slight off-axis interference proposed by Adam Wax mentioned in the article, but it uses a dual-optical path interferometric imaging system, which is unstable and requires devices to achieve phase shift and needs to be measured separately.

发明内容Contents of the invention

本发明的目的在于提供一种两步衍射相位成像方法及对应相位恢复方法,以充分利用CCD空间带宽和免除背景像高通滤波,使同时适用于离轴干涉和轻微离轴干涉,增强相位成像的稳定性、精确度和效率。The purpose of the present invention is to provide a two-step diffraction phase imaging method and a corresponding phase recovery method, to make full use of the CCD spatial bandwidth and avoid background image high-pass filtering, so that it is suitable for both off-axis interference and slight off-axis interference, and enhances the phase imaging Stability, precision and efficiency.

为了解决以上技术问题,本发明利用光栅衍射特性的两步衍射相位成像和相位恢复技术,具体技术方案如下:In order to solve the above technical problems, the present invention utilizes the two-step diffraction phase imaging and phase recovery technology of grating diffraction characteristics, and the specific technical scheme is as follows:

一种两步衍射相位成像方法,其特征在于包括以下步骤:A two-step diffraction phase imaging method is characterized in that comprising the following steps:

第一步,使激光束通过显微系统形成放大的显微像,然后通过位于成像屏IP上的光栅(12),从而分成许多级包含显微图像信息的衍射光;In the first step, the laser beam passes through the microscopic system to form an enlarged microscopic image, and then passes through the grating (12) located on the imaging screen IP, thereby being divided into many levels of diffracted light containing microscopic image information;

第二步,所述衍射光通过第三透镜(13)后进行傅里叶变换,在傅里叶平面,利用第一挡板(16)挡住空间光调制器(14)中-1级衍射光滤波窗口,只允许+1级衍射光全部通过,0级衍射光低通滤波,然后+1级与0级衍射光通过第四透镜(15)进行傅里叶逆变换,完成了+1级与0级衍射光整个滤波,他们分别作为样品光与参考光,在CCD(18)上形成第一幅干涉图样;In the second step, the diffracted light is subjected to Fourier transform after passing through the third lens (13), and in the Fourier plane, the first baffle plate (16) is used to block the -1 order diffracted light in the spatial light modulator (14) The filter window only allows the +1 order diffracted light to pass through completely, the 0 order diffracted light is low-pass filtered, and then the +1 order and 0 order diffracted light are carried out Fourier inverse transform through the fourth lens (15), completing the +1 order and 0 order diffracted light. The 0th-order diffracted light is completely filtered, and they are respectively used as sample light and reference light to form the first interference pattern on the CCD (18);

第三步,在傅里叶平面,撤掉第一挡板(16),采用第二挡板(17)挡住空间光调制器(14)中+1级衍射光滤波窗口,只允许-1级和0级衍射光通过,然后通过第四透镜(15),在CCD(18)上形成第二幅干涉图样。In the third step, on the Fourier plane, the first baffle (16) is removed, and the second baffle (17) is used to block the +1 order diffracted light filter window in the spatial light modulator (14), allowing only -1 order and the 0th-order diffracted light pass through, and then pass through the fourth lens (15), forming a second interference pattern on the CCD (18).

一种两步衍射相位成像方法的对应相位恢复方法,其特征在于包括以下步骤:A corresponding phase recovery method of a two-step diffraction phase imaging method, characterized in that it comprises the following steps:

第一步,记录两干涉图The first step is to record two interferograms

所述光栅衍射的0级与+1级衍射光形成干涉图样为The interference pattern formed by the 0th order and +1st order diffracted light of the grating is

其中,IS,IR分别为物光波和参考光波强度,这两者之和I0=IS+IR为背景光强,为与样品有关的空间变化相位,k为载波条纹的空间频率。所述光栅衍射的0级与-1级衍射光形成的干涉图样为Among them, I S , I R are the intensity of the object light wave and the reference light wave respectively, and the sum of the two I 0 = I S + I R is the background light intensity, is the spatially varying phase associated with the sample, and k is the spatial frequency of the carrier fringe. The interference pattern formed by the 0-order and -1-order diffracted light diffracted by the grating is

第二步,计算两干涉图样之差消除背景光强The second step is to calculate the difference between the two interference patterns to eliminate the background light intensity

第三步,获取与相位相关的复解析信号The third step is to obtain the complex analysis signal related to the phase

首先对式(3)进行希尔伯特变换First, carry out the Hilbert transform on formula (3)

其中,HT为希尔伯特变换;Among them, HT is Hilbert transform;

进而复解析信号为Then the complex analysis signal is

Z=HT(I+1-I-1)+j·[-(I+1-I-1)] (5)Z=HT(I +1 -I -1 )+j[-(I +1 -I -1 )] (5)

其中,j为虚数单位;Among them, j is the imaginary unit;

第四步,求解样品包裹相位The fourth step is to solve the sample wrapping phase

其中,Im与Re分别表示复数的虚部和实部;Among them, Im and Re represent the imaginary part and the real part of the complex number respectively;

第五步,对(6)式通过解包裹运算获取真实连续的样品相位。The fifth step is to obtain the real continuous sample phase by unwrapping the formula (6).

利用两干涉图之差来消除不需要的背景光强,无需高通滤波,以保证样品信息的完整性,从而适用于离轴和轻微离轴干涉。Use the difference between the two interferograms to eliminate unwanted background light intensity, without high-pass filtering, to ensure the integrity of the sample information, so it is suitable for off-axis and slight off-axis interference.

本发明的工作原理如下:激光器发出的光束沿着竖直方向向前传输透过偏振片,保证光束为线偏振光,然后传输通过由第一透镜、针孔空间滤波器与第二透镜组成的扩束准直系统,经扩束准直后的光束入射至由样品、可调载物台、显微物镜及反射镜组成的显微系统,从而形成放大的显微像;经显微系统出射的光束已转为平行光束,然后沿着水平方向继续传输至中继镜进行校正处理,之后通过光圈进行光束控制,并把显微图像复制到成像屏IP上。同时一光栅置于成像屏IP上,可获取包含图像全部空间信息的多级衍射,然后衍射光通过由第三透镜、空间光调制器与第四透镜组成的标准4f空间滤波系统分离出+1级与0级衍射光或是-1级与0级衍射光。具体为:首先在第三透镜的傅里叶平面FP采用第一挡板挡住空间光调制器中-1级衍射光滤波窗口,只允许+1级衍射光全部通过,0级衍射光低通滤波。根据空间滤波的特性,图像的精细结构以及突变部分主要是由高频成分所引起,由此经低通滤波的0级衍射光丢失了图像的高频信息,那么经所述滤波系统后的0级和+1级衍射光可分别作为参考光和样品光,然后在CCD上形成干涉图样。其次,撤掉第一挡板,采用第二挡板挡住空间光调制器中+1级衍射光滤波窗口,允许-1级衍射光全部通过,0级衍射光低通滤波,分离出的这两光束在CCD上形成第二幅干涉图样。然后两干涉图样相减消除不需要的背景光强,对其结果应用希尔伯特变换获取与样品相关的复解析信号,最后解调出样品相位,从而完成相位成像。The working principle of the present invention is as follows: the light beam emitted by the laser transmits forward along the vertical direction through the polarizer to ensure that the light beam is linearly polarized light, and then transmits through the first lens, the pinhole spatial filter and the second lens. Beam expansion and collimation system, the beam after beam expansion and collimation enters the microscopic system composed of sample, adjustable stage, microscopic objective lens and mirror, thus forming an enlarged microscopic image; exiting through the microscopic system The light beam has been converted into a parallel beam, and then continues to be transmitted to the relay mirror along the horizontal direction for correction processing, and then the beam is controlled by the aperture, and the microscopic image is copied to the imaging screen IP. At the same time, a grating is placed on the imaging screen IP, which can obtain multi-level diffraction that contains all the spatial information of the image, and then the diffracted light is separated by a standard 4f spatial filter system composed of the third lens, spatial light modulator and fourth lens +1 order and 0 order diffracted light or -1 order and 0 order diffracted light. Specifically: first, the first baffle is used on the Fourier plane FP of the third lens to block the filter window of the -1st order diffracted light in the spatial light modulator, only allowing the +1st order diffracted light to pass through, and the 0th order diffracted light to be low-pass filtered . According to the characteristics of spatial filtering, the fine structure and sudden changes of the image are mainly caused by high-frequency components, so the 0-order diffracted light through low-pass filtering loses the high-frequency information of the image, then the 0-order diffracted light after the filtering system Order and +1 order diffracted light can be used as reference light and sample light respectively, and then form an interference pattern on the CCD. Secondly, the first baffle is removed, and the second baffle is used to block the filter window of the +1 order diffracted light in the spatial light modulator, allowing all the -1 order diffracted light to pass through, and the 0th order diffracted light to be low-pass filtered, and the separated two The beam forms a second interference pattern on the CCD. Then the two interference patterns are subtracted to eliminate the unnecessary background light intensity, the Hilbert transform is applied to the result to obtain the complex analysis signal related to the sample, and finally the phase of the sample is demodulated to complete the phase imaging.

本发明具有有益效果。1、本发明采用类似衍射相位显微成像光路,具有共光路特征,高度稳定,实验可重复进行;2、本发明采用合适的空间光调制器先允许光栅衍射+1级与0级光通过并形成第一幅干涉条纹,然后允许光栅衍射-1级与0级光通过并形成第二幅干涉条纹,无需相移,从而避免了相移精确调控的困难;3、本发明通过选择不同的衍射光栅,可实现完全离轴和利用CCD空间带宽的轻微离轴干涉的切换,因为光栅常数决定了两干涉光波的倾斜角;4、本发明采用两干涉图样相减以消除背景像,无需要求干涉图样中的背景像、实像和共轭像在频谱面上完全分离,相位恢复方法可适用于传统离轴和轻微离轴干涉;5、本发明在整个相位恢复过程中,首先运用代数运算消除背景光,不会造成高频信息丢失,相比常用高通滤波方法会获得更丰富的信息,然后运用一次希尔伯特变换获取与样品相关的复解析信号,运算速率快,利于样品实时相位信息的提取以及快现象的研究。因此本发明应用面广,具有很好的实用价值。The invention has beneficial effects. 1. The present invention adopts a diffraction-like phase microscopic imaging optical path, which has the characteristics of a common optical path, is highly stable, and the experiment can be repeated; 2. The present invention uses a suitable spatial light modulator to allow grating diffraction +1-order and 0-order light to pass through and Form the first interference fringe, then allow the grating diffraction-1st order and 0th order light to pass through and form the second interference fringe without phase shift, thus avoiding the difficulty of precise phase shift regulation; 3. The present invention selects different diffraction The grating can realize switching between completely off-axis and slight off-axis interference using the CCD space bandwidth, because the grating constant determines the inclination angle of the two interfering light waves; 4. The present invention uses the subtraction of two interference patterns to eliminate the background image without requiring interference The background image, real image and conjugate image in the pattern are completely separated on the frequency spectrum, and the phase recovery method can be applied to traditional off-axis and slight off-axis interference; 5. In the whole phase recovery process of the present invention, the algebraic operation is firstly used to eliminate the background Compared with the common high-pass filtering method, more information can be obtained, and then a Hilbert transform is used to obtain the complex analysis signal related to the sample. The calculation speed is fast, which is beneficial to the real-time phase information of the sample. Extraction and the study of fast phenomena. Therefore, the present invention has a wide range of applications and has good practical value.

附图说明Description of drawings

图1是本发明两步衍射相位成像方法对应的光路示意图。Fig. 1 is a schematic diagram of the optical path corresponding to the two-step diffraction phase imaging method of the present invention.

图中:1:激光器;2:偏振片;3:第一透镜;4:针孔空间滤波器;5:第二透镜;6:样品;7:可调载物台;8:物镜;9:反射镜;10:中继镜;11:光圈;12:光栅;13:第三透镜;14:空间光调制器;15:第四透镜;16:第一挡板;17:第二挡板;18:CCD;IP:成像平面;FP:傅里叶平面;+1:+1级衍射光滤波窗口;-1:-1级衍射光滤波窗口;0级:0级衍射光滤波窗口;实黑线为+1级衍射光线;虚线为0级衍射光线;双点划线为-1级衍射光线。In the figure: 1: laser; 2: polarizer; 3: first lens; 4: pinhole spatial filter; 5: second lens; 6: sample; 7: adjustable stage; 8: objective lens; 9: Mirror; 10: relay mirror; 11: aperture; 12: grating; 13: third lens; 14: spatial light modulator; 15: fourth lens; 16: first baffle; 17: second baffle; 18: CCD; IP: Imaging plane; FP: Fourier plane; +1: +1 order diffraction light filter window; -1: -1 order diffraction light filter window; 0 order: 0 order diffraction light filter window; solid black Lines are +1 order diffracted rays; dotted lines are 0th order diffracted rays; double dotted lines are -1 order diffracted rays.

具体实施方式detailed description

结合图1,本发明的两步衍射相位成像方法是利用光栅的衍射特性和空间滤波系统实现的。Referring to Fig. 1, the two-step diffraction phase imaging method of the present invention is realized by utilizing the diffraction characteristics of the grating and the spatial filtering system.

激光器1发出的光束通过偏振片2转换为完全的线偏振光,然后入射至由第一透镜3、针孔空间滤波器4与第二透镜5组成的扩束准直系统的光接受面,经扩束准直系统后的出射光束向前传输至样品6及可调载物台7,从而成为携带样品信息的光束,然后通过显微物镜8进行放大并继续向前传输至反射镜9转为平行光束。其中样品6、可调载物台7、显微物镜8与反射镜9可看作为一倒置的显微镜系统。通过显微镜系统的出射光束沿着水平方向依次向前传输通过中继镜10进行校正处理和通过光圈11进行光束控制,然后继续向前传输至成像屏IP,那么经显微镜系统放大的显微像已复制到成像屏IP上。同时光栅12置于成像屏IP上,经光栅衍射,可分成许多级包含显微图像信息的衍射光,然后衍射光继续沿着水平方向向前传输通过由第三透镜13、空间光调制器14与第四透镜15组成的标准4f空间滤波系统。其中空间光调制器14位于第三透镜的傅里叶平面上,有3个滤波窗口:依次为+1级、0级与-1级衍射光滤波窗口,用于分离出+1级与0级衍射光或是-1级与0级衍射光。具体操作如下:首先,采用第一挡板16挡住空间光调制器14中-1级滤波窗口,经过第三透镜13的出射衍射光束向前传输至空间光调制器14,+1级衍射光全部通过,0级衍射光低通滤波,这两光束分别作为物光与参考光,然后继续向前传输透过第四透镜15,在CCD18上形成第一幅干涉图样。其次,撤掉第一挡板16,采用第二挡板17挡住空间光调制器14中+1级滤波窗口,选取出-1级与0级衍射光,分别作为物光与参考光,在CCD18上形成第二幅干涉图样。这样就完成了两幅干涉图样的采集。The beam emitted by the laser 1 is converted into completely linearly polarized light by the polarizer 2, and then enters the light receiving surface of the beam expander collimation system composed of the first lens 3, the pinhole spatial filter 4 and the second lens 5, and passes through The outgoing beam after the beam expander and collimator system is transmitted forward to the sample 6 and the adjustable stage 7, thus becoming the beam carrying the sample information, and then enlarged by the microscopic objective lens 8 and transmitted forward to the mirror 9 to turn into parallel beams. The sample 6, the adjustable stage 7, the microscope objective lens 8 and the reflection mirror 9 can be regarded as an inverted microscope system. The outgoing light beam passing through the microscope system transmits forward sequentially along the horizontal direction through the relay lens 10 for correction processing and beam control through the aperture 11, and then continues to transmit forward to the imaging screen IP, then the microscopic image magnified by the microscope system has been Copy it to the imaging screen IP. At the same time, the grating 12 is placed on the imaging screen IP, which can be divided into many levels of diffracted light containing microscopic image information through grating diffraction, and then the diffracted light continues to transmit forward along the horizontal direction through the third lens 13 and the spatial light modulator 14. A standard 4f spatial filtering system composed of the fourth lens 15. Wherein the spatial light modulator 14 is located on the Fourier plane of the third lens, and has three filter windows: +1 order, 0 order and -1 order diffracted light filter windows for separating +1 order and 0 order The diffracted light is the -1 order and 0 order diffracted light. The specific operation is as follows: first, the first baffle plate 16 is used to block the -1st order filter window in the spatial light modulator 14, and the outgoing diffracted light beam passing through the third lens 13 is forwardly transmitted to the spatial light modulator 14, and the +1st order diffracted light is completely Through the low-pass filtering of the 0th-order diffracted light, the two light beams are used as the object light and the reference light respectively, and then continue to pass through the fourth lens 15 to form the first interference pattern on the CCD18. Secondly, the first baffle 16 is removed, and the second baffle 17 is used to block the +1-order filter window in the spatial light modulator 14, and the -1-order and 0-order diffracted light are selected as object light and reference light respectively, and are used in the CCD18 A second interference pattern is formed on it. This completes the acquisition of two interferograms.

所述的光栅12光栅常量这个几何参数决定了光栅+1级以及-1级衍射光的衍射角,从而决定了干涉图样的载波频率,那么也就决定了干涉记录方式:完全离轴以及轻微离轴。The geometric parameter of the grating 12 grating constant determines the diffraction angle of the grating +1 order and -1 order diffracted light, thus determines the carrier frequency of the interference pattern, and then determines the interference recording method: completely off-axis and slightly off-axis axis.

本发明一种两步衍射相位成像方法相对应的相位恢复方法,具体实施如下:A phase recovery method corresponding to a two-step diffraction phase imaging method of the present invention is specifically implemented as follows:

所述的光栅衍射+1级与0级衍射光以及-1级与0级衍射光形成的两步干涉图样可分别表示为:The two-step interference patterns formed by the grating diffracting +1st order and 0th order diffracted light and -1st order and 0th order diffracted light can be expressed as:

其中,IS,IR分别为物光波(+1级或-1级衍射光)和参考光波(0级衍射光)强度,这两者之和:I0=IS+IR为背景光强,为与样品有关的空间变化相位,k为载波条纹的空间频率。Among them, I S and I R are the intensity of the object light wave (+1 order or -1 order diffracted light) and reference light wave (0 order diffracted light) respectively, the sum of the two: I 0 = I S + I R is the background light powerful, is the spatially varying phase associated with the sample, and k is the spatial frequency of the carrier fringe.

然后两干涉图样相减消除背景光强,有Then the two interference patterns are subtracted to eliminate the background light intensity, and there is

对上式进行希尔伯特变换获取与样品相位相关的复解析信号Perform the Hilbert transform on the above formula to obtain the complex analytical signal related to the sample phase

其中,HT为希尔伯特变换,进而复解析信号可表示为Among them, HT is the Hilbert transform, and then the complex analysis signal can be expressed as

Z=HT(I+1-I-1)+j·[-(I+1-I-1)] (5)Z=HT(I +1 -I -1 )+j[-(I +1 -I -1 )] (5)

其中,j为虚数单位。那么样品的包裹相位分布可通过下式计算得到Among them, j is the imaginary unit. Then the package phase distribution of the sample can be calculated by the following formula

其中,Im与Re分别表示复数的虚部和实部。最后通过相位解包裹运算就可完成本发明相位成像的目的。Among them, Im and Re respectively represent the imaginary part and the real part of the complex number. Finally, the purpose of the phase imaging of the present invention can be achieved through the phase unwrapping operation.

Claims (3)

1.一种两步衍射相位成像方法,其特征在于包括以下步骤:1. a two-step diffraction phase imaging method is characterized in that comprising the following steps: 第一步,激光束通过显微系统形成放大的显微像,所述显微系统由样品(6)、可调载物台(7)、显微物镜(8)及反射镜(9)组成;然后所述显微像通过位于所述显微系统之后的成像屏IP上的光栅(12),从而分成许多级包含显微图像信息的衍射光;In the first step, the laser beam forms an enlarged microscopic image through a microscopic system, which consists of a sample (6), an adjustable stage (7), a microscopic objective lens (8) and a mirror (9) ; Then the microscopic image passes through the grating (12) on the imaging screen IP behind the microscopic system, thereby being divided into many levels of diffracted light that contains the microscopic image information; 第二步,所述衍射光通过所述成像屏IP之后的第三透镜(13)后进行傅里叶变换,在所述第三透镜(13)的傅里叶平面FP上,利用第一挡板(16)挡住空间光调制器(14)中-1级衍射光滤波窗口,只允许+1级衍射光全部通过,0级衍射光低通滤波,然后+1级衍射光与0级衍射光通过所述傅里叶平面FP后面的第四透镜(15)进行傅里叶逆变换,完成了+1级衍射光与0级衍射光整个滤波,他们分别作为样品光与参考光,在CCD(18)上形成第一幅干涉图样;In the second step, the diffracted light is subjected to Fourier transform after passing through the third lens (13) behind the imaging screen IP, and on the Fourier plane FP of the third lens (13), utilize the first stop The plate (16) blocks the filter window of the -1st order diffracted light in the spatial light modulator (14), allowing only the +1st order diffracted light to pass through, the 0th order diffracted light is low-pass filtered, and then the +1st order diffracted light and the 0th order diffracted light Carry out Fourier inverse transform by the fourth lens (15) behind described Fourier plane FP, have finished the whole filtering of +1 order diffracted light and 0 order diffracted light, they are respectively as sample light and reference light, in CCD ( 18) Form the first interference pattern on the surface; 第三步,在所述傅里叶平面FP上,撤掉所述第一挡板(16),采用第二挡板(17)挡住所述空间光调制器(14)中+1级衍射光滤波窗口,只允许-1级衍射光和0级衍射光通过,然后通过所述第四透镜(15),在所述CCD(18)上形成第二幅干涉图样。In the third step, on the Fourier plane FP, the first baffle (16) is removed, and the second baffle (17) is used to block the +1 order diffracted light in the spatial light modulator (14) The filter window allows only -1 order diffracted light and 0 order diffracted light to pass through, and then passes through the fourth lens (15) to form a second interference pattern on the CCD (18). 2.根据权利要求1所述的一种两步衍射相位成像方法的对应相位恢复方法,其特征在于包括以下步骤:2. the corresponding phase recovery method of a kind of two-step diffraction phase imaging method according to claim 1, is characterized in that comprising the following steps: 第一步,记录两干涉图The first step is to record two interferograms 所述光栅衍射的0级与+1级衍射光形成干涉图样为The interference pattern formed by the 0th order and +1st order diffracted light of the grating is 其中,IS,IR分别为物光波和参考光波强度,这两者之和I0=IS+IR为背景光强,为与样品有关的空间变化相位,k为载波条纹的空间频率;所述光栅衍射的0级与-1级衍射光形成的干涉图样为Among them, I S , I R are the intensity of the object light wave and the reference light wave respectively, and the sum of the two I 0 = I S + I R is the background light intensity, is the spatially varying phase related to the sample, and k is the spatial frequency of the carrier fringe; the interference pattern formed by the 0-order and -1-order diffracted light of the grating diffraction is 第二步,计算两干涉图样之差消除背景光强The second step is to calculate the difference between the two interference patterns to eliminate the background light intensity 第三步,获取与相位相关的复解析信号The third step is to obtain the complex analysis signal related to the phase 首先对式(3)进行希尔伯特变换First, carry out the Hilbert transform on formula (3) 其中,HT为希尔伯特变换;Among them, HT is Hilbert transform; 进而复解析信号为Then the complex analysis signal is Z=HT(I+1-I-1)+j·[-(I+1-I-1)] (5)Z=HT(I +1 -I -1 )+j[-(I +1 -I -1 )] (5) 其中,j为虚数单位;Among them, j is the imaginary unit; 第四步,求解样品包裹相位The fourth step is to solve the sample wrapping phase 其中,Im与Re分别表示复数的虚部和实部;Among them, Im and Re represent the imaginary part and the real part of the complex number respectively; 第五步,对(6)式通过解包裹运算获取真实连续的样品相位。The fifth step is to obtain the real continuous sample phase by unwrapping the formula (6). 3.根据权利要求2所述的一种两步衍射相位成像方法的对应相位恢复方法,其特征在于:利用两干涉图之差来消除不需要的背景光强,无需高通滤波,以保证样品信息的完整性,从而适用于离轴和轻微离轴干涉。3. the corresponding phase recovery method of a kind of two-step diffraction phase imaging method according to claim 2, is characterized in that: utilize the difference of two interferograms to eliminate unnecessary background light intensity, without high-pass filter, to guarantee sample information Integrity, thus suitable for off-axis and slight off-axis interference.
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