CN104353194A - High-power VCSEL laser treatment device with skin cooling function - Google Patents
High-power VCSEL laser treatment device with skin cooling function Download PDFInfo
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- CN104353194A CN104353194A CN201410643581.0A CN201410643581A CN104353194A CN 104353194 A CN104353194 A CN 104353194A CN 201410643581 A CN201410643581 A CN 201410643581A CN 104353194 A CN104353194 A CN 104353194A
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- 238000001816 cooling Methods 0.000 title claims abstract description 60
- 238000013532 laser treatment Methods 0.000 title abstract description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 94
- 239000004065 semiconductor Substances 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 42
- 239000013049 sediment Substances 0.000 claims description 67
- 238000002647 laser therapy Methods 0.000 claims description 29
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 230000003667 anti-reflective effect Effects 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 239000000565 sealant Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
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- 238000004519 manufacturing process Methods 0.000 abstract description 4
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- 238000001356 surgical procedure Methods 0.000 description 4
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- 239000003814 drug Substances 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
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- 230000001225 therapeutic effect Effects 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
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- 229920002379 silicone rubber Polymers 0.000 description 2
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- 230000003247 decreasing effect Effects 0.000 description 1
- 230000035617 depilation Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
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- 238000002430 laser surgery Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
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- Radiation-Therapy Devices (AREA)
- Laser Surgery Devices (AREA)
- Semiconductor Lasers (AREA)
Abstract
The invention provides a high-power VCSEL laser treatment device with a skin cooling function. The high-power VCSEL laser treatment device comprises an VCSEL array packed on a heat sink of a laser device, an optical transmission component in front of a light-emitting surface of the VCSEL array and a high-heat-conduction optical window piece attached to the light-emitting port end of the optical transmission component, cooling conduction metal pieces are integrally formed on the outside of the heat sink of the laser device, the outside of the optical transmission component and the outside of the high-heat-conduction optical window piece, one or more semi-conductor refrigerating pieces are arranged between each cooling conduction metal piece and the heat sink of the laser device, the heat end of each semi-conductor refrigerating piece makes contact with the heat sink of the laser device, and the cold end of each semi-conductor refrigerating piece makes contact with the corresponding cooling conduction metal piece. According to the high-power VCSEL laser treatment device, the semi-conductor refrigerating pieces and the heat sink of the VCSEL array are shared, and the internal structure of the device is simplified. Accordingly, the laser treatment device has the advantages of being simple in structure, easy to manufacture, high in reliability and the like and has wide application prospects in the laser medical field.
Description
Technical field
The present invention relates to a kind of semiconductor laser treatment apparatus, particularly relate to a kind of with vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, be called for short VCSEL) as light source, the high-power semiconductor laser therapy equipment with skin refrigerating function, belong to medical laser instrument technical field.
Background technology
In the past twenty years, high-power semiconductor laser is widely used in the field such as skin surgery and laser beautifying surgery, such as depilation, skin care, wrinkle removal, pigment treatment, physiotherapy etc.In the treatment occasion of the overwhelming majority, need on the one hand to inject enough large laser energy to skin, also will prevent high power laser light burning to skin on the other hand, thus most device for laser therapy needs to coordinate skin chiller to use.
In traditional high-power semiconductor laser, using the contact skin chiller that semiconductor chilling plate and high heat conduction optical window sheets are formed, is a kind of conventional project organization.Such as, disclosed in Chinese patent ZL 201220625361.1 and ZL 201320713701.0 semiconductor laser structure.Wherein, in conventional high heat conduction optical window sheets, being most widely used especially with sapphire contact window.Use sapphire as the contact window of skin treatment device, history the earliest can trace back to the nineties in last century, and detailed construction can see the record in U.S. patent documents US6273885B1.
Existing high-power semiconductor laser widely uses edge-emission semiconductor laser array as LASER Light Source.Edge-emission semiconductor laser array is a kind of laminated structure, there is the laser heat sink structure of independence and complexity, thus can not heat sink public with semiconductor chilling plate, so just make skin cooling structure and laser structure need to design respectively independently cooling heat sink and water through structure, therefore the structure of therapy equipment becomes very complicated.The such as medical and beauty treatment of bilateral refrigeration mode disclosed in Chinese patent ZL201220625361.1 Laser Diode System; comprise two water flowing blocks; wherein; first water flowing block is used for carrying out Conduction cooled to contact hole; second water flowing block is used for noise spectra of semiconductor lasers array and carries out Conduction cooled; the structure of this bilateral water block causes the internal structure complexity of semiconductor laser, laser therapeutic head volume comparatively large, usually can affect the visual field of operator, increase operating difficulty when skin treating.Therefore, if compact, easy to operate laser treatment handle can be designed, operation easier during laser surgery will greatly be reduced.
In recent years, along with the manufacturing technology of vertical cavity surface emitting laser (being called for short VCSEL) is ripe gradually, VCSEL achieves the high-power output close to edge-emission semiconductor laser gradually.Simultaneously due to the structure of its uniqueness, the plurality of advantages existed in its application, as high reliability, high temperature resistant, uniform optical distribution, surperficial high reflectance, wavelength temperature are floated little etc.In laser medicine field, vertical cavity surface emitting laser will replace the laser therapeutic equipment that traditional edge-emission semiconductor laser becomes following main gradually.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of high power VCSEL device for laser therapy with skin refrigerating function.
In order to realize foregoing invention object, present invention employs following technical scheme:
A kind of high power VCSEL device for laser therapy with skin refrigerating function, comprise laser thermal sediment, the VCSEL array be encapsulated on described laser thermal sediment, be arranged on the optical delivery device in described VCSEL array exiting surface front and be arranged on the high heat conduction optical window sheets of described optical delivery device light-emitting window end
Integrated cooling conducting metal pieces is had in the arranged outside of described laser thermal sediment, described optical delivery device and described high heat conduction optical window sheets, and, one or more pieces semiconductor chilling plates are provided with between described cooling conducting metal pieces and described laser thermal sediment, the hot junction of described semiconductor chilling plate contacts with described laser thermal sediment, and the cold junction of described semiconductor chilling plate contacts with described cooling conducting metal pieces.
Wherein more preferably, described cooling conducting metal pieces is wrapped in the outside of described high heat conduction optical window sheets, described optical delivery device and described laser thermal sediment;
Described high heat conduction optical window sheets is flush-mounted in the opening of described cooling conducting metal pieces front end; Described optical delivery device is arranged in the cavity of described cooling conducting metal pieces front portion; Described laser thermal sediment is arranged in the cavity at described cooling conducting metal pieces rear portion, and semiconductor chilling plate described in one or more pieces is arranged in the gap between described laser thermal sediment and described cooling conducting metal pieces.
Wherein more preferably, described optical delivery device is arranged in the cavity of described cooling conducting metal pieces front portion by support member, gap place is contacted at described optical delivery device and described support member, and described support member and described laser thermal sediment contact gap place, use fluid sealant to carry out sealing fixing.
Wherein more preferably, described optical delivery device is arranged on the front of described laser thermal sediment and described VCSEL array by fixture.
Wherein more preferably, described optical delivery device is the mirror barrel of inwall polishing or the leaded light cone based on inwall total reflection.
Wherein more preferably, the cross section of the encapsulating face of described laser thermal sediment is the portion circumscribes polygon of a circle, and described encapsulating face is made up of multiple mutual small package plane at an angle, described encapsulating face indent, further, the centre normal of each small package plane intersects at focal position place; All VCSEL chips in described VCSEL array are installed in described each heat sink small package plane respectively, and each described small package plane is for encapsulating one or more VCSEL chip.
Wherein more preferably, the cross section of the incidence surface of described optical delivery device is arc-shaped or arc surface circumscribed polygon.
Wherein more preferably, described high heat conduction optical window sheets is sapphire or optical grade artificial diamond.
Wherein more preferably, the two-sided plating optical anti-reflective film of described high heat conduction optical window sheets.
Wherein more preferably, the indoor design of described laser thermal sediment has MCA.
High power VCSEL semiconductor laser treatment apparatus provided by the invention, adopt VCSEL chip as LASER Light Source, there is the simple laser thermal sediment of structure, by using semiconductor chilling plate, cooling conducting metal pieces and high heat conduction optical window sheets as skin cooling device, and dispelled the heat by VCSEL laser thermal sediment in the hot junction of semiconductor chilling plate, make the heat sink public of semiconductor chilling plate and VCSEL array.This high power VCSEL semiconductor laser treatment apparatus have structure simple, powerful, be easy to manufacture, the plurality of advantages such as reliability is high, environmental suitability is strong, in laser medicine field, as skin surgery, laser beautifying surgical field etc. have broad application prospects.Meanwhile, contact gap place at optical delivery device and support member, and support member and laser thermal sediment contact gap place, use fluid sealant (as silicone rubber) etc. to carry out sealing fixing, waterproof, protection against the tide, dust-proof effect can be reached.
Accompanying drawing explanation
Fig. 1 is the structural representation with the high power VCSEL device for laser therapy of skin refrigerating function provided by the invention;
Fig. 2 is in the second embodiment, the structural representation of VCSEL laser thermal sediment and inwall reflection-type optical transmission apparatus;
Fig. 3 is in the second embodiment, at the structural representation of laser thermal sediment surface encapsulation VCSEL array.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, detailed specific description is carried out to technology contents of the present invention.
Vertical cavity surface emitting laser (VCSEL) is the semiconductor laser of a kind of light direction perpendicular to epitaxial wafer.High power VCSEL laser instrument is the two-dimensional array formed along the VCSEL luminous point of epitaxial wafer surface distributed by hundreds and thousands of, thus has very high Optical output power.The encapsulation of general VCSEL chip is by having in the package substrate of high thermal conductivity by VCSEL chip integral solder at one, then by substrate bond on heat dispersion heat sink, complete the cooling of VCSEL.The encapsulating structure of VCSEL laser instrument, simply heat sink owing to employing structure, make laser thermal sediment and the heat sink public of semiconductor chilling plate become possibility.
The structure of high power VCSEL device for laser therapy provided by the present invention as shown in Figure 1, comprises laser thermal sediment 2, the VCSEL array 4 be made up of multiple VCSEL chip, optical delivery device 8, high heat conduction optical window sheets 6, cooling conducting metal pieces 1 and more semiconductor cooling piece 7.Wherein, VCSEL array 4 is encapsulated on laser thermal sediment 2 by package substrate 3, VCSEL array 4 exiting surface front is provided with optical delivery device 8, and optical delivery device 8 light-emitting window end is provided with high heat conduction optical window sheets 6, at laser thermal sediment 2, the arranged outside of optical delivery device 8 and high heat conduction optical window sheets 6 has integrated cooling conducting metal pieces 1, and, one or more pieces semiconductor chilling plates 7 are provided with between cooling conducting metal pieces 1 and laser thermal sediment 2, the hot junction of semiconductor chilling plate 7 contacts with laser thermal sediment 2, the cold junction of semiconductor chilling plate 7 contacts with cooling conducting metal pieces 1.
In this high power VCSEL device for laser therapy, the skin cooling device consisted of high heat conduction optical window sheets 6, cooling conducting metal pieces 1 and semiconductor chilling plate 7 cools skin, wherein, dispelled the heat by laser thermal sediment 2 in the hot junction of semiconductor chilling plate 7.That is, in this high power VCSEL device for laser therapy, VCSEL array 4 and the public laser thermal sediment 2 of skin cooling device.
Specifically, in the embodiment shown in fig. 1, inner at this high power VCSEL device for laser therapy, cooling conducting metal pieces 1 is wrapped in the outside of high heat conduction optical window sheets 6, optical delivery device 8 and laser thermal sediment 2.High heat conduction optical window sheets 6 is flush-mounted in the opening of cooling conducting metal pieces 1 front end, forms the outlet of laser energy.Optical delivery device 8 is arranged in the cavity of cooling conducting metal pieces 1 front portion by the support member 10 shown in Fig. 1, support member 10 can use the material identical with cooling conducting metal pieces 1, is distributed in time by support member 10 and cooling conducting metal pieces 1 for the heat produced in laser conduction process by optical delivery device 8.Certainly, the support member 10 in Fig. 1 between optical transmitter part 8 and cooling conducting metal pieces 1 also can be one-body molded with cooling conducting metal pieces 1, thus simplify the assembling of whole device for laser therapy.Laser thermal sediment 2 is arranged in the cavity of cooling conducting metal pieces 1 rear portion (side away from skin), one or more pieces semiconductor chilling plates 7 are arranged in the gap between laser thermal sediment 2 and cooling conducting metal pieces 1, for freezing to cooling conducting metal pieces 1; The hot junction of semiconductor chilling plate 7 contacts with laser thermal sediment 2, and the cold junction of semiconductor chilling plate 7 contacts with cooling conducting metal pieces 1, thus is transferred out by laser thermal sediment 2 by the heat sent from cooling conducting metal pieces 1.Laser thermal sediment 2 is simultaneously for VCSEL array 4 and the heat radiation of skin cooling device that is made up of high heat conduction optical window sheets 6, cooling conducting metal pieces 1 and semiconductor chilling plate 7.
Laser thermal sediment 2 inside is provided with MCA 11, the rear portion of laser thermal sediment 2 is provided with water in-out port 12, water in-out port 12 communicates with the MCA 11 of laser thermal sediment 2 inside, for providing cooling water to cool, thus improves the heat exchanger effectiveness of laser thermal sediment 2.
As can be seen here, in this high power VCSEL device for laser therapy, VCSEL array 4 and the public laser thermal sediment 2 of skin cooling device, VCSEL array 4 and semiconductor chilling plate 7 are all dispelled the heat by laser thermal sediment 2, thus under fully heat radiation also can carry out the prerequisite of skin cooling in guarantee, simplify the internal structure of device for laser therapy.
Above the structure that realizes of the skin refrigerating function of high power VCSEL device for laser therapy provided by the invention is described in detail, below other detailed construction in this high power VCSEL device for laser therapy is introduced.
In the first embodiment shown in Fig. 1, the encapsulating face of laser thermal sediment 2 is planes, and multiple VCSEL chip dense arrangement on the encapsulating face of laser thermal sediment 2 forms VCSEL array 4.The exiting surface front of VCSEL array 4 is provided with optical delivery device 8, and specifically, optical delivery device 8 is arranged on the front of laser thermal sediment 2 and VCSEL array 4 by fixture 9 (when using guide-lighting cone, fixture 9 is light cone cover).In order to reach waterproof, protection against the tide, dust-proof effect, contact gap place at optical delivery device 8 and support member 10, and support member 10 and laser thermal sediment 2 contact gap place, fluid sealant (as silicone rubber) etc. can be used to carry out sealing and to fix.
In this embodiment, optical delivery device 8 uses inwall reflection-type optical transmission apparatus, and the light for sending VCSEL array 4 transmits and converges.Because VCSEL is sphere shape light, its angle of divergence less (angle of divergence full-shape is about about 15 ~ 20 degree), its far field light intensity is similar to flat-top distribution, energy even, therefore, compared with edge-emission semiconductor laser, the light that VCSEL launches more easily converges, and is evenly distributed at far-field energy.In addition, this inwall reflection-type optical transmission apparatus, can also by the light reflection of returning from skin treating point reflection on the exiting surface of VCSEL array 4, rely on the reflectance (more than 99.5%) that VCSEL chip surface is high, the exiting surface of VCSEL array 4 can carry out efficient secondary reflection to the reflection ray reflected through skin treating point and inwall reflection-type optical transmission apparatus, substantially increase the utilization rate of laser and the absorbance of skin, improve therapeutic effect.
In actual use, usually choose the mirror barrel of inwall polishing or bore (can be directional light cone or halfpace type light cone etc.) as optical delivery device 8 based on the leaded light of inwall total reflection.Wherein, mirror barrel utilizes inwall direct reflection mode to realize transmission and the convergence of laser point from chip light emitting district to skin treating; Guide-lighting cone utilizes inwall total reflection mode to realize transmission and the convergence of laser point from chip light emitting district to skin treating.In order to improve the light transmission efficiency of guide-lighting cone, can at the incidence surface of leaded light cone and exiting surface evaporation optical anti-reflective film respectively.
In this embodiment, high heat conduction optical window sheets 6 abuts in the light-emitting window end of optical delivery device 8, high heat conduction optical window sheets 6 can select high-termal conductivity, the high light transmittance material such as sapphire or optical grade artificial diamond, in order to strengthen the light transmittance of high heat conduction optical window sheets 6, can also at the two-sided evaporation optical anti-reflective film of this high heat conduction optical window sheets 6.
In sum, in the first embodiment of the present invention, laser thermal sediment 2 pairs of VCSEL array 4 that encapsulating face is plane are used to encapsulate, use inwall reflection-type optical transmission apparatus (such as guide-lighting cone) to carry out Transmission Convergence to laser beam, and by the skin cooling device that high heat conduction optical window sheets 6, cooling conducting metal pieces 1 and semiconductor chilling plate 7 are formed, skin is cooled.Wherein, by simple structural design, make VCSEL array 4 and the public laser thermal sediment 2 of skin cooling device, thus simplify the internal structure of high power VCSEL device for laser therapy.
In the second embodiment of the present invention, the overall structure of high power VCSEL device for laser therapy arranges identical with the first embodiment, only has the encapsulating structure of the encapsulating face of laser thermal sediment 2, VCSEL array 4 and the incidence surface of optical delivery device 8 and the first embodiment distinct.The encapsulating face of laser thermal sediment 2 not only can be arranged to plane as shown in Figure 1, can also be arranged to the polygon encapsulating face shown in Fig. 2, and when the encapsulating face of laser thermal sediment 2 is polygons as shown in Figure 2, the spotlight effect of VCSEL array is better.
As shown in Figures 2 and 3, the cross section of the encapsulating face of laser thermal sediment 2 is portion circumscribes polygons of a circle, is cut in skin treating point for the center of circle outward, take focal length as the arc surface of radius.The encapsulating face of laser thermal sediment 2 is made up of multiple mutual small package plane at an angle, and encapsulating face indent, is similar to the arc of indent.Specifically, the cross section of the encapsulating face of laser thermal sediment 2 is center of circle O with the convergent point at skin treating point place (focus of VCSEL array), take focal length as the portion circumscribes polygon of the circle of radius R, wherein, the centre normal of each small package plane all converges at focus.In actual use, its convergent point can have certain deviation, as long as the centre normal of small package plane can converge near focal point.This laser thermal sediment 2, by by near the beams converge of multiple VCSEL chip to cambered surface home position, realizes multiple VCSEL chips optical collection in one direction.
In this high power VCSEL device for laser therapy, all VCSEL chips in above-mentioned laser thermal sediment 2 pairs of VCSEL array 4 are used to encapsulate.As shown in Figure 3, respectively all VCSEL chips in VCSEL array 4 are installed in each small package plane of arc heat sink 2, and, each small package plane can encapsulate one or more VCSEL chip, the orthographic projection of all VCSEL chips can be made so to be all distributed in focus is center of circle O, be on the excircle of circle of radius R with focal length, further, the centre normal of all VCSEL chips intersects at home position.So the light beam of all VCSEL luminescence units, can intersect at home position along the centre normal direction of each VCSEL chip, realize the superposition of power.
Correspondingly, in this embodiment, the cross section of the incidence surface of optical delivery device 8 can be arc-shaped or arc surface circumscribed polygon.Meanwhile, the inwall of optical delivery device 8 is the center of circle to be parallel to focus, take focal length as the radius of a circle direction of radius be excellent, and the length of optical delivery device 8 is less than the length of VCSEL array 4 focal length.The high efficiency of transmission of laser can be realized by this optical delivery device 8, and to laser, there is certain laser beam compression effect, realize beams converge function.
When the cross section of the incidence surface of optical delivery device 8 is circular arc, the center of circle of its incidence surface is identical with the convergent point of VCSEL array 4, thus make the exiting surface of each VCSEL chip in incidence surface and VCSEL array 4 tangent, the centre normal in VCSEL chip light-emitting face is perpendicular to the incidence surface of optical delivery device 8, the laser of VCSEL chip emission direct projection can enter the inside of optics transmission apparatus 8, further, the angle of divergence of each VCSEL can be compressed.
When the cross section of the incidence surface of optical delivery device 8 is arc surface circumscribed polygon, its incidence surface can be made up of multiple mutual facet at an angle, and its center of circle is concentric with the center of circle of laser thermal sediment 4.Make each facet of optical delivery device 8 corresponding and parallel with the single small package plane of laser thermal sediment 2, the facet that the centre normal of the VCSEL chip be packaged in each small package plane can be made corresponding with it is vertical, thus, make the laser of VCSEL chip emission direct projection can enter the inside of optics transmission apparatus 8, further, the angle of divergence of each VCSEL can be compressed.In addition, the setting of this arc surface circumscribed polygon greatly reduces the distance between VCSEL array 4 and optical delivery device 8, and the laser decreasing gap place is escaped.
In the second embodiment of the present invention, in high power VCSEL semiconductor laser treatment apparatus, do not improve by means of only to skin cooling device, simplify its internal structure, meanwhile, by improving the encapsulation of VCSEL array, effectively improve optical collection and the utilization rate of VCSEL.
In sum, high power VCSEL semiconductor laser treatment apparatus provided by the invention, adopts VCSEL chip as LASER Light Source, has the simple laser thermal sediment of structure.Simultaneously, this high power VCSEL semiconductor laser treatment apparatus uses semiconductor chilling plate, cooling conducting metal pieces and high heat conduction optical window sheets as skin cooling device, the hot junction of semiconductor chilling plate and the public laser thermal sediment of VCSEL array, thus while realizing skin cooling, make the cooling structure of whole device and water through structure become extremely simple.This apparatus structure is simple, powerful, be easy to plurality of advantages such as manufacturing, with low cost, reliability is high, environmental suitability is strong, in laser medicine field, as skin surgery, laser beautifying surgical field etc. have broad application prospects.
Above the high power VCSEL device for laser therapy with skin refrigerating function provided by the present invention is described in detail.For one of ordinary skill in the art, to any apparent change that it does under the prerequisite not deviating from connotation of the present invention, all by formation to infringement of patent right of the present invention, corresponding legal responsibility will be born.
Claims (10)
1. one kind has the high power VCSEL device for laser therapy of skin refrigerating function, it is characterized in that comprising laser thermal sediment, the VCSEL array be encapsulated on described laser thermal sediment, be arranged on the optical delivery device in described VCSEL array exiting surface front and be arranged on the high heat conduction optical window sheets of described optical delivery device light-emitting window end
Integrated cooling conducting metal pieces is had in the arranged outside of described laser thermal sediment, described optical delivery device and described high heat conduction optical window sheets, and, one or more pieces semiconductor chilling plates are provided with between described cooling conducting metal pieces and described laser thermal sediment, the hot junction of described semiconductor chilling plate contacts with described laser thermal sediment, and the cold junction of described semiconductor chilling plate contacts with described cooling conducting metal pieces.
2. high power VCSEL device for laser therapy as claimed in claim 1, is characterized in that:
Described cooling conducting metal pieces is wrapped in the outside of described high heat conduction optical window sheets, described optical delivery device and described laser thermal sediment;
Described high heat conduction optical window sheets is flush-mounted in the opening of described cooling conducting metal pieces front end; Described optical delivery device is arranged in the cavity of described cooling conducting metal pieces front portion; Described laser thermal sediment is arranged in the cavity at described cooling conducting metal pieces rear portion, and semiconductor chilling plate described in one or more pieces is arranged in the gap between described laser thermal sediment and described cooling conducting metal pieces.
3. high power VCSEL device for laser therapy as claimed in claim 2, is characterized in that:
Described optical delivery device is arranged in the cavity of described cooling conducting metal pieces front portion by support member, gap place is contacted at described optical delivery device and described support member, and described support member and described laser thermal sediment contact gap place, use fluid sealant to carry out sealing fixing.
4. high power VCSEL device for laser therapy as claimed in claim 1 or 2, is characterized in that:
Described optical delivery device is arranged on the front of described laser thermal sediment and described VCSEL array by fixture.
5. high power VCSEL device for laser therapy as claimed in claim 1 or 2, is characterized in that:
Described optical delivery device is the mirror barrel of inwall polishing or the leaded light cone based on inwall total reflection.
6. high power VCSEL device for laser therapy as claimed in claim 1 or 2, is characterized in that:
The cross section of the encapsulating face of described laser thermal sediment is the portion circumscribes polygon of a circle, described encapsulating face is made up of multiple mutual small package plane at an angle, described encapsulating face indent, and the centre normal of each small package plane intersects at focal position place; All VCSEL chips in described VCSEL array are installed in described each heat sink small package plane respectively, and each described small package plane is for encapsulating one or more VCSEL chip.
7. high power VCSEL device for laser therapy as claimed in claim 6, is characterized in that:
The cross section of the incidence surface of described optical delivery device is arc-shaped or arc surface circumscribed polygon.
8. high power VCSEL device for laser therapy as claimed in claim 1 or 2, is characterized in that:
Described high heat conduction optical window sheets is sapphire or optical grade artificial diamond.
9. high power VCSEL device for laser therapy as claimed in claim 8, is characterized in that:
The two-sided plating optical anti-reflective film of described high heat conduction optical window sheets.
10. high power VCSEL device for laser therapy as claimed in claim 1 or 2, is characterized in that:
The indoor design of described laser thermal sediment has MCA.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410643581.0A CN104353194B (en) | 2014-11-10 | 2014-11-10 | High power VCSEL device for laser therapy with skin refrigerating function |
| EP14905708.5A EP3219360B1 (en) | 2014-11-10 | 2014-12-07 | High power vcsel laser treatment device with skin cooling function and packaging structure thereof |
| US15/525,594 US10568690B2 (en) | 2014-11-10 | 2014-12-07 | High power VCSEL laser treatment device with skin cooling function and packaging structure thereof |
| ES14905708T ES2802993T3 (en) | 2014-11-10 | 2014-12-07 | High power VCSEL laser treatment device with skin cooling function and its packaging structure |
| PCT/CN2014/093209 WO2016074300A1 (en) | 2014-11-10 | 2014-12-07 | High power vcsel laser treatment device with skin cooling function and packaging structure thereof |
| PT149057085T PT3219360T (en) | 2014-11-10 | 2014-12-07 | High power vcsel laser treatment device with skin cooling function and packaging structure thereof |
| PL14905708T PL3219360T3 (en) | 2014-11-10 | 2014-12-07 | High power vcsel laser treatment device with skin cooling function and packaging structure thereof |
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| CN201410643581.0A CN104353194B (en) | 2014-11-10 | 2014-11-10 | High power VCSEL device for laser therapy with skin refrigerating function |
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| CN104353194A true CN104353194A (en) | 2015-02-18 |
| CN104353194B CN104353194B (en) | 2017-06-30 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105435374A (en) * | 2015-12-18 | 2016-03-30 | 西安炬光科技股份有限公司 | Semiconductor laser medical device based on optical fiber coupling module |
| CN110840557A (en) * | 2019-12-13 | 2020-02-28 | 李德龙 | Semiconductor laser therapeutic instrument |
| CN111000630A (en) * | 2019-12-07 | 2020-04-14 | 北京芯动力激光科技有限公司 | Hand-held semiconductor laser beauty device |
| WO2020220982A1 (en) * | 2019-04-30 | 2020-11-05 | 邹剑寒 | Hair removal instrument |
| TWI716944B (en) * | 2019-07-25 | 2021-01-21 | 美康生物科技有限公司 | Laser grip |
| CN112704562A (en) * | 2021-01-14 | 2021-04-27 | 上海市激光技术研究所 | Power detection device and method for laser therapeutic machine |
| CN112946670A (en) * | 2021-04-09 | 2021-06-11 | 常州纵慧芯光半导体科技有限公司 | Laser beauty system and equipment |
| WO2024217555A1 (en) * | 2023-04-20 | 2024-10-24 | 深圳半岛医疗集团股份有限公司 | Ultrasonic therapeutic apparatus |
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| TWI716944B (en) * | 2019-07-25 | 2021-01-21 | 美康生物科技有限公司 | Laser grip |
| CN111000630A (en) * | 2019-12-07 | 2020-04-14 | 北京芯动力激光科技有限公司 | Hand-held semiconductor laser beauty device |
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| CN112704562A (en) * | 2021-01-14 | 2021-04-27 | 上海市激光技术研究所 | Power detection device and method for laser therapeutic machine |
| CN112946670A (en) * | 2021-04-09 | 2021-06-11 | 常州纵慧芯光半导体科技有限公司 | Laser beauty system and equipment |
| WO2024217555A1 (en) * | 2023-04-20 | 2024-10-24 | 深圳半岛医疗集团股份有限公司 | Ultrasonic therapeutic apparatus |
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