CN104360279A - Fuel cell internal temperature-heat flux-current density synchronous measurement sensor - Google Patents

Abstract

The invention discloses a fuel cell internal temperature-heat flux-current density synchronous measurement sensor and belongs to the field of fuel cell internal parameter measurement. Each temperature-heat flux-current density synchronous measurement sensor body comprises seven layers of films which are evaporated by a vacuum evaporation coating method, the first layer is a silicon dioxide insulation layer, the second and third layers are a copper coating and a nickel coating respectively, the fourth layer is a silicon dioxide protection layer, the fifth layer is a thick silicon dioxide heat resistance layer, the sixth layer is a current density measurement copper coating, and the seventh layer is a current density measurement gold coating. The fuel cell internal temperature-heat flux-current density synchronous measurement sensor can realize synchronous online measurement of internal temperature, heat flux and current density of a fuel cell, has the advantages of simple structure, convenience in production, small size and the like, is applicable to fuel cell flow field plates with flow channels of various shapes and is capable of synchronously measuring temperature, heat flux and current density of single position or multiple positions inside the fuel cell.

Description

Fuel Cell Internal Temperature-Heat Flux-Current Density Joint Measurement Sensor

technical field

The invention belongs to the field of fuel cell internal parameter measurement, and relates to the measurement of fuel cell internal temperature, heat flux density and current density, in particular to a fuel cell internal temperature-heat flux density-current density joint measurement sensor.

Background technique

Fuel cell technology is an advanced technology in the utilization of hydrogen energy. How to improve the performance of fuel cells is the focus of researchers. Some factors affecting the performance of fuel cells can be reflected by some internal parameters, such as local current density, temperature, heat flux density and so on.

When the structural design of the fuel cell is unreasonable, it will affect the discharge of heat inside the fuel cell, resulting in uneven internal temperature field, and the uneven temperature field will affect the electrochemical reaction on the membrane electrode, thereby affecting the performance of the fuel cell. performance. When discharging at a high current density, if the structure of the fuel cell is unreasonable, causing heat to accumulate in a certain local area, resulting in an abnormal increase in the local temperature, the excessive temperature will cause the membrane electrode of the fuel cell to fail. The local current density inside the fuel cell can reflect the influence of reactant flow rate, flooding condition, contact resistance and other factors on the performance of the fuel cell. By measuring the local current density inside the fuel cell, the flooding condition inside the fuel cell can be predicted. conditions to guide the selection of fuel cell operating conditions.

Most of the research on the measurement of internal parameters of fuel cells focuses on the research of a single parameter, such as the measurement of temperature. The traditional method is to embed miniature temperature sensors, thermocouples or thermal resistors in the flow channels of fuel cells, or to integrate with the membrane of fuel cells. Electrodes are hot-pressed as one. These methods are not only difficult to manufacture, but also the implantation of the temperature measuring element also destroys the airtightness of the overall structure of the fuel cell, and even reduces the active area of the membrane electrode, thereby affecting the performance of the fuel cell; current Density measurement, the main methods are sub-cell method, partial membrane electrode method, magnetic ring group method, etc. Most of these methods need to process and modify the pole plate or flow field plate of the fuel cell or divide the membrane electrode assembly, which is difficult to process and complicated. , The production cost is high. With the deepening of fuel cell research, the measurement of a single parameter can no longer meet the needs of the research, and it is necessary to measure multiple parameters for unified consideration. If each parameter is measured one by one, the working time will be greatly increased, and it will also increase The number of disassembly and assembly of the fuel cell will destroy the stability of the performance of the fuel cell, and also reduce the authenticity of the measured data of the fuel cell.

The internal temperature-heat flux-current density joint measurement sensor of the fuel cell of the present invention can realize the synchronous measurement of the internal temperature, heat flux density and current density of the fuel cell without special processing and transformation of the pole plate or flow field plate of the fuel cell , and also reduces the number of disassembly and assembly of the fuel cell, thereby facilitating the measurement of the internal temperature, heat flux density and current density of the fuel cell; the invention is simple in structure and easy to manufacture, and is suitable for fuel cells with various flow channel shapes.

Contents of the invention

The object of the present invention is to provide a sensor capable of synchronously measuring the internal temperature, heat flux density and current density of the fuel cell. The invention is made by vacuum evaporation coating method, has simple structure and is convenient to make. Using this invention reduces the number of disassembly and assembly of the fuel cell, reduces the damage to the performance of the fuel cell caused by the implantation of various parameter measurement sensors, and facilitates multiple fuel cells inside the fuel cell. Parameter measurement studies.

In order to achieve the above technical purpose, the technical solution of the present invention is as follows: a fuel cell internal temperature-heat flux-current density joint measurement sensor, including a fuel cell flow field plate 1, a temperature-heat flux-current density joint measurement sensor 4, and a lead wire 5, A flow channel 2 and a ridge 3 are provided on the fuel cell flow field plate 1, a temperature-heat flux density-current density joint measurement sensor 4 is arranged on the ridge 3 between two adjacent flow channels 2 of the fuel cell flow field plate 1, and lead wires One end of 5 is connected to the lead-out end of the temperature-heat flux density-current density joint measurement sensor 4, and the other end extends to the edge of the fuel cell flow field plate 1; when the fuel cell is assembled, the fuel cell flow field plate 1 is arranged with temperature -Heat flux density-current density joint measurement sensor 4 faces the side of the fuel cell membrane electrode and is in close contact with it.

The temperature-heat flux-current density joint measurement sensor 4 is a seven-layer thin film evaporated by vacuum evaporation coating method: the first layer is a silicon dioxide insulating layer 13 with a thickness of 0.08-0.12 μm, and the second layer is evaporated on A copper plating layer 14 with a thickness of 0.1-0.12 μm on the silicon dioxide insulating layer 13, and the third layer is a nickel plating layer 15 evaporated on the silicon dioxide insulating layer 13 with a thickness of 0.1-0.12 μm; the copper plating layer 14 also includes Thin-film thermocouple copper coating and thin-film heat flow meter copper coating, described nickel coating 15 comprises thin-film thermocouple nickel coating and thin-film heat flow meter nickel coating simultaneously; The shape of described thin-film thermocouple copper coating and thin-film thermocouple nickel coating is elongated , overlap each other in the middle, and the overlapping place constitutes the thermocouple hot end node 27, and the head end is the connection terminal 28 of the thin film thermocouple; the shapes of the copper coating of the thin film heat flow meter and the nickel coating of the thin film heat flow meter are respectively parallel Quadrilateral, and the head and the tail overlap each other, and the laps form a thermopile, which includes the upper node 29 of the thin film heat flow meter and the lower node 30 of the thin film heat flow meter, and the first end is the thin film heat flow meter wiring lead-out end 31; The silicon dioxide protective layer 16 with a thickness of 0.08-0.12 μm evaporated on the coating 14 and the nickel coating 15, and the fifth layer is deposited on the silicon dioxide coating corresponding to the node 29 on the thin film heat flow meter with a thickness of 1.2-2.0μm thick silicon dioxide thermal resistance layer 17, the sixth layer is a 1.5-2.0μm thick current density measurement copper coating 18 evaporated on the basis of the previous coating, and the seventh layer is the current density measurement A current density measurement gold coating 19 with a thickness of 0.1-0.12 μm is deposited on the copper coating 18; the current density measurement copper coating 18 and the current density measurement gold coating 19 overlap each other to form a current density measurement metal coating 32. The end is the lead-out end 33 of the metal-plated wiring for measuring the current density.

The thin-film thermocouple lead-out 28 , the thin-film heat flow meter lead-out 31 and the metal plating lead-out 33 for current density measurement are all round and arranged on the same side of the silicon dioxide insulating layer 13 .

The manufacturing steps of temperature-heat flux density-current density joint measurement sensor include step one 20, step two 21, step three 22, step four 23, step five 24, step six 25, step seven 26; specifically, step one 20, On the ridge 3 between two adjacent flow channels 2 of the fuel cell flow field plate 1, evaporate a layer of silicon dioxide insulating layer 13 according to the silicon dioxide insulating layer mask 6, as an insulating substrate; step two 21, in two On the silicon oxide insulating layer 13, evaporate a layer of copper coating 14 according to the copper coating mask 7; step three 22, evaporate a layer of nickel coating 15 on the silicon dioxide insulating layer 13 according to the nickel coating mask 8; step four 23, Above the copper plating layer 14 and the nickel plating layer 15, one deck silicon dioxide protective layer 16 is deposited according to the silicon dioxide protective layer mask 9, which is used as the protective layer of thin-film thermocouples and as the carbon dioxide of thin-film heat flow meter. Silicon thin thermal resistance layer; step 5 24, vapor-depositing a layer of silicon dioxide thick thermal resistance layer 17 according to the silicon dioxide thick thermal resistance layer mask 10 above the silicon dioxide coating layer corresponding to the node 29 on the thin film heat flow meter; Step six 25, measure the copper coating mask 11 according to the current density on the basis of step five, evaporate a layer of current density measurement copper coating 18; Step seven 26, measure the gold coating according to the current density above the current density measurement copper coating 18 Mask 12 evaporates a layer of gold coating 19 for current density measurement; the above steps constitute a temperature-heat flux-current density joint measurement sensor, and external measurement circuits and data acquisition equipment can realize the internal temperature, heat flux and current density of the fuel cell. synchronized measurement.

The silicon dioxide insulating layer 13 in the temperature-heat flux density-current density joint measurement sensor 4 can be made into square, circular, polygonal, trapezoidal, triangular, and irregular patterns.

The thin-film thermocouple and the thin-film heat flow meter metal coating material composed of copper and nickel in the temperature-heat flux-current density joint measurement sensor 4 can also be replaced by tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt, Metal mixture materials such as copper and constantan can also be used instead.

The shape of the thin-film thermocouple copper coating and the thin-film thermocouple nickel coating in the temperature-heat flux-current density joint measurement sensor 4 is set according to the shape of the mask, and its shape can also be oval, arc, wave Shape, rhombus and irregular shape, the overlapping shape can be arc, wave, zigzag; the shape of thin film heat flow meter copper coating and thin film heat flow meter nickel coating is also set according to the shape of the mask, its The shape can also be strip shape, arc shape, rhombus shape, and the shape after overlapping the head and tail can be zigzag shape, arc shape, wave shape, zigzag shape.

The silicon dioxide thick thermal resistance layer 17 can also be located above the lower junction 30 of the thin film heat flow meter.

The thin film heat flow meter in the temperature-heat flux density-current density joint measurement sensor 4 at least includes a pair of thin film heat flow meter upper nodes 29 and a thin film heat flow meter lower node 30 .

The shape of the current density measurement copper coating 18 and the current density measurement gold coating 19 in the temperature-heat flux density-current density joint measurement sensor 4 is set according to the shape of the mask, and its shape can be square, circular, oval shape, trapezoid.

The thin-film thermocouple wire lead-out 28, the thin-film heat flowmeter wire lead-out 31 and the current density measurement metal plating wire lead-out 33 can be arranged oppositely on both sides of the silicon dioxide insulating layer 13 respectively, and its shape can also be made into an ellipse Shape, rectangle, trapezoid, triangle.

The lead wire 5 has a width of 0.1-0.2 mm, and is composed of four layers of thin films evaporated by vacuum evaporation coating method: the first layer is a wire silicon dioxide insulating layer 34 with a thickness of 0.08-0.12 μm, and the second layer is a wire silicon dioxide insulating layer 34 with a thickness of 0.1 μm. - 0.12 μm lead copper plating layer 35, the third layer is lead lead gold plating layer 36 with a thickness of 0.1-0.12 μm, and the uppermost layer is a lead lead silicon dioxide protective layer 37 with a thickness of 0.05-0.1 μm.

The lead silicon dioxide insulating layer 34 is consistent with the lead copper plating layer 35 and the lead gold plating layer 36 in shape, position and size, and the lead silicon dioxide protective layer 37 is the same as the first three layers in shape and position, but close to the flow field At the edge of the board, it should be slightly shorter than the first three layers.

The shape of the flow channels 2 on the fuel cell flow field plate 1 can be parallel flow channels, serpentine single-channel flow channels, serpentine multi-channel flow channels, finger-shaped flow channel flow, and irregular flow channels.

Compared with the prior art, the present invention has the following beneficial effects.

The fuel cell internal temperature-heat flux density-current density joint measurement sensor of the present invention integrates a thin-film thermocouple temperature measurement unit, a thin-film heat flow measurement heat flow unit, and a current density measurement metal coating current measurement unit on one sensor, realizing the measurement of Synchronous online measurement of fuel cell internal temperature, heat flux density and current density; the invention is made by vacuum evaporation coating method, simple in structure, easy to manufacture, small in size, suitable for fuel cell flow field plates of various flow channel shapes, and does not need to be adjusted The special modification of the internal structure of the fuel cell reduces the performance degradation of the fuel cell caused by the implantation of various sensors; at the same time, the invention can simultaneously measure the current density, temperature and heat flux density of a single location inside the fuel cell, Multiple locations can also be measured.

Description of drawings

Figure 1 is a subjective schematic diagram of the arrangement of the temperature-heat flux density-current density joint measurement sensor on the flow field plate of the parallel flow channel;

Figure 2 is a subjective schematic diagram of a single temperature-heat flux-current density joint measurement sensor on the fuel cell flow field plate;

Fig. 3 is a flow chart of making a single temperature-heat flux-current density joint measurement sensor on the fuel cell flow field plate;

Fig. 4 is a cross-sectional subjective schematic diagram of the lead wire of the temperature-heat flux-current density joint measurement sensor;

Figure 5 is a subjective schematic diagram of the arrangement of temperature-heat flux density-current density joint measurement sensors on the finger-type flow field plate;

Figure 6 is a subjective schematic diagram of the arrangement of temperature-heat flux density-current density joint measurement sensors on a serpentine single-channel flow field plate;

Figure 7 is a subjective schematic diagram of the arrangement of temperature-heat flux density-current density joint measurement sensors on the serpentine multi-channel flow field plate;

In the figure, 1. fuel cell flow field plate, 2. flow channel, 3. ridge, 4. temperature-heat flux-current density joint measurement sensor, 5. lead wire;

6-12 is the coating mask of the temperature-heat flux density-current density joint measurement sensor: 6, silicon dioxide insulating layer mask, 7, copper plating layer mask, 8, nickel plating layer mask, 9, silicon dioxide protective layer Mask, 10. Silicon dioxide thick thermal resistance layer mask, 11. Copper plating mask for current density measurement, 12. Gold plating mask for current density measurement;

13-19 are the coating layers of the temperature-heat flux-current density joint measurement sensor based on mask evaporation: 13, silicon dioxide insulating layer, 14, copper coating layer, 15, nickel coating layer, 16, silicon dioxide protective layer, 17 , Silicon dioxide thick thermal resistance layer, 18, copper coating for current density measurement, 19, gold coating for current density measurement;

20-26 are the manufacturing process of temperature-heat flux density-current density joint measurement sensor: 20, step 1, 21, step 2, 22, step 3, 23, step 4, 24, step 5, 25, step 6, 26, Step seven;

27. Thin-film thermocouple hot junction, 28. Thin-film thermocouple wiring lead-out, 29. Thin-film heat flow meter upper junction, 30. Thin-film heat flow meter lower junction, 31. Thin-film heat flow meter wiring lead-out, 32. Current density Measuring the metal coating, 33. Current density measurement metal coating wiring terminal;

34. Lead wire silicon dioxide insulating layer, 35. Lead wire copper plating layer, 36. Lead wire gold plating layer, 37. Lead wire silicon dioxide protective layer.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

Referring to Fig. 1, the fuel cell internal temperature-heat flux-current density joint measurement sensor of the present invention comprises a fuel cell flow field plate 1, a temperature-heat flux-current density joint measurement sensor 4, and a lead wire 5. A flow channel 2 is provided on the plate 1, a ridge 3 is provided between two adjacent flow channels 2, and a temperature-heat flux-current density is arranged on the ridge 3 between two adjacent flow channels 2 of the fuel cell flow field plate 1. The joint measurement sensor 4, its electrical signal is conducted through the lead wire 5, one end of the lead wire 5 is connected to the wiring lead-out end of the temperature-heat flux density-current density joint measurement sensor 4, and the other end extends to the edge of the flow field plate to connect with the external data acquisition The equipment is connected; when the fuel cell is assembled, the surface of the fuel cell flow field plate 1 on which the temperature-heat flux density-current density joint measurement sensor 4 is arranged faces the membrane electrode side and is in close contact with it.

With reference to shown in Fig. 2, temperature-heat flux density-current density joint measurement sensor 4 of the present invention comprises thin-film thermocouple temperature measurement unit, thin-film heat flow meter heat flow unit and current density measurement metal coating current measurement unit, it is by adopting The seven-layer thin film evaporated by the vacuum evaporation coating method is composed of: the first layer is a silicon dioxide insulating layer 13 with a thickness of 0.08-0.12 μm, and the second layer is a silicon dioxide insulating layer 13 with a thickness of 0.1-0.12 μm evaporated on the silicon dioxide insulating layer 13. The copper plating layer 14, the third layer is a nickel plating layer 15 evaporated on the silicon dioxide insulating layer 13 with a thickness of 0.1-0.12 μm, and the fourth layer is a thickness of 0.08-0.12 μm evaporated on the copper plating layer 14 and the nickel plating layer 15. μm silicon dioxide protective layer 16, the fifth layer is a silicon dioxide thick thermal resistance layer 17 with a thickness of 1.2-2.0 μm evaporated on the silicon dioxide coating layer corresponding to the node 29 on the thin film heat flow meter, the first The sixth layer is a current density measurement copper coating 18 with a thickness of 1.5-2.0 μm evaporated on the basis of the previous coating, and the seventh layer is a layer of 0.1-0.12 μm thick copper coating 18 evaporated on the current density measurement copper coating 18. Current density measurement gold coating 19; because copper and gold are both good conductors of heat, the thermal conductivity is very high, and the current density measurement copper coating and the current density measurement gold coating of evaporation are all very thin, so evaporation is performed on thin film calorimeter and The current density measurement metal coating on the upper layer of the thin film thermocouple will not interfere with the measurement accuracy of the thin film heat flow meter and thin film thermocouple.

Copper coating of thin film heat flow meter, nickel coating of thin film heat flow meter, silicon dioxide protective layer 16 and silicon dioxide thick thermal resistance layer 17 constitute a complete thin film heat flow meter to realize the measurement of heat flux. The thermopile is overlapped with the nickel plating to form a thermopile. Because the thickness of the silicon dioxide thermal resistance layer on the upper node of the thin film heat flow meter and the lower node of the thin film heat flow meter are different, the thermopile generates a thermoelectric potential, which is different from the upper junction of the thin film heat flow meter. The junction is related to the thickness difference of the silicon dioxide thermal resistance layer on the lower node of the thin film heat flow meter, and the heat flux is related to the temperature difference, the thickness difference of the silicon dioxide thermal resistance layer and the thermal conductivity. Since the thermal conductivity of silicon dioxide is known, the The heat flux density can be calculated.

Fig. 3 is a flow chart of making a single temperature-heat flux-current density joint measurement sensor: 6-12 is each coating mask of the temperature-heat flux-current density joint measurement sensor, and 13-19 is the temperature of evaporation according to the mask- Each coating layer of the heat flux density-current density joint measurement sensor, 20-26 is the manufacturing process of the temperature-heat flux density-current density joint measurement sensor. First, one layer of silicon dioxide insulating layer 13 is vapor-deposited according to the silicon dioxide insulating layer mask 6 as the insulating substrate of the sensor, thereby completing step one 20; The film 7 evaporates a layer of copper coating 14, and step three 22 is to evaporate a layer of nickel coating 15 on the silicon dioxide insulating layer 13 according to the nickel coating mask 8; wherein, the copper coating 14 includes the thin film thermocouple copper coating and the copper coating simultaneously. Thin film heat flow meter copper coating, nickel coating 15 has comprised thin film thermocouple nickel coating and thin film heat flow meter nickel coating simultaneously; Plating one layer of silicon dioxide protection layer 16, it promptly as the protection layer of thin-film thermocouple, again as the silicon dioxide thin thermal resistance layer of thin-film heat flowmeter; A layer of silicon dioxide thick thermal resistance layer 17 is vapor-deposited on the top of the silicon oxide coating layer according to the silicon dioxide thick thermal resistance layer mask 10, wherein the thin film heat flow meter copper coating, the thin film heat flow meter nickel coating, the silicon dioxide protective layer 16 and the silicon dioxide The silicon thick thermal resistance layer 17 constitutes a complete thin-film heat flow meter, which realizes the measurement of the heat flux density; step 6 25 is to measure the copper coating mask 11 according to the current density on the basis of the previous coating, and evaporate a layer of current density measurement copper Plating layer 18; step seven 26 is to measure gold plating layer 19 according to current density measurement gold plating layer mask 12 vapor deposition layer current density measurement above current density copper plating layer 18; Wherein current density measurement copper plating layer 18 and current density measurement gold plating layer 19 Overlap each other to form a current density measuring metal coating 32, which realizes the measurement of current density; the temperature-heat flux-current density joint measurement sensor is formed by the above steps, and the external measurement circuit and data acquisition equipment can realize the internal temperature of the fuel cell, Simultaneous measurement of heat flux and current density.

Among them, the overall shape of the temperature-heat flux-current density joint measurement sensor is determined by the shape of the silicon dioxide insulating layer, which can not only be made into a square as shown in Figure 3, but also a circle, polygon, trapezoid, Triangle, irregular figure and other shapes. The copper coating 14 evaporated in step two 21 includes thin film thermocouple copper coating and thin film heat flow meter copper coating simultaneously, and the nickel coating 15 evaporated in step three 22 includes thin film thermocouple nickel coating and thin film heat flow meter nickel simultaneously plating. Thin-film thermocouple copper coating and thin-film thermocouple nickel coating are strip-shaped, and the middle overlaps each other, and the lap joint constitutes thin-film thermocouple hot junction 27; the shape of thin-film thermocouple copper coating and thin-film thermocouple nickel coating is It is set according to the shape of the mask, and its shape can also be oval, arc, wave, rhombus, irregular shape and other shapes, and the shape after overlapping can be arc, wave, zigzag, etc. . The shapes of the copper coating of the thin film heat flow meter and the nickel coating of the thin film heat flow meter are parallel quadrilaterals respectively, and the ends overlap each other. Point 30: The shape of the copper coating of the thin-film heat flow meter and the nickel coating of the thin-film heat flow meter is set according to the shape of the mask. Shape, arc, wave, zigzag and other shapes; the silicon dioxide thick thermal resistance layer 17 can also be located above the lower node 30 of the thin film heat flow meter. Metal coating materials in thin film thermocouples and thin film heat flow meters can also be replaced by tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt, etc., and metal mixture materials such as copper and constantan can also be used. The shape of the current density measurement copper coating 18 and the current density measurement gold coating 19 completed in step six 25 and step seven 26 can also be changed according to the shape of the mask, which can be rectangular, oval, circular, triangular, trapezoidal, irregular Graphics and other shapes.

The first end of the thin-film thermocouple is the lead-out end 28 of the thin-film thermocouple connection, the head end of the thin-film heat flow meter is the lead-out end 31 of the thin-film heat flow meter connection, and the head end of the metal coating for current density measurement is the lead-out end 33 of the metal coating for current density measurement. The function is to facilitate the connection with the lead wire 5 for the conduction of electrical signals. The shape of thin-film thermocouple wiring lead-out 28, thin-film heat flow meter wiring lead-out 31 and current density measurement metal coating wiring lead-out 33 can not only be the shape shown in Figure 3, but also can be made into ellipse, rectangle, trapezoid, triangle, etc. For other shapes, its positions can be arranged on the same side of the silicon dioxide insulating layer 13, and can also be arranged on opposite sides of the silicon dioxide insulating layer 13, that is, when the thin film calorimeter wiring terminal 31 is located on the silicon dioxide insulating layer When on the upper side of 13, the thin-film thermocouple wiring lead-out 28 and the current density measurement metal coating wiring lead-out 33 are arranged on the other side of the silicon dioxide insulating layer 13 opposite to the thin-film heat flowmeter wiring lead-out 31, to facilitate the sensor lead 5 Arrangement on the flow field plate.

Fig. 4 is a schematic cross-sectional view of the lead wire of the temperature-heat flux density-current density joint measurement sensor. The width of the lead wire 5 is 0.1-0.2 mm, and it is composed of four layers of films evaporated by vacuum evaporation coating method: the first layer is 0.08-0.08 mm thick. 0.12 μm lead silicon dioxide insulating layer 34, the second layer is 0.1-0.12 μm thick lead copper plating layer 35, the third layer is 0.1-0.12 μm thick lead wire gold plating layer 36, and the uppermost layer is 0.05-0.1 μm thick The lead silicon dioxide protective layer 37 of the lead wire; the lead silicon dioxide insulating layer 34 of the lead wire 5 is consistent with the lead copper plating layer 35 and the lead gold plating layer 36 in shape, position and size, and the lead wire silicon dioxide protective layer 37 is consistent with the first three layers The shape and position are the same, but near the edge of the flow field plate, it is slightly shorter than the first three layers, so as to facilitate the connection with the lead wires of the external data acquisition equipment.

Figure 5 is a schematic diagram of the arrangement of the temperature-heat flux-current density joint measurement sensor on the finger-type flow field plate, and the temperature-heat flux-current density joint measurement is arranged on the ridge of the finger-type flow field plate One end of the sensor 4 and the lead wire 5 are connected to the lead-out end of the temperature-heat flux density-current density joint measurement sensor, and the other end extends to the edge of the flow field plate.

Figure 6 is a schematic diagram of the arrangement of the temperature-heat flux-current density joint measurement sensor on the serpentine single-channel flow field plate, the temperature-heat flux density-current density joint measurement sensor 4 is arranged on the ridge of the flow field plate, and the lead wires 5. One end is connected to the wiring lead-out end of the temperature-heat flux density-current density joint measurement sensor, and the other end extends to the edge of the flow field plate.

Fig. 7 is a schematic diagram of the arrangement of the temperature-heat flux-current density joint measurement sensor on the serpentine multi-channel flow field plate, and the temperature-heat flux-current density joint measurement sensor 4 is arranged on the ridge of the flow field plate, and the lead wires 5. One end is connected to the wiring lead-out end of the temperature-heat flux density-current density joint measurement sensor, and the other end extends to the edge of the flow field plate.

Using the fuel cell internal temperature-heat flux density-current density joint measurement sensor of the present invention realizes synchronous on-line measurement of the fuel cell internal temperature, current density and heat flux density, simplifies the steps of multi-parameter measurement inside the fuel cell, and reduces fuel consumption. The number of times of battery disassembly and assembly ensures the stability of fuel cell performance.

Claims (10)

1. The temperature-heat flux-current density joint measurement sensor inside the fuel cell, including the fuel cell flow field plate (1), the temperature-heat flux-current density joint measurement sensor (4), and the lead wires (5), in the fuel cell flow field The plate (1) is provided with flow channels (2) and ridges (3), and the temperature-heat flux density-current density joint measurement sensor (4) is arranged between two adjacent flow channels (2) of the fuel cell flow field plate (1) On the ridge (3) between, one end of the lead wire (5) is connected with the wiring lead-out end of the temperature-heat flux density-current density joint measurement sensor (4), and the other end extends to the edge of the fuel cell flow field plate (1); When the fuel cell is assembled, the surface of the fuel cell flow field plate (1) on which the temperature-heat flux density-current density joint measurement sensor (4) is arranged faces the side of the fuel cell membrane electrode and is in close contact with it; it is characterized in that: The temperature-heat flux-current density joint measurement sensor (4) is a seven-layer thin film evaporated by vacuum evaporation coating method: the first layer is a silicon dioxide insulating layer (13) with a thickness of 0.08-0.12 μm, and the second layer is Copper plating (14) with a thickness of 0.1-0.12 μm for evaporation on the silicon dioxide insulating layer (13), and the third layer is nickel with a thickness of 0.1-0.12 μm evaporated on the silicon dioxide insulating layer (13) Coating (15); Described copper coating (14) comprises thin-film thermocouple copper coating and thin-film heat flow meter copper coating simultaneously, and described nickel coating (15) comprises thin-film thermocouple nickel coating and thin-film heat flow meter nickel coating simultaneously; Described thin film The shape of the thermocouple copper coating and the thin-film thermocouple nickel coating is strip-shaped, and the middle overlaps each other, and the overlapping joints form the thin-film thermocouple hot end node (27), and the first end is the thin-film thermocouple wiring lead-out end (28); The shapes of the copper coating of the thin film heat flow meter and the nickel coating of the thin film heat flow meter are respectively quadrilaterals parallel to each other, and the ends overlap each other. The lower node (30), the first end is the lead-out end (31) of the thin film heat flow meter; the fourth layer is silicon dioxide with a thickness of 0.08-0.12 μm evaporated on the top of the copper plating (14) and nickel plating (15) The protective layer (16), the fifth layer is a silicon dioxide thick thermal resistance layer (17) with a thickness of 1.2-2.0 μm deposited on the silicon dioxide coating layer corresponding to the node (29) on the thin film heat flow meter, The sixth layer is a current density measurement copper coating (18) with a thickness of 1.5-2.0 μm evaporated on the basis of the previous coating, and the seventh layer is an evaporation layer with a thickness of 1.5 μm above the current density measurement copper coating (18). A current density measuring gold coating (19) of 0.1-0.12 μm; the current density measuring copper coating (18) and the current density measuring gold coating (19) overlap each other to form a current density measuring metal coating (32), the head end is Current density measurement metal plating wiring terminal (33); The thin-film thermocouple wire lead-out (28), the thin-film heat flowmeter wire lead-out (31) and the current density measurement metal plating wire lead-out (33) are all made into a circle, and are all arranged on the silicon dioxide insulating layer (13 ) on the same side; The manufacturing steps of the temperature-heat flux density-current density joint measurement sensor include step one (20), step two (21), step three (22), step four (23), step five (24), step six (25), Step seven (26); specifically, step one (20), according to the ridge (3) between the two adjacent flow channels (2) of the fuel cell flow field plate (1) according to the silicon dioxide insulating layer mask (6) ) on the silicon dioxide insulating layer (13) as an insulating substrate; Step 2 (21), on the silicon dioxide insulating layer (13) according to the copper coating mask (7) vapor deposition of a layer of copper coating (14); Step three (22), vapor-deposit one deck nickel coating (15) on silicon dioxide insulating layer (13) according to nickel coating mask (8); Step four (23), in place copper coating ( 14) and the top of the nickel coating (15) according to the silicon dioxide protective layer mask (9) evaporation layer silicon dioxide protective layer (16), it namely as the protective layer of thin film thermocouple, again as the thin film heat flow meter Silicon dioxide thin thermal resistance layer; step five (24), above the silicon dioxide coating layer corresponding to node (29) on the thin film heat flow meter, according to the thick thermal resistance layer mask (10) of silicon dioxide, vapor-deposit one deck two Thick thermal resistance layer of silicon oxide (17); Step six (25), measure copper coating mask (11) according to current density on the basis of step five, vapor deposit a layer of current density and measure copper coating (18); Step seven ( 26), on the top of the current density measurement copper coating (18), according to the current density measurement gold coating mask (12), vapor deposit a current density measurement gold coating (19); the temperature-heat flux density-current density connection is formed by the above steps The measurement sensor, external measurement circuit and data acquisition equipment can realize the synchronous measurement of the internal temperature, heat flux density and current density of the fuel cell. 2. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the silicon dioxide insulating layer (13) in the temperature-heat flux-current density joint measurement sensor (4) ) can be made into square, circular, polygonal, trapezoidal, triangular, irregular figures. 3. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the temperature-heat flux-current density joint measurement sensor (4) is composed of a thin film of copper and nickel Thermocouple and thin film heat flow meter metal coating materials can also be replaced by tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt, or metal mixture materials such as copper and constantan. 4. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the thin-film thermocouple copper coating and thin film in the temperature-heat flux-current density joint measurement sensor (4) The shape of the thermocouple nickel coating is set according to the shape of the mask, and its shape can also be ellipse, arc, wave, rhombus and irregular shape, and the shape after overlapping can be arc or wave , zigzag; the shapes of the thin-film heat flow meter copper coating and the thin-film heat flow meter nickel coating are also set according to the shape of the mask, and their shapes can also be long strips, arcs, and rhombuses. It is zigzag, arc, wave, zigzag. 5. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the silicon dioxide thick thermal resistance layer (17) can also be located at the lower node (30 ) above. 6. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the thin-film heat flowmeter in the temperature-heat flux-current density joint measurement sensor (4) comprises at least one The upper node (29) and the lower node (30) of the thin film heat flow meter. 7. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the current density measurement copper coating (18) in the temperature-heat flux-current density joint measurement sensor (4) ) and the shape of the current density measurement gold coating (19) is set according to the shape of the mask, and its shape can be square, circular, oval, trapezoidal. 8. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the thin-film thermocouple wiring lead-out (28), the thin-film heat flowmeter wiring lead-out (31) and the current Density measurement metal plating wiring lead-out ends (33) can be respectively arranged oppositely on both sides of the silicon dioxide insulating layer (13), and its shape can also be made into ellipse, rectangle, trapezoid, triangle. 9. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the lead wire (5) has a width of 0.1-0.2 mm, and is evaporated by vacuum evaporation coating method Four-layer film composition: the first layer is a lead silicon dioxide insulating layer (34) with a thickness of 0.08-0.12 μm, the second layer is a lead copper plating layer (35) with a thickness of 0.1-0.12 μm, and the third layer is a lead wire with a thickness of 0.1-0.12 μm. A gold plating layer (36) for the wires of μm, and the uppermost layer is a silicon dioxide protective layer (37) for the wires with a thickness of 0.05-0.1 μm; The lead silicon dioxide insulating layer (34) is consistent with the lead copper plating (35) and the lead gold plating (36) in shape, position and size, and the lead silicon dioxide protective layer (37) is consistent with the first three layers in shape and position. The same as above, but it is slightly shorter than the first three layers near the edge of the flow field plate. 10. The fuel cell internal temperature-heat flux-current density joint measurement sensor according to claim 1, characterized in that: the shape of the flow channel (2) on the fuel cell flow field plate (1) can be a parallel flow channel, Serpentine single-channel runner, serpentine multi-channel runner, finger-type runner flow, and irregular runner.