CN104362058A - Curved surface film forming method for dynode of electron multiplier - Google Patents
Curved surface film forming method for dynode of electron multiplier Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005452 bending Methods 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 5
- 238000005238 degreasing Methods 0.000 claims description 3
- 239000003344 environmental pollutant Substances 0.000 claims description 3
- 231100000719 pollutant Toxicity 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 16
- 239000010963 304 stainless steel Substances 0.000 description 5
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007888 film coating Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
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- Materials Engineering (AREA)
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Abstract
本发明公开了一种电子倍增器打拿极曲面成膜方法，以间接镀膜的方式，有效解决电子倍增器打拿极特定曲面镀制薄膜均匀性以及稳定性等问题。首先，按照电子倍增器打拿极外壳待镀膜内表面的尺寸和弧度，加工两端留有待弯折区的曲面内衬片；其中一端的待弯折区向曲面外反折180°，形成折起部；另一端的待弯折区切割型成n个矩形齿牙卡扣；然后进行曲面内衬片的镀膜；将镀膜后的曲面内衬片安装在电子倍增器打拿极外壳内表面，并采用折起部和矩形齿牙卡扣固定。
The invention discloses a method for forming a film on a curved surface of an electron multiplier dynode, which effectively solves the problems of the uniformity and stability of the coated film on the specific curved surface of the electron multiplier dynode by means of indirect coating. First, according to the size and radian of the inner surface of the electron multiplier dynode shell to be coated, process the curved inner lining with the bending area at both ends; the bending area at one end is folded outward by 180° to form a fold The starting part; the area to be bent at the other end is cut into n rectangular tooth buckles; then the curved lining is coated; the coated curved lining is installed on the inner surface of the electron multiplier dynode shell, Secured with folds and rectangular tooth snaps.
Description
技术领域technical field
本发明涉及电子倍增器打拿极的制备工艺技术领域，具体涉及一种电子倍增器打拿极曲面成膜方法。The invention relates to the technical field of preparation technology of an electron multiplier dynode, in particular to a method for forming a film on a curved surface of an electron multiplier dynode.
背景技术Background technique
电子倍增器的性能决定着原子钟的使用寿命，而打拿极曲面镀膜是电子倍增器的核心技术。图1为电子倍增器打拿极外壳的结构示意图，其待镀膜面为弧形内表面，针对电子倍增器打拿极这种特殊的曲面，直接在打拿极外壳内表面镀膜，因打拿极外壳两侧壁面与曲面成直角的设计，会使得镀膜工艺不方便实施，造成内表面成膜不均匀，直接影响了电子倍增器稳定性。The performance of the electron multiplier determines the service life of the atomic clock, and the Dynapolar surface coating is the core technology of the electron multiplier. Figure 1 is a schematic diagram of the structure of the dynode shell of the electron multiplier. The surface to be coated is a curved inner surface. For the special curved surface of the dynode of the electron multiplier, the film is directly coated on the inner surface of the dynode shell. The design of the two side walls of the pole shell and the curved surface at right angles will make the coating process inconvenient to implement, resulting in uneven film formation on the inner surface, which directly affects the stability of the electron multiplier.
因此，针对这种特殊的曲面，直接在其表面镀膜不能满足电子倍增器二次电子发射功能薄膜镀制要求。Therefore, for this special curved surface, direct coating on its surface cannot meet the requirements of thin film coating for electron multiplier secondary electron emission function.
发明内容Contents of the invention
有鉴于此，本发明提供了一种电子倍增器打拿极曲面成膜方法，以间接镀膜的方式，有效解决电子倍增器打拿极特定曲面镀制薄膜均匀性以及稳定性等问题。In view of this, the present invention provides a method for forming a film on a curved surface of an electron multiplier dynode, which effectively solves the problems of uniformity and stability of the film coated on a specific curved surface of the electron multiplier dynode by indirect coating.
为解决上述问题，本发明的技术方案如下：In order to solve the above problems, the technical solution of the present invention is as follows:
一种电子倍增器打拿极曲面成膜方法，包括：A method for forming a film on a dynapolar surface of an electron multiplier, comprising:
步骤1、按照电子倍增器打拿极外壳待镀膜内表面的尺寸和弧度，加工两端留有待弯折区的曲面内衬片；其中一端的待弯折区向曲面外反折180°，形成折起部；另一端的待弯折区切割型成n个矩形齿牙卡扣；n为大于或等于3的整数；Step 1. According to the size and radian of the inner surface of the dynode shell of the electron multiplier to be coated, process the curved inner lining with the bending area at both ends; the bending area at one end is folded outward by 180° to form Folding part; the area to be bent at the other end is cut into n rectangular tooth buckles; n is an integer greater than or equal to 3;
步骤2、对曲面内衬片的内曲面进行二次电子发射功能薄膜镀制；Step 2, performing secondary electron emission functional film plating on the inner curved surface of the curved surface lining sheet;
步骤3、将镀膜后的曲面内衬片置于电子倍增器打拿极外壳内表面，并通过折起部和矩形齿牙卡扣与电子倍增器打拿极外壳进行固定。Step 3. Place the coated curved liner on the inner surface of the electron multiplier dynode shell, and fix it with the electron multiplier dynode shell through the folded part and the rectangular tooth buckle.
优选地，所述折起部长度为0.5mm。Preferably, the folded portion has a length of 0.5 mm.
优选地，在加工曲面内衬片时，将所述矩形齿牙卡扣向曲面外反折一定角度，令矩形齿牙卡扣与折起部平行。Preferably, when processing the curved surface lining, the rectangular tooth buckle is folded outward at a certain angle so that the rectangular tooth buckle is parallel to the folded portion.
所述步骤2具体包括：Described step 2 specifically comprises:
(1)清洗：将步骤1获得的曲面内衬片放入干净器皿中，用水冲洗干净，再分别用分析纯丙酮及分析纯酒精各超声波清洗10分钟～30分钟，然后用分析纯易挥发的有机溶液冲洗干净，用无屑擦拭纸擦拭至表面无划痕、擦痕和液滴残留痕迹；(1) Cleaning: Put the curved surface lining sheet obtained in step 1 into a clean container, rinse it with water, and then use analytical pure acetone and analytical pure alcohol to ultrasonically clean it for 10 to 30 minutes, and then use analytical pure volatile Rinse off the organic solution and wipe it with a lint-free wipe until the surface is free of scratches, scratches and residual traces of droplets;
(2)镀膜：将清洗后的曲面内衬片放入真空室，打开机械泵预抽，将真空室抽真空至1Pa，然后在机械泵保持工作的同时打开分子泵，待分子泵运转平稳后开启分子泵的抽气开关，将真空室抽真空至3.0×10-5Pa，然后加热曲面内衬片至所需温度后保温，在曲面内衬片的内曲面上进行二次电子发射薄膜沉积。(2) Coating: Put the cleaned curved surface lining into the vacuum chamber, turn on the mechanical pump for pre-pumping, and evacuate the vacuum chamber to 1Pa, then turn on the molecular pump while the mechanical pump is working, and wait for the molecular pump to run smoothly Turn on the pumping switch of the molecular pump, evacuate the vacuum chamber to 3.0×10 -5 Pa, then heat the curved lining to the required temperature and keep it warm, and deposit the secondary electron emission film on the inner curved surface of the curved lining .
优选地，将清洗后的曲面内衬片放入真空室之前，先清洗真空室，具体步骤包括：清除真空室内脱落的膜层及空气中的污染物，然后用脱脂纱布蘸无水乙醇擦拭干净真空室内壁。Preferably, before putting the cleaned curved surface lining into the vacuum chamber, clean the vacuum chamber first. The specific steps include: removing the film layer falling off in the vacuum chamber and the pollutants in the air, and then wiping it with degreasing gauze dipped in absolute ethanol The inner wall of the vacuum chamber.
有益效果Beneficial effect
本发明在一定弧度的不锈钢曲面内衬片上先镀制二次电子发射功能薄膜，再安装到电子倍增器打拿极。由于是在曲面内衬片上镀膜，能够有效解决打拿极曲面镀膜中成膜均匀性、稳定性等问题，因此按照该成膜方法能够满足电子倍增器打拿极曲面基片的镀膜要求。In the invention, a secondary electron emission functional thin film is plated on a stainless steel curved inner lining sheet with a certain radian, and then installed on the dynode of the electron multiplier. Because the film is coated on the curved inner lining, it can effectively solve the problems of film formation uniformity and stability in the dynode curved surface coating, so the film formation method can meet the coating requirements of the electron multiplier dynode curved surface substrate.
本发明设计曲面内衬片一端为完整的折起部，另一端处理为卡扣，从而便于在安装曲面内衬片时，令三个卡扣作为着力点与打拿极更好的贴合。而且与整体弯折相比，点的弯折更加容易处理。In the present invention, one end of the curved surface lining is designed as a complete folded part, and the other end is treated as a buckle, so that when the curved surface lining is installed, the three buckles can be used as the focus point to better fit the handle. And compared with the overall bending, the bending of the point is easier to handle.
附图说明Description of drawings
图1为电子倍增器打拿极外壳的结构图。；Figure 1 is a structural diagram of the electron multiplier dynode shell. ;
图2为本发明曲面内衬片的结构图的三视图；左上为俯视图，左下为正视图(曲面内表面)，右下为侧视图。1-折起部，2-矩形齿牙卡扣。Fig. 2 is three views of the structural diagram of the curved lining of the present invention; the upper left is a top view, the lower left is a front view (curved inner surface), and the lower right is a side view. 1-Folding part, 2-Rectangular teeth buckle.
具体实施方式Detailed ways
下面将参照附图来说明本发明的实施例。Embodiments of the present invention will be described below with reference to the drawings.
本发明针对电子倍增器打拿极曲面镀膜缺陷问题，为了满足打拿极曲面镀膜的要求，需采用一种全新的成膜思路：在一定弧度的不锈钢曲面内衬片上先镀制二次电子发射功能薄膜，再安装到电子倍增器打拿极。由于在曲面内衬片上镀膜能够保证镀膜均匀性，因此按照该成膜方法能够满足电子倍增器打拿极曲面基片镀膜要求。The present invention aims at the problem of coating defects on the curved surface of the electron multiplier dynapole. In order to meet the requirements of the curved surface coating of the dynapole, a brand-new film formation idea is adopted: first, the secondary electron emission is plated on a stainless steel curved inner lining with a certain radian. The functional thin film is then mounted to the electron multiplier dynode. Since the film coating on the curved inner liner can ensure the uniformity of the film coating, the film forming method can meet the film coating requirements of the electron multiplier dynode curved surface substrate.
该电子倍增器打拿极曲面成膜方法的实施步骤如下：The implementation steps of the electron multiplier dynode curved surface film forming method are as follows:
步骤1、曲面内衬片加工：Step 1. Curved lining processing:
参考图2，按照电子倍增器打拿极外壳待镀膜内表面的尺寸和弧度，加工两端留有待弯折区的曲面内衬片，曲面内衬片的弧度与待镀膜内表面的弧度相同，长度为待镀膜内表面长度加上两端的待弯折区。曲面内衬片的材料为304号不锈钢，厚度为0.1mm。曲面内衬片其中一端的待弯折区向曲面外反折180°，形成折起部1，从而预先形成一端的固定结构，折起部1的长度为0.5mm；另一端的待弯折区切割型成n(≥3)个矩形齿牙卡扣2，本实施例中n＝3，该齿牙卡扣在后续安装时通过进一步弯折形成另一端的固定结构。Referring to Figure 2, according to the size and radian of the inner surface of the electron multiplier dynode shell to be coated, process the curved lining with bending areas at both ends. The radian of the curved lining is the same as that of the inner surface to be coated. The length is the length of the inner surface to be coated plus the bending area at both ends. The material of the curved liner is 304 stainless steel with a thickness of 0.1mm. The bending area at one end of the curved surface lining is folded outward by 180° to form a folded part 1, thereby forming a fixed structure at one end in advance. The length of the folded part 1 is 0.5 mm; the bending area at the other end Cutting and forming n (≥3) rectangular tooth buckles 2, n=3 in this embodiment, the tooth buckles are further bent to form a fixed structure at the other end during subsequent installation.
本发明设计曲面内衬片一端为完整的折起部，另一端处理为卡扣，从而便于在安装曲面内衬片时，令三个卡扣作为着力点与打拿极更好的贴合。而且与整体弯折相比，点的弯折更加容易处理。In the present invention, one end of the curved surface lining is designed as a complete folded part, and the other end is treated as a buckle, so that when the curved surface lining is installed, the three buckles can be used as the focus point to better fit the handle. And compared with the overall bending, the bending of the point is easier to handle.
为了进一步便于镀膜和后续的安装，可以在加工时将矩形齿牙卡扣向曲面外反折一定角度，令矩形齿牙卡扣与折起部平行，如图2右下侧视图所示。In order to further facilitate the coating and subsequent installation, the rectangular tooth buckle can be folded out of the curved surface at a certain angle during processing, so that the rectangular tooth buckle is parallel to the folded part, as shown in the lower right side view of Figure 2.
步骤2、曲面内衬片镀膜：Step 2. Coating of curved lining:
(1)清洗曲面内衬片：将304号不锈钢曲面内衬片放入干净器皿中，用去离子水冲洗干净，再将304号不锈钢曲面内衬片分别用分析纯丙酮及分析纯酒精各超声波清洗15分钟，然后用分析纯无水乙醇冲洗干净，用无屑擦拭纸擦拭至表面无划痕、擦痕和液滴残留痕迹。(1) Clean the curved surface lining: put the 304 stainless steel curved surface lining in a clean container, rinse it with deionized water, and then use the 304 stainless steel curved surface lining with analytical pure acetone and analytical pure alcohol respectively Wash for 15 minutes, then rinse with analytical pure ethanol, and wipe with a lint-free wipe until the surface is free of scratches, scratches, and residual droplets.
(2)清洁真空室：开真空室，清除真空室内脱落的膜层及空气中的污染物，然后用脱脂纱布蘸无水乙醇擦拭干净真空室内壁。(2) Clean the vacuum chamber: open the vacuum chamber, remove the shedding film layer and the pollutants in the air in the vacuum chamber, and then wipe the inner wall of the vacuum chamber with a degreasing gauze dipped in absolute ethanol.
(3)真空室抽真空：将清洗后的304号不锈钢曲面内衬片放入真空室的基片架上，打开机械泵预抽，将真空室抽真空至1Pa，然后在机械泵继续工作的情况下打开分子泵，待分子泵运转平稳后开启分子泵的抽气开关，将真空室抽至3.0×10-5Pa，然后加热基片架至400℃后保温1个小时。(3) Vacuumize the vacuum chamber: put the cleaned No. 304 stainless steel curved surface lining on the substrate holder of the vacuum chamber, turn on the mechanical pump for pre-pumping, and evacuate the vacuum chamber to 1Pa, and then continue to work when the mechanical pump Turn on the molecular pump under normal conditions, and turn on the exhaust switch of the molecular pump after the molecular pump runs stably, pump the vacuum chamber to 3.0×10 -5 Pa, then heat the substrate holder to 400°C and keep it warm for 1 hour.
(4)二次电子发射薄膜沉积：在304号不锈钢曲面内衬片上镀制氧化镁薄膜，厚度为100nm，结束膜层镀制。(4) Secondary electron emission thin film deposition: a magnesium oxide thin film is plated on the 304 stainless steel curved inner lining with a thickness of 100nm, and the film coating is completed.
步骤3、安装曲面内衬片：Step 3. Install the curved lining:
将镀膜后的曲面内衬片置于电子倍增器打拿极外壳内表面，曲面内衬片一端折起部套在电子倍增器打拿极外壳一端，将曲面内衬片另一端的矩形齿牙卡扣向曲面外进行弯曲，以扣接在电子倍增器打拿极外壳另外一端，使曲面内衬片牢固贴合在电子倍增器打拿极外壳内表面。Place the coated curved liner on the inner surface of the electron multiplier dynode shell, one end of the curved liner is folded over one end of the electron multiplier dynode shell, and the rectangular teeth on the other end of the curved liner The buckle is bent outward from the curved surface to be fastened to the other end of the dynode shell of the electron multiplier, so that the curved inner lining is firmly attached to the inner surface of the dynode shell of the electron multiplier.
综上所述，以上仅为本发明的较佳实施例而已，并非用于限定本发明的保护范围。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。To sum up, the above are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (5)
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105206486A (en) * | 2015-09-11 | 2015-12-30 | 兰州空间技术物理研究所 | Production technology for dynode shell |
| CN105349968A (en) * | 2015-11-19 | 2016-02-24 | 西安交通大学 | Dynode film structure and electron multiplier based on dynode film structure |
| CN105470092A (en) * | 2015-11-19 | 2016-04-06 | 西安交通大学 | Dynode structure and arc dynode electron multiplier based on the same |
| CN112782547A (en) * | 2020-12-11 | 2021-05-11 | 兰州空间技术物理研究所 | Method for predicting service life of electron multiplier of cesium atomic clock |
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| CN103215543A (en) * | 2013-04-22 | 2013-07-24 | 兰州空间技术物理研究所 | Method for preparing film system with secondary electron emission function |
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| JPH02291654A (en) * | 1989-04-28 | 1990-12-03 | Hamamatsu Photonics Kk | Photo-electron multiplier |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105206486A (en) * | 2015-09-11 | 2015-12-30 | 兰州空间技术物理研究所 | Production technology for dynode shell |
| CN105349968A (en) * | 2015-11-19 | 2016-02-24 | 西安交通大学 | Dynode film structure and electron multiplier based on dynode film structure |
| CN105470092A (en) * | 2015-11-19 | 2016-04-06 | 西安交通大学 | Dynode structure and arc dynode electron multiplier based on the same |
| CN112782547A (en) * | 2020-12-11 | 2021-05-11 | 兰州空间技术物理研究所 | Method for predicting service life of electron multiplier of cesium atomic clock |
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