CN104418097B - Treating stations and control device and control method for machine - Google Patents
Treating stations and control device and control method for machine Download PDFInfo
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- CN104418097B CN104418097B CN201410413788.9A CN201410413788A CN104418097B CN 104418097 B CN104418097 B CN 104418097B CN 201410413788 A CN201410413788 A CN 201410413788A CN 104418097 B CN104418097 B CN 104418097B
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 230000033001 locomotion Effects 0.000 claims abstract description 62
- 238000012546 transfer Methods 0.000 claims abstract description 35
- 238000012545 processing Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 12
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003447 ipsilateral effect Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000009790 rate-determining step (RDS) Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/905—Control arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/02—Arm motion controller
- Y10S901/06—Communication with another machine
- Y10S901/07—Conveyor
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Provide the treating stations (3,4) and control device (5) and control method for machine (1).Treating stations (3, it 4) include the robot (100 for being used for service load (72), 110), (72) are loaded by carrier (70, 80, 90) it transmits, carrier (70, 80, 90) it can be moved upwards by magnetic force in the specific sender of conveyer system (2), wherein, robot (100, 110) it can be controlled by control unit (6), to be moved in the direction of motion different from the specific direction of transfer of conveyer system, with service load (72), and wherein, for transmitting the specific direction of transfer and robot (100 of load (72), 110) the direction of motion is applied, in treating stations (3, 4) service load (72) in, to eliminate robot (100, 110) needs moved upwards in the sender of conveyer system (2).
Description
Technical field
The present invention relates to the treating stations for machine, and the movement in the processing for controlling machine control device and
Control method, wherein be especially possible to eliminate the needs that pick-and-place robot is moved upwards in the sender of conveyer system.
Background technique
In the machine for producing object, conveyer system waits until the different websites of machine, institute for transfer member, tool
Stating component, tool etc. can be used for the production of object.For example, such machine is described in US4,096,821, it discloses with
In the system for manufacturing thin film electronic device on substrate.
In this kind of machine, usual conveyer system includes conveyer belt, singly transmits substrate everywhere with identical speed
Reason station.In treating stations, substrate is removed from taking, this is handled by the robot moved in the direction X, Y, Z and Θ, and substrate
Then it is taken back on conveyer belt.Then, substrate is stationary in treating stations, allow robot take on substrate and
Place article.After that, all substrates with identical speed are transferred into next treating stations with conveyer belt.
This operation of substrate needs many operating procedures, therefore is time-consuming.As a result, processing cost increases.In addition, by
In can the direction X, Y, Z and Θ move robot be it is expensive, result in the high cost of machine itself.This also brings machine
The increase of the processing cost of device.
Summary of the invention
Therefore it is an object of the present invention to provide the treating stations for machine, and the movement in the processing for controlling machine
Control device and control method, the treating stations, device and method each single item all solve the above problem.Specifically, it uses
The control device and control method of movement in the treating stations of machine and the processing for controlling machine should be arranged to,
Thus the processing time of machine can be reduced, so that the acquisition cost of the job costs of machine and the machine being also possible to can be with
It reduces.
This target is realized by the treating stations according to claim 1 for machine.The treating stations include for grasping
Make the robot loaded, which is transmitted by carrier, which can be by magnetic force on the specific direction of transfer of conveyer system
Movement, wherein the robot can be controlled by control unit, in the movement side different from the specific direction of transfer of conveyer system
It moves upwards, so as to service load, and wherein, for transmitting the specific direction of transfer of load and the direction of motion quilt of robot
Superposition, with the service load in treating stations, to eliminate the needs that robot is moved upwards in the sender of conveyer system.
Due to performed control in treating stations above-mentioned, compared to the conventional control of machine, at the place of machine
Reason station and the time for thus executing processing in the machine are shortened.As a result, processing cost is reduced.
The treating stations are especially advantageous in the case where not can be reduced the processing time itself.Due to being executed in treating stations
Control can reduce the operating time in the treating stations of machine, it is possible to reduce needed for treating stations when whole
Between.
In addition, simple more cheap robot can be used in treating stations, because when operation is as the object loaded
At least one direction of motion is taken over by conveyer system and is realized.As a result, machine cost and the processing cost quilt to machine itself
It reduces.
In the case where above-mentioned treating stations, the carrier of conveyer system can be different with identical speed or (one or more)
Speed moved in conveyer system, as a result, machine adapt to will by machine execute processing when it is more flexible.
Further, since robot is not moved upwards in specific sender, treating stations need more on specific direction of transfer
Few space.As a result, machine can be built more compact, this also contributes to the cost for reducing machine.
In addition, movement of the conveyer system on specific direction of transfer can be executed with very high precision.It specifically, can be with
It realizes and is up to about the positioning accuracy that 0.1 mm is even as high as in the range of about 1 μm.Needing so high positioning accuracy as a result,
Processing in, fortune of the robot on specific direction of transfer can be replaced with movement of the conveyer system on specific direction of transfer
It is dynamic.
The further favourable improvement for the treatment of stations illustrates in the dependent claims.
In specific embodiment, in service load, for be passed up in specific sender load control and
Control for mobile robot in the movement direction is synchronous.
Treating stations may include more than one robot.
Treating stations can also be used in the processing for needing to be up to about 1 μm of positioning accuracy for service load.
Treating stations can be the treating stations for producing semiconductor element.
Above-mentioned treating stations can be a part of machine, which can further comprise other treating stations and conveyer system,
Conveyer system is used to be passed up at least one carrier in specific sender by magnetic force, which be used to transmit will be in machine
Processed load in device, wherein conveyer system is arranged to transmission and loads to and/or leave at least one treating stations.
Machine can also include first control unit and the second control unit, and first control unit is used for control vector, with
It is moved upwards by magnetic force in specific sender, the second control unit is for controlling robot, specific with conveyer system
Movement is in the different direction of motion of direction of transfer with service load.
Conveyer system can be configured to substrate of the transmission as load, and one or more robots are configured to add
Article is to substrate.
Above-mentioned target further by according to claim 9 for controlling the control device of the movement in the processing of machine and
It realizes.The control device includes first control unit and the second control unit, and first control unit is used for control vector, the carrier
It will be transmitted on the specific direction of transfer of conveyer system by magnetic force, carrier, which be used to transmit, to be operated in the machine
Load, the second control unit is for controlling robot, to move in the direction of motion different from specific direction of transfer to grasp
It loads, wherein the first and second control units are configured to execute control, in this control, grasp in the treating stations of machine
When loading, the direction of motion for the specific direction of transfer and robot that transmit load is applied, and is being passed with eliminating robot
The needs for sending the sender of system to move upwards.
Control device realizes the identical advantage being previously mentioned above for treating stations.The further of control device favorably changes
Into illustrating in the dependent claims.
In service load, for being passed up the control of load in specific sender and for moving in the movement direction
The control of robot can be synchronous.
It is possible that first control unit is configured to control vector, moved so that being supported on specific direction of transfer
It is dynamic, so that robot need not be moved upwards in specific sender.
Specific direction of transfer can be X-direction, and the direction of motion of robot can be Y-direction and/or Z-direction and/or Θ
At least one of direction side, and X-direction, Y-direction and Z-direction can be different from each other, and are arranged to be mutually perpendicular to.Work as load
When body can be moved independently in the X direction during taking and placing, which is especially advantageous, wherein robot is in Y
And/or Z and/or the side Θ move upwards.
Above-mentioned target is further by the control method of the movement in the processing according to claim 13 for being used to control machine
And it realizes.The control method includes rate-determining steps: by first control unit control vector, which will passed by magnetic force
It send and is transmitted on the specific direction of transfer of system, which be used to transmit the load that will be operated in the machine；And the
The control of two control units, moves for controlling robot in the direction of motion different from specific direction of transfer with service load,
Wherein, the first and second control units execute control, in this control, in the treating stations of machine when service load, for passing
The direction of motion of the specific direction of transfer and robot that send load is applied, to eliminate robot in the direction of transfer of conveyer system
The needs of upper movement.
Control method realizes the identical advantage being previously mentioned above for control device.Control method it is further advantageous
Improvement illustrates in the dependent claims.
In service load, for being passed up the control of load in specific sender and for moving in the movement direction
The control of robot can be synchronous.
Specific direction of transfer can be X-direction, and the direction of motion of robot can be Y-direction and/or Z-direction and/or Θ
At least one direction in direction, and X-direction, Y-direction and Z-direction can be different from each other, and are arranged to be mutually perpendicular to.
It is of the invention it is further possible that embodiment further includes the above-mentioned or following special characteristic as embodiment
Combination, even if the combination of special characteristic does not refer to clearly.Therefore, those skilled in the art will also add some independent
Improvement or supplement of the aspect as citation form of the invention.
Detailed description of the invention
Based on the embodiment of reference attached drawing, the present invention is hereinafter described more elaborately.Its attached drawing is shown:
Fig. 1 is according to the schematical top view of the machine of one embodiment, which includes the transmission system with control device
System；
Fig. 2 is the side schematic view of the machine of Fig. 1；And
Fig. 3 is flow chart, it is schematically shown that control method according to first embodiment.
In the figure unless by addition specifying, similar element is marked with identical reference marker or with identity function
Element.
Specific embodiment
Fig. 1 shows the machine 1 for producing object, which is, for example, the semiconductor element on substrate (such as chip)
Deng.Machine 1 includes conveyer system 2, and conveyer system 2 connects the first treating stations 3 and second processing station 4.Machine 1 further includes control dress
5 are set, control device 5 has first control unit 6, the second control unit 7 and third control unit 8.Machine 1 can be production
Line.
Conveyer system 2 in Fig. 1 includes first driving device 10, the second driving device 20, third driving device the 30, the 4th
Driving device 40, the 5th driving device 50, the 6th driving device 60, first vector 70, Second support 80 and third carrier 90, the
One carrier 70 carries the object that load 72(will such as be produced by machine 1).First can pass through to third carrier 70,80,90
Magnetic force moves in conveyer system 2, which is generated by the first to the 6th driving device 10,20,30,40,50,60 and by controlling
Device 5 controls.First to the 6th driving device 10,20,30,40,50,60 establishes the path of conveyer system 2.Carrier 70,80,90
The second position different from first position can be moved to from first position on the path of conveyer system 2.For example, first position
It is the position on 2 left side of conveyer system in Fig. 1, in Fig. 1, first driving device 10 is disposed in there.Then, second
Set the position that can be the 6th driving device 60, the i.e. position on right side in Fig. 1.
In Fig. 1, the first robot 100 is disposed in the first treating stations 3 at conveyer system 2, so that the first machine
The article required when producing object can be taken and be placed into the first one into third carrier 70,80,90 by people 100
And/or in load 72.In addition, the second robot 110 is disposed in the second processing station 4 at conveyer system 2, so that the second machine
The article required when producing object can be taken and be placed into the first one into third carrier 70,80,90 by device people 110
And/or in load 72.
The robot 110 of Fig. 1 is illustrated in further detail in Fig. 2 in side view.Robot 110 includes bracket 111, bracket
111 support arms 112, arm 112 carry the article 113 taken by robot 110.If load 72 is present on carrier 90, machine
Article 113 can be placed into carrier 90 or load 72 by device people 110.Robot 100 is by a manner of identical with robot 110
Configuration, although robot 100 is not shown in detail.
In the present embodiment, first third carrier 70,80,90 is provided with magnetic element (not shown), is used for and first
It cooperates to the 6th driving device 10,20,30,40,50,60.Magnetic element can produce magnetic force, which is held by control device 3
Capable control and cause.In this way, first can either individually or collectively exist in conveyer system 2 to third carrier 70,80,90
It is moved between treating stations 3,4, and/or is moved to or leaves treating stations 3,4.Particularly, first to third carrier 70,80,
90 can be moved in conveyer system 2, so that at least one of they have unique speed.Alternatively, first to third
Carrier 70,80,90 can be moved in conveyer system 2, so that each speed having the same.
First to the control of movement of third carrier 70,80,90 be to be executed by first control unit 6.Herein, first
It is transmitted on specific direction of transfer to third carrier 70,80,90 and is thus moved.This specific direction of transfer is in Fig. 1 and 2
In be X-direction, the direction is shown by the arrow X of the coordinate system on the right side in Fig. 1 and 2.Herein, first to third carry
Body 70,80,90 can move back and forth in the X direction when needed.At first carrier into third carrier 70,80,90
In the case where in the coverage of a robot in the first and second robots 100,110, on the ground that carrier is arranged
The movement of side, carrier is coupled with the movement of corresponding robot 100,110, is particularly synchronized.This is hereinafter by further detail
Description.
In Fig. 1, robot 100 is arranged such that when carrier 70,80,90 is disposed in below robot 100, carries
Body 70,80,90 is disposed in above driving device 20.In this case, carrier 70,80,90 is driven by driving device 20,
Driving device 20 is controlled by first control unit 6, as described above.In Fig. 1, carrier 70 is partly disposed in driving device 20
Above, and partly it is disposed in below robot 100.
Further, in Fig. 1, robot 110 is arranged such that when carrier 70,80,90 is disposed under robot 110
When face, carrier 70,80,90 is disposed in above driving device 50.In Fig. 1, carrier 90 is disposed in above driving device 50
And below robot 110.In this case, carrier 70,80,90 is driven by driving device 50, driving device 50 also by
First control unit 6 controls, as described above.
In contrast, the control of the movement of the first robot 100 is executed by the second control unit 7.Also, the second machine
The control of the movement of device people 110 is executed by third control unit 8.Herein, the first and second robots 100,110 and/
Or its arm 112 can move back and forth in the Y direction when needed.The arrow Y that Y-direction passes through coordinate system on the right side in Fig. 1 and 2
It shows.Alternatively or additionally, the first and second robots 100,110 and/or its arm 112 can when needed in z-direction back and forth
Movement.Z-direction is shown by the arrow Z of the coordinate system on the right side in Fig. 1 and 2.Alternatively or additionally, the first and second machine
Device people 100,110 and/or its arm 112 can move back and forth on the direction Θ when needed.However, the first and second robots 100,
110 and/or its arm 112 do not need to move in the X direction, this is because the control as performed by first control unit 6, the side X
To movement be by first to third carrier 70,80,90 execute.In other words, the adapter tube of conveyer system 2 realizes a direction
On movement so that robot 100,110 need not by conveyer system 2 adapter tube realize side move upwards.In order to realize in machine
The directive movement of institute needed for performed production procedure, the first and second robots 100,110 adapter tube are realized not in device 1
The other directions of motion disposed by conveyer system 2.
As above-mentioned, by being born by 6 control vector 70,80,90 of first control unit in the movement of X-direction and to control
Carry 72 X-direction movement, while carrier 70,80,90 and one to load 72 in the robot 100,110 can
Up in range, carrier 70,80,90 is adapted to or is coupled in and to which load 72 is in the movement of X-direction, and only in Y
Direction and/or the direction Z and/or Θ mobile robot 100,110.Particularly, carrier 70,80,90 X-direction movement and because
This load 72 X-direction movement with specific robot 100,110 in the Y direction and/or the movement in Z-direction and/or the direction Θ
It is synchronous execute.
Therefore, for robot 100,110, it is no longer necessary to be moved upwards in specific sender, the specific sender
To being X-direction in Fig. 1.The coupling of conveyer system 2 and the external equipment (such as robot 100,110) routinely controlled is same
Step is possible.
Fig. 3 shows the control method of conveyer system 2 and robot 100,110 for controlling machine 1, the control method
It can be executed by control device 5.
After control method starts, in step sl, determine that one in carrier 70,80,90 is to be located at driving device
20 above or above driving device 50, and so that it is determined that is in the first robot 100 or the second robot 110
In coverage.In the case where no one of carrier 70,80,90 is located above driving device 20 or driving device 50,
Process proceeds to step S2.Otherwise, process proceeds to step S3.
In step s 2, driving device 10,30,40, the carrier face disposed thereon in 60(carrier 70,80,90) according to need
It to be driven, so that carrier 70,80,90 moves between the first and second treating stations 3,4, or move to or leave the first He
Second processing station 3,4, and to be moved between robot 100,110, or move to or leave robot 100,110.
Hereafter, process returns to step S1.
In step s3, it checks since the carrier in carrier 70,80,90 is located above driving device 20 or driving device 50
Since, the processing time in corresponding treating stations 3,4 is whether processing is over.Additionally or alternatively, it can check whether all
The processing step needed has all been performed in current treating stations.Therefore, which can be time-based, Huo Zheji
In about each station the required step to be executed knowledge, or based on both.In the case where inspection is affirmative, such as
The processing time is over, and process proceeds to step S2.Check whether determine in the case where, such as processing the time be also not finished,
Process proceeds to step S4.
In step s 4, the control that driving device 20 or driving device 50 pass through first control unit 6 is driving carrier,
Carrier in carrier 70,80,90 is located above driving device 20 or driving device 50.The control of first control unit 6 is accommodated
Or it is coupled to the movement by second or the control of third control unit 7,8.Specifically, control is so executed, so that load 72 is in X
Movement on direction with corresponding robot 100,110 in the Y direction and/or the movement in the direction Z and/or Θ synchronously executes.Its
Afterwards, process returns to step S1.
As a result, being only performed during the processing time in corresponding treating stations 3,4 according to the control of step S4.
When machine 1 and/or conveyer system 2 and/or control device 3 and/or robot 100,110 are switched off, controlling party
Method terminates.
It is especially advantageous according to the machine 1 of one embodiment when there are multiple treating stations 3,4, because being saved
Expense increase with the quantity for the treatment of stations 3,4.
According to second embodiment, conveyer system 2 is configured so that carrier 70,80,90 can also not only may be used in X-direction
To move in the Y direction.That is, conveyer system 2 is configured so that carrier 70,80,90 can be transported in two directions
It is dynamic.In this case, it is only necessary to move upwards in Z-direction and the side Θ for robot 100,110.
Such configuration will reduce the cost of robot 100,110, but increase the cost of conveyer system 2.Therefore, second
A embodiment is for having used short conveyer system 2 but having used the machine 1 of many robots 100,110 advantageously.
Machine 1, conveyer system 2, treating stations 3,4, all embodiments above-mentioned of control device 5 and control method can be single
Solely using or with its all possible combination to use.Specifically, the feature of the first and second embodiments can be arbitrarily
Combination.In addition, following modification is contemplated that.
Element shown in figure is schematically shown, can be in actual implementation when above-mentioned function is guaranteed
It is variant with mode shown in the drawings in mode.
Driving device 10,20,30,40,50,60 can be each coil or motor, they generate magnetic field, cause
Carrier 70,80,90 is moved according to its magnetic element with cooperating for magnetic field produced by driving device 10,20,30,40,50,60.
The quantity of driving device 10,20,30,40,50,60 can be selected according to expectation.In addition, coil and/or motor may be present in one
In conveyer system 2 or in its path.
Driving unit 10,20,30,40,50,60 may be provided with integrated Magnetic Sensor 100, especially Hall sensor,
Whether it is disposed at driving device 10,20,30,40,50,60 for one or more of carrier detection 70,80,90.
The quantity in the path formed by driving device 10,20,30,40,50,60 can arbitrarily be selected.In addition, path can also
To form ring, especially elliptical shape.
The quantity for the treatment of stations 3,4 can arbitrarily be selected.Furthermore, it is possible to which arbitrarily selection is used in one for the treatment of stations 3,4
The quantity of robot.Robot can also be placed on the not ipsilateral of conveyer system 2.
In the case where above-mentioned function is accomplished, control method can be executed in a manner of various other.Such as step S3
It can be executed together with step S4.Herein, timer can be actuated to trigger the beginning and end of the control according to step S4.
Size shown in figure is and not restrictive for illustrating the principle of the present invention.Machine can be properly selected
The full-size(d) of device 1 and its component.
Claims (12)
1. being used for the treating stations (3,4) of machine (1), including robot (100,110), the robot (100,110) is for taking
It takes and places or service load (72), the load (72) are transmitted by carrier (70,80,90), carrier (70, the 80,90) energy
It is enough moved upwards by magnetic force in the specific sender of conveyer system (2) and driven device (50) drives, the driving device
(50) it being controlled by first control unit (6), wherein the robot (100,110) can be controlled by the second control unit (7),
To be moved in the direction of motion different from the specific direction of transfer of the conveyer system, to take and place or to operate
The load (72), and wherein, for transmit the load (72) the specific direction of transfer and the robot (100,
110) the direction of motion is applied, and with the operation in the treating stations (3,4) or takes and place the load (72), with
The needs that the robot (100,110) is moved upwards in the specific sender of the conveyer system (2) are eliminated, as a result,
By the way that the control of the first control unit (6) to be adapted to or is coupled to the movement controlled by second control unit (7), by
Control device, which is used in, is passed up the control of the load (72) in the specific sender and in the direction of motion
The control of the upper movement robot (100,110) is synchronous, to operate or take and place the load (72)；The transmission
The carrier of system can be moved in the conveyer system with identical speed or multiple and different speed.
2. treating stations (3,4) according to claim 1, wherein the treating stations (3,4) include more than one robot
(100,110).
3. according to claim 1 to any one described treating stations (3,4) in 2, wherein the treating stations (3,4) are used in
In the processing for the positioning accuracy for needing to be up to about 1 μm for operating the load (72).
4. according to claim 1 to any one described treating stations (3,4) in 2, wherein the treating stations (3,4) are to be used for
Produce the treating stations of semiconductor element.
5. machine (1), including at least one treating stations (3,4) according to any preceding claim and including transmission
System (2), the conveyer system (2) be used for by magnetic force specific sender be passed up at least one carrier (70,80,
90), the carrier (70,80,90) is used as the load (72) that transmission will be operated in the machine (1), wherein described
Conveyer system (2) be arranged to transmit the load (72) to and/or leave at least one described treating stations (3,4).
It further include first control unit (6) and the second control unit (7) 6. machine (1) according to claim 5, it is described
First control unit (6) is used to control the carrier (70,80,90) to be moved upwards by magnetic force in specific sender, described
Second control unit (7) is for controlling the robot (100) in the specific direction of transfer with the conveyer system (2)
Movement is in the different direction of motion to operate the load (72).
7. machine (1) according to claim 5 or 6, wherein the conveyer system (2) is configured as described in transmission conduct
The substrate of (72) is loaded, and one or more of robots (100,110) are configured as addition article (113) to the base
Piece.
8. control device (5), the movement in processing for controlling machine (1), including first control unit (6) and the second control
Unit (7), the first control unit (6) are used for control vector (70,80,90), and the carrier (70,80,90) will pass through
Magnetic force is transmitted on the specific direction of transfer of conveyer system (2), and the carrier (70,80,90) be used to transmit the machine
(1) load (72) that will be operated in, second control unit (7) for control robot (100) with it is described
In the different direction of motion of specific direction of transfer movement to operate the load (72), wherein the first control unit (6) and
Second control unit (7) is configured as executing control, and in the control, institute is operated in the treating stations (3) of the machine (1)
When stating load (72), for transmitting the specific direction of transfer of the load (72) and the fortune of the robot (100)
Dynamic direction is applied, and is moved upwards in the specific sender of the conveyer system (2) with to eliminate the robot (100)
It needs, wherein when operating the load (72), be used in by the control device and be passed up institute in the specific sender
The control for stating load (72) is synchronous with the control for moving the robot (100,110) in the direction of movement；It is described
The carrier of conveyer system can be moved in the conveyer system with identical speed or multiple and different speed.
9. control device according to claim 8, wherein the first control unit (6) is configured to control the load
Body (70,80,90), so that the load (72) is moved on the specific direction of transfer, so that the robot (100) is no
It must be moved upwards in the specific sender.
10. control device (5) according to claim 8 or claim 9, wherein the specific direction of transfer is X-direction, wherein institute
The direction of motion for stating robot (100) is at least one direction in Y-direction and/or Z-direction and/or the direction Θ, and
Wherein, the X-direction, the Y-direction and the Z-direction are different from each other and be arranged to be mutually perpendicular to.
11. control method, the movement in processing for controlling machine (1), comprising steps of being controlled by first control unit (6)
Carrier (70,80,90) processed, the carrier (70,80,90) will be by magnetic force on the specific direction of transfer of conveyer system (2)
It is transmitted, the carrier (70,80,90) is used as transmitting the load (72) that will be operated in the machine；And pass through
Second control unit (7) control, for controlling robot (100) in the direction of motion different from the specific direction of transfer
Movement is to operate the load (72), wherein and the first control unit (6) and second control unit (7) execute control,
In the control, when operating the load (72) in the treating stations (3) of the machine (1), for transmitting the load
(72) direction of motion of the specific direction of transfer and the robot (100) is applied, to eliminate the robot
(100) needs moved upwards in the specific sender of the conveyer system (2), wherein operating the load (72)
When, it is used in by control device and is passed up the control of the load (72) in the specific sender and in the movement
The control of the mobile robot (100) is synchronous on direction；The carrier of the conveyer system can be with identical speed or multiple
Different speed moves in the conveyer system.
12. control method according to claim 11, wherein the specific direction of transfer is X-direction, wherein the machine
The direction of motion of device people (100) is at least one direction in Y-direction and/or Z-direction and/or the direction Θ, and wherein,
The X-direction, the Y-direction and the Z-direction are different from each other and be arranged to be mutually perpendicular to.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13181317.2A EP2840600B1 (en) | 2013-08-22 | 2013-08-22 | Process station for a machine as well as control device and control method for controlling a movement in a process of a machine |
| EP13181317.2 | 2013-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104418097A CN104418097A (en) | 2015-03-18 |
| CN104418097B true CN104418097B (en) | 2019-09-03 |
Family
ID=49115344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410413788.9A Active CN104418097B (en) | 2013-08-22 | 2014-08-21 | Treating stations and control device and control method for machine |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20150056045A1 (en) |
| EP (1) | EP2840600B1 (en) |
| KR (1) | KR20150022695A (en) |
| CN (1) | CN104418097B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105217287B (en) * | 2015-09-18 | 2018-02-02 | 福建富欣陶瓷有限公司 | A kind of tile conveying equipment |
| CN109983154B (en) * | 2017-10-27 | 2021-11-26 | 应用材料公司 | Carrier for contactless transport in a deposition system, device for transport of a carrier, and method for transporting a carrier |
| KR20190101221A (en) | 2018-02-22 | 2019-08-30 | 윤기웅 | Process facility system and method for controlling load carrier movement |
| CN111319965A (en) * | 2020-02-14 | 2020-06-23 | 珠海格力智能装备有限公司 | A kind of blanking system and blanking method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6557235B1 (en) * | 2002-03-06 | 2003-05-06 | The Regents Of The University Of Michigan | Bi-axial coplanar apparatus |
| US6672820B1 (en) * | 1996-07-15 | 2004-01-06 | Semitool, Inc. | Semiconductor processing apparatus having linear conveyer system |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3958740A (en) * | 1974-07-08 | 1976-05-25 | Dixon Automation, Inc. | Automatic component assembly machine and method relating thereto |
| US4096821A (en) | 1976-12-13 | 1978-06-27 | Westinghouse Electric Corp. | System for fabricating thin-film electronic components |
| AU7273198A (en) * | 1997-05-01 | 1998-11-24 | Motorola, Inc. | Dynamically reconfigurable assembly line for electronic products |
| KR100960768B1 (en) * | 2005-06-10 | 2010-06-01 | 어플라이드 머티어리얼스, 인코포레이티드 | Linear vacuum deposition system |
| KR20070008192A (en) * | 2005-07-13 | 2007-01-17 | 삼성전자주식회사 | Transport system for manufacturing flat panel display |
| US8219177B2 (en) * | 2006-02-16 | 2012-07-10 | Catholic Healthcare West | Method and system for performing invasive medical procedures using a surgical robot |
| DE502007001288D1 (en) * | 2007-01-02 | 2009-09-24 | Isis Sentronics Gmbh | Position detection system for contactless interferometric detection of the spatial position of a target object and thus equipped scanning system |
| DE102008019102A1 (en) * | 2008-04-16 | 2009-10-29 | Siemens Aktiengesellschaft | Arrangement for transporting substrates, arrangement for handling substrates, arrangement for producing electronic assemblies and methods for handling substrates |
| CN202912393U (en) * | 2012-10-18 | 2013-05-01 | 罗匡臣 | Magnetic handling system |
-
2013
- 2013-08-22 EP EP13181317.2A patent/EP2840600B1/en active Active
-
2014
- 2014-08-20 KR KR20140108216A patent/KR20150022695A/en not_active Ceased
- 2014-08-21 US US14/465,428 patent/US20150056045A1/en not_active Abandoned
- 2014-08-21 CN CN201410413788.9A patent/CN104418097B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6672820B1 (en) * | 1996-07-15 | 2004-01-06 | Semitool, Inc. | Semiconductor processing apparatus having linear conveyer system |
| US6557235B1 (en) * | 2002-03-06 | 2003-05-06 | The Regents Of The University Of Michigan | Bi-axial coplanar apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| US20150056045A1 (en) | 2015-02-26 |
| CN104418097A (en) | 2015-03-18 |
| EP2840600B1 (en) | 2023-04-12 |
| EP2840600A1 (en) | 2015-02-25 |
| KR20150022695A (en) | 2015-03-04 |
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