CN104806500A - Low-temperature pump regeneration controller - Google Patents
Low-temperature pump regeneration controller Download PDFInfo
- Publication number
- CN104806500A CN104806500A CN201510198523.6A CN201510198523A CN104806500A CN 104806500 A CN104806500 A CN 104806500A CN 201510198523 A CN201510198523 A CN 201510198523A CN 104806500 A CN104806500 A CN 104806500A
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- China
- Prior art keywords
- module
- temperature
- low
- controller
- power
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- 230000008929 regeneration Effects 0.000 title claims abstract description 17
- 238000011069 regeneration method Methods 0.000 title claims abstract description 17
- 238000004891 communication Methods 0.000 claims abstract description 11
- 238000012546 transfer Methods 0.000 claims description 9
- 230000002452 interceptive effect Effects 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000003993 interaction Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010622 cold drawing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention discloses a low-temperature pump regeneration controller. The low-temperature pump regeneration controller comprises a main processor, a power supply converting module, a temperature acquiring module, a pressure transmitter, a DC-DC (direct current) power module, a communication module, a human-computer interaction system and a wireless controller, wherein the power supply converting module, the temperature acquiring module and the pressure transmitter are electrically connected with the main processor respectively; the main processor is also connected with the DC-DC power module, the communication module, the human-computer interaction system and the wireless controller; the power supply converting module is also electrically connected with the DC-DC power module. The temperature and the vacuum degree of a low-temperature pump two-stage cold head are precisely measured, complete regeneration of a low-temperature pump is realized by heating the two-stage cold head, wireless access and multi-pump level control of a regeneration controller are realized, the control is convenient to perform, and the measurement is precise.
Description
Technical field
The present invention relates to the two-stage cold head temperature of cryopump and the control technique field of degree of vacuum, particularly relate to a kind of regeneration of low temperature pump controller.
Background technique
Cryopump is after continuous operation certain hour, and the sedimentary deposit of cold surface is thickening, and pumping speed declines, and needs regeneration
It is made to return to original pumping performance.Regeneration can make it naturally heat up by shutdown to carry out, and also can give while being filled with drying nitrogen in low temperature pump chamber and make its acceleration to cold drawing heating.Only need heat refrigerator secondary cold head during rapid regeneration, make its temperature rise to 300K.During holomorphosis, two-stage cold head all needs heating, makes its temperature all rise to 300K.Existing controller can only carry out heating to refrigerator secondary cold head and realize rapid regeneration, and can not realize holomorphosis.Controller wireless access way efficiently can not be provided, realize the monitoring of regenerative process, as Chinese Patent Application No.: cryopump monitoring method disclosed in 201010229725.X and 201010230201.2.
Summary of the invention
The object of the invention is exactly the defect in order to make up prior art, provides a kind of regeneration of low temperature pump controller.
The present invention is achieved by the following technical solutions:
A kind of regeneration of low temperature pump controller, include primary processor, power transfer module, temperature collect module, pressure transmitter, DC-DC power module, communication module, man-machine interactive system and wireless controller, described power conversion module, temperature collect module and pressure transmitter are electrically connected with primary processor respectively, described primary processor is also connected with DC-DC power module, communication module, man-machine interactive system and wireless controller respectively, and power transfer module is also electrically connected with DC-DC power module.
Each module is unified to be installed on monoblock circuit board.
The alternating voltage of input is transformed to VDC by power transfer module, for primary processor and whole controller circuitry, and the electric power of heating required for cold head when regeneration of low temperature pump is provided.
Temperature collect module is used for gathering the temperature sensor signal that cryopump two-stage cold head is installed, and two-wire system or four-line measurement mode can be used to complete and measure the collection of temperature.As user selects, suitable temperature transducer is minimum records 1.2K temperature.
Pressure transmitter is used for gathering the analogue signal or digital signal that are inputted by vacuum transducer or vacuum measuring instrument, completes the measurement of cryopump degree of vacuum.
Required voltage and electric current when DC-DC power module is used for controlling heating cold head, two-way exports.The power of this module can be determined according to the recovery time.
Communication module is used for cryopump cold head temperature, degree of vacuum, working time, reproduced state and time to be sent to peripheral control unit or control station, has RS232, RS485 and the ethernet communication interface of standard.
Man-machine interactive system be used for refresh controller body install touch screen control.Be sent to primary processor by after touch screen image information and user's operation information process, and receive the instruction of primary processor.
Wireless controller can make refresh controller touch screen picture transmission to have wireless communication function portable computer or by wireless routing access user network.Use the user software of specific development, a portable computer can manage at most 128 refresh controllers, decreases the working load of multiple stage cryopump management in longer process bands.
Primary processor completes the process of modules information, the realization of control algorithm.
Advantage of the present invention is: the present invention accurately measures temperature and the degree of vacuum of cryopump two-stage cold head, is realized the holomorphosis of cryopump by heating two-stage cold head, and the wireless access and the many pumps group that realize refresh controller control, and it is convenient to control, and measures accurately.
Accompanying drawing explanation
Fig. 1 is working principle block diagram of the present invention.
Fig. 2 is the present invention and cryopump long splice composition.
Embodiment
As shown in Figure 1, a kind of regeneration of low temperature pump controller, include primary processor 1, power transfer module 2, temperature collect module 3, pressure transmitter 4, DC-DC power module 5, communication module 6, man-machine interactive system 7 and wireless controller 8, described power transfer module 2, temperature collect module 3 and pressure transmitter 4 are electrically connected with primary processor 1 respectively, described primary processor 1 is also connected with DC-DC power module 5, communication module 6, man-machine interactive system 7 and wireless controller 8 respectively, and power transfer module 2 is also electrically connected with DC-DC power module 5.
As shown in Figure 2, control in figure solenoid valve 9 that nitrogen injects, exhaust with slightly take out valve 10 and mechanical pump 11, the push-pull valve 12 be connected with process cavity, helium compressor 13 by user according to regenerating needs and Real-time process parameter and state Non-follow control.Refresh controller is connected to cryopump 14, can complete the measurement of cryopump 14 two-stage cold head temperature and degree of vacuum, can provide rapid regeneration or the electric power of holomorphosis heating required for cold head.
Claims (1)
1. a regeneration of low temperature pump controller, it is characterized in that: include primary processor, power transfer module, temperature collect module, pressure transmitter, DC-DC power module, communication module, man-machine interactive system and wireless controller, described power transfer module, temperature collect module and pressure transmitter are electrically connected with primary processor respectively, described primary processor is also connected with DC-DC power module, communication module, man-machine interactive system and wireless controller respectively, and power transfer module is also electrically connected with DC-DC power module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510198523.6A CN104806500A (en) | 2015-04-23 | 2015-04-23 | Low-temperature pump regeneration controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510198523.6A CN104806500A (en) | 2015-04-23 | 2015-04-23 | Low-temperature pump regeneration controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104806500A true CN104806500A (en) | 2015-07-29 |
Family
ID=53691625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510198523.6A Pending CN104806500A (en) | 2015-04-23 | 2015-04-23 | Low-temperature pump regeneration controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104806500A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108614493A (en) * | 2018-06-13 | 2018-10-02 | 重庆金鹰自动化工程有限公司 | A kind of condensation head control system for realizing ultravacuum state |
| CN116066342A (en) * | 2023-01-09 | 2023-05-05 | 安徽万瑞冷电科技有限公司 | Control device and control method for cryopump |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1214638A (en) * | 1996-03-26 | 1999-04-21 | 赛斯纯净气体公司 | Combination cryopump/getter pump and method for regenerating same |
| CN101424257A (en) * | 2007-11-01 | 2009-05-06 | 佳能安内华科技股份有限公司 | Cryopump apparatus and method of operation thereof |
| CN101469689A (en) * | 2007-12-27 | 2009-07-01 | 佳能安内华科技股份有限公司 | Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method |
| CN101933292A (en) * | 2008-01-22 | 2010-12-29 | 布鲁克机械公司 | Cryopump Network |
| CN102734123A (en) * | 2011-04-11 | 2012-10-17 | 住友重机械工业株式会社 | Cryopump system, compressor, and method for regenerating cryopumps |
| CN103291584A (en) * | 2012-02-23 | 2013-09-11 | 住友重机械工业株式会社 | Cryopump, method of regenerating cryopump, and control device for cryopump |
| CN103291585A (en) * | 2012-03-01 | 2013-09-11 | 住友重机械工业株式会社 | Cryopump and method for regenerating the same |
| CN204572413U (en) * | 2015-04-23 | 2015-08-19 | 安徽万瑞冷电科技有限公司 | A kind of regeneration of low temperature pump controller |
-
2015
- 2015-04-23 CN CN201510198523.6A patent/CN104806500A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1214638A (en) * | 1996-03-26 | 1999-04-21 | 赛斯纯净气体公司 | Combination cryopump/getter pump and method for regenerating same |
| CN101424257A (en) * | 2007-11-01 | 2009-05-06 | 佳能安内华科技股份有限公司 | Cryopump apparatus and method of operation thereof |
| CN101469689A (en) * | 2007-12-27 | 2009-07-01 | 佳能安内华科技股份有限公司 | Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method |
| CN101933292A (en) * | 2008-01-22 | 2010-12-29 | 布鲁克机械公司 | Cryopump Network |
| CN102734123A (en) * | 2011-04-11 | 2012-10-17 | 住友重机械工业株式会社 | Cryopump system, compressor, and method for regenerating cryopumps |
| CN103291584A (en) * | 2012-02-23 | 2013-09-11 | 住友重机械工业株式会社 | Cryopump, method of regenerating cryopump, and control device for cryopump |
| CN103291585A (en) * | 2012-03-01 | 2013-09-11 | 住友重机械工业株式会社 | Cryopump and method for regenerating the same |
| CN204572413U (en) * | 2015-04-23 | 2015-08-19 | 安徽万瑞冷电科技有限公司 | A kind of regeneration of low temperature pump controller |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108614493A (en) * | 2018-06-13 | 2018-10-02 | 重庆金鹰自动化工程有限公司 | A kind of condensation head control system for realizing ultravacuum state |
| CN116066342A (en) * | 2023-01-09 | 2023-05-05 | 安徽万瑞冷电科技有限公司 | Control device and control method for cryopump |
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| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150729 |