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CN104835729B - A kind of template thermal field induction manufacturing process of flexible reduced graphene patterned electrodes - Google Patents

A kind of template thermal field induction manufacturing process of flexible reduced graphene patterned electrodes Download PDF

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CN104835729B
CN104835729B CN201510159274.XA CN201510159274A CN104835729B CN 104835729 B CN104835729 B CN 104835729B CN 201510159274 A CN201510159274 A CN 201510159274A CN 104835729 B CN104835729 B CN 104835729B
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CN104835729A (en
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李祥明
邵金友
田洪淼
陈小亮
徐川
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Xian Jiaotong University
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract

一种柔性还原石墨烯图形化电极的模板热场诱导成形方法,先在金属模板表面加工有相应图案的微结构,利用热源对金属模板进行加热,然后利用机械压力使金属模板接触到涂覆在柔性衬底表面的氧化石墨烯薄膜,最后利用机械力将金属模板从氧化石墨烯薄膜表面移开,即在柔性衬底表面得到图形化的还原石墨烯,其中图形化的还原石墨烯的图案与高温金属模板的微结构相一致,本发明可高效率、低成本、大规模的制造出高分辨率的石墨烯图案,为柔性电子、柔性显示、可穿戴电子、柔性储能器件等规模化制造提供了技术支撑。

A template thermal field induction forming method for a flexible reduced graphene patterned electrode, first processing a microstructure with a corresponding pattern on the surface of the metal template, using a heat source to heat the metal template, and then using mechanical pressure to make the metal template touch the coated surface. The graphene oxide film on the surface of the flexible substrate, and finally use mechanical force to remove the metal template from the surface of the graphene oxide film, that is, a patterned reduced graphene is obtained on the surface of the flexible substrate, wherein the pattern of the patterned reduced graphene is consistent with the The microstructure of the high-temperature metal template is consistent, and the invention can produce high-resolution graphene patterns with high efficiency, low cost, and large scale, and is suitable for large-scale manufacturing of flexible electronics, flexible displays, wearable electronics, and flexible energy storage devices. Provided technical support.

Description

一种柔性还原石墨烯图形化电极的模板热场诱导成形方法A Template Thermal Field Induced Forming Method for Flexible Reduced Graphene Patterned Electrode

技术领域technical field

本发明属于微制造技术领域,具体涉及一种柔性还原石墨烯图形化电极的模板热场诱导成形方法。The invention belongs to the technical field of micro-manufacturing, and in particular relates to a template thermal field-induced forming method for a flexible reduced graphene patterned electrode.

背景技术Background technique

石墨烯材料的出现使近年来的柔性电子得到了爆炸式的发展。石墨烯材料具有优秀的电学、力学、化学性能,图形化的柔性石墨烯电极在柔性微电子、光电子、电化学能量存储等领域具有及其广阔的潜在应用价值,例如目前的柔性场效应晶体管、柔性薄膜太阳能电池、柔性电化学存储器、柔性显示器等具体的器件领域竞相利用图形化的石墨烯电极代替传统的电极图形。为此,实现石墨烯图形的高效率、低成本、大规模制造,是发展石墨烯基柔性电子/光子器件的首要问题。The emergence of graphene materials has enabled the explosive development of flexible electronics in recent years. Graphene materials have excellent electrical, mechanical, and chemical properties. Patterned flexible graphene electrodes have extremely broad potential application values in the fields of flexible microelectronics, optoelectronics, and electrochemical energy storage. For example, the current flexible field-effect transistors, Specific device fields such as flexible thin-film solar cells, flexible electrochemical memories, and flexible displays are competing to use patterned graphene electrodes to replace traditional electrode patterns. Therefore, achieving high-efficiency, low-cost, and large-scale manufacturing of graphene graphics is the primary issue in the development of graphene-based flexible electronic/photonic devices.

为了制造图形化的石墨烯电极,国内外学者已发展了多种不同的成形方法,例如使用喷墨打印技术将石墨烯墨水逐点喷打在衬底上即可连成一定的石墨烯图形、利用高温原子力探针在氧化石墨烯薄膜上接触扫描可以在扫描轨迹上实现还原石墨烯图形、利用激光可以在氧化石墨烯薄膜表面扫描直写得到还原石墨烯图案。然而上述的喷墨打印过程、热探针扫描过程、激光直写过程等均是串行的加工方法,难以实现图形化石墨烯电极的低成本、高效率、规模化制造,已经成为限制石墨烯基柔性电子器件、光子器件、电化学器件等发展的关键技术瓶颈,需要从原理上发展一种新的制造方法,实现图形化石墨烯电极的低成本、高效率、规模化制造。In order to manufacture patterned graphene electrodes, scholars at home and abroad have developed a variety of different forming methods, such as using inkjet printing technology to spray graphene ink on the substrate point by point to form a certain graphene pattern, Contact scanning on the graphene oxide film with a high-temperature atomic force probe can realize the reduced graphene pattern on the scanning track, and the reduced graphene pattern can be obtained by scanning and direct writing on the surface of the graphene oxide film by using a laser. However, the above-mentioned inkjet printing process, thermal probe scanning process, and laser direct writing process are all serial processing methods, and it is difficult to achieve low-cost, high-efficiency, and large-scale manufacturing of patterned graphene electrodes, which has become a limitation for graphene. The key technical bottleneck in the development of flexible-based electronic devices, photonic devices, electrochemical devices, etc. requires the development of a new manufacturing method in principle to achieve low-cost, high-efficiency, and large-scale manufacturing of patterned graphene electrodes.

发明内容Contents of the invention

为了克服上述现有技术的缺点,本发明的目的在于提供一种柔性还原石墨烯图形化电极的模板热场诱导成形方法,具有高效率、低成本、规模化的制造能力。In order to overcome the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a template thermal field-induced forming method for a flexible reduced graphene patterned electrode, which has high efficiency, low cost, and large-scale manufacturing capabilities.

为了达到上述目的,本发明采取的技术方案为:In order to achieve the above object, the technical scheme that the present invention takes is:

一种柔性还原石墨烯图形化电极的模板热场诱导成形方法,包括以下步骤:A template thermal field-induced forming method for a flexible reduced graphene patterned electrode, comprising the following steps:

1)在金属模板1表面加工有相应图案的微结构,利用热源2对金属模板1进行加热,使金属模板1的温度在200℃~800℃;1) Processing a microstructure with a corresponding pattern on the surface of the metal template 1, heating the metal template 1 with a heat source 2, so that the temperature of the metal template 1 is 200°C to 800°C;

2)然后利用机械压力3使金属模板1接触到涂覆在柔性衬底5表面的氧化石墨烯薄膜4,其中所施加的机械压力3以保证金属模板1与氧化石墨烯薄膜4紧密接触为限,接触时间在1毫秒到1分钟之间;2) Then utilize mechanical pressure 3 to make the metal template 1 contact the graphene oxide film 4 coated on the surface of the flexible substrate 5, wherein the applied mechanical pressure 3 is limited to ensure that the metal template 1 is in close contact with the graphene oxide film 4 , the contact time is between 1 millisecond and 1 minute;

3)最后利用机械力6将金属模板1从氧化石墨烯薄膜4表面移开,即在柔性衬底5表面得到图形化的还原石墨烯7,其中图形化的还原石墨烯7的图案与高温金属模板1的微结构相一致。3) Finally, the mechanical force 6 is used to remove the metal template 1 from the surface of the graphene oxide film 4, that is, the patterned reduced graphene 7 is obtained on the surface of the flexible substrate 5, wherein the pattern of the patterned reduced graphene 7 and the high-temperature metal The microstructure of template 1 was consistent.

所述的金属模板1为具有高导热率系数的金属,包括铜、不锈钢、镍或铬。The metal template 1 is a metal with high thermal conductivity, including copper, stainless steel, nickel or chromium.

所述的氧化石墨烯薄膜4的厚度为0.1微米到100微米。The thickness of the graphene oxide film 4 is 0.1 micron to 100 micron.

所述的柔性衬底5是纤维素纸、棉布、聚酰亚胺膜(PI膜)或耐高温聚酯薄膜(PET膜),Described flexible substrate 5 is cellulose paper, cotton cloth, polyimide film (PI film) or high temperature resistant polyester film (PET film),

本发明可高效率、低成本、大规模的制造出高分辨率的石墨烯图案,为柔性电子、柔性显示、可穿戴电子、柔性储能器件等规模化制造提供了技术支撑。The invention can manufacture high-resolution graphene patterns with high efficiency, low cost and large scale, and provides technical support for large-scale manufacturing of flexible electronics, flexible displays, wearable electronics, flexible energy storage devices, and the like.

附图说明Description of drawings

图1是金属模板的升温过程图。Figure 1 is a diagram of the heating process of the metal template.

图2是模板热场诱导过程图。Fig. 2 is a diagram of template thermal field induction process.

图3是还原石墨烯电极的成形分离示意图。Figure 3 is a schematic diagram of the forming and separation of the reduced graphene electrode.

图4a是实施例金属模板实物图;图4b是在相片纸表面的图形化还原石墨烯电极图;图4c是还原石墨烯电极图形的扫描电子显微镜表征图,图4d是图4c的局部放大图,图4e是还原石墨烯电极图形的光学显微镜放大图。Fig. 4a is the physical figure of the metal template of the embodiment; Fig. 4b is a patterned reduced graphene electrode diagram on the surface of photo paper; Fig. 4c is a scanning electron microscope characterization diagram of the reduced graphene electrode pattern, and Fig. 4d is a partial enlarged view of Fig. 4c , Fig. 4e is an optical microscope enlarged image of the reduced graphene electrode pattern.

具体实施方式detailed description

下面结合附图对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings.

一种柔性还原石墨烯图形化电极的模板热场诱导成形方法,包括以下步骤:A template thermal field-induced forming method for a flexible reduced graphene patterned electrode, comprising the following steps:

1)参照图1,在金属模板1表面加工有浮雕结构,金属模板1的材料为铜、不锈钢、镍、铬等具有高导热率系数的金属,利用热源2对金属模板1进行加热,使金属模板1的温度在200℃~800℃;1) With reference to Figure 1, a relief structure is processed on the surface of the metal template 1, and the material of the metal template 1 is a metal with a high thermal conductivity coefficient such as copper, stainless steel, nickel, chromium, etc., and the metal template 1 is heated by a heat source 2 to make the metal The temperature of template 1 is between 200°C and 800°C;

2)参照图2,然后利用机械压力3使金属模板1接触到涂覆在柔性衬底5表面的氧化石墨烯薄膜4,柔性衬底5是纤维素纸、棉布、聚酰亚胺膜(PI膜)或耐高温聚酯薄膜(PET膜),氧化石墨烯薄膜4的厚度为0.1微米到100微米,机械压力3的大小以能够使金属模板1紧密接触氧化石墨烯薄膜4为宜,接触时间在1毫秒至1分钟之间,2) With reference to Fig. 2, utilize mechanical pressure 3 to make metal template 1 contact the graphene oxide film 4 that is coated on flexible substrate 5 surfaces then, flexible substrate 5 is cellulose paper, cotton cloth, polyimide film (PI film) or high temperature resistant polyester film (PET film), the thickness of graphene oxide film 4 is 0.1 micron to 100 micron, the size of mechanical pressure 3 is advisable to make metal template 1 closely contact graphene oxide film 4, contact time between 1 millisecond and 1 minute,

3)参照图3,最后利用机械力6将金属模板1从氧化石墨烯薄膜4表面移开,即在柔性衬底5表面得到图形化的还原石墨烯7,其中图形化的还原石墨烯7的图案与金属模板1的微结构相一致。3) With reference to Fig. 3, utilize mechanical force 6 to remove metal template 1 from graphene oxide film 4 surfaces at last, promptly obtain patterned reduced graphene 7 on flexible substrate 5 surface, wherein the patterned reduced graphene 7 The pattern is consistent with the microstructure of the metal template 1.

下面结合实施例对本发明做详细描述。The present invention will be described in detail below in conjunction with the embodiments.

为了展示柔性还原石墨烯图形化电极模板热场诱导的可行性和高效性,本实施例使用了高温不锈钢模板对氧化石墨烯进行图形化热诱导还原,参照图4,图中的GO是氧化石墨烯(Graphene Oxide)的英文缩写,rGO是还原石墨烯(reduced Graphene Oxide)的英文缩写。在实施例中,首先利用铣削加工方法在不锈钢块材表面铣削出叉指图形的微结构,得到到金属模板,参照图4a,利用家用电炉对金属模板进行加热,加热温度为650℃;用喷雾涂覆的方法在相片纸表面喷涂出一层氧化石墨烯薄膜,参照图4b,氧化石墨烯薄膜的厚度为2微米;将金属模板接触氧化石墨烯薄膜并迅速离开,即可在相片纸表面得到叉指图形化的还原石墨烯图形化电极,图4c和图4d是还原石墨烯电极图形的扫描电子显微镜表征图,图4e是还原石墨烯电极图形的光学显微镜放大图。In order to demonstrate the feasibility and high efficiency of thermal field induction of flexible reduced graphene patterned electrode template, this example uses a high-temperature stainless steel template to perform patterned thermally induced reduction of graphene oxide. Referring to Figure 4, GO in the figure is graphite oxide rGO is the English abbreviation of reduced graphene (reduced Graphene Oxide). In the embodiment, firstly, the microstructure of the interdigitated pattern is milled on the surface of the stainless steel block by using the milling method to obtain the metal template. Referring to Figure 4a, the metal template is heated by a household electric furnace at a heating temperature of 650°C; The coating method sprays a layer of graphene oxide film on the surface of the photo paper. Referring to Figure 4b, the thickness of the graphene oxide film is 2 microns; the metal template contacts the graphene oxide film and leaves quickly, and the surface of the photo paper can be obtained. Interdigitated patterned reduced graphene patterned electrode, Figure 4c and Figure 4d are scanning electron microscope representations of the reduced graphene electrode pattern, and Figure 4e is an optical microscope enlarged view of the reduced graphene electrode pattern.

Claims (4)

1. the template thermal field induction manufacturing process of a kind of flexible reduced graphene patterned electrodes, it is characterised in that including following Step:
1) in the figuratum micro-structural of metal form (1) Surface Machining, metal form (1) is heated using thermal source (2), made The temperature of metal form (1) is at 200 DEG C~800 DEG C;
2) and then using mechanical pressure (3) metal form (1) is made to touch the graphene oxide coated in flexible substrate (5) surface Film (4), the mechanical pressure (3) applied in it are to ensure that metal form (1) is in close contact with graphene oxide film (4) Limit, time of contact is between 1 millisecond to 1 minute;
3) finally metal form (1) is removed from graphene oxide film (4) surface using mechanical force (6), i.e., in flexible substrate (5) surface obtains patterned reduced graphene (7), wherein the pattern of patterned reduced graphene (7) and metal form (1) Micro-structural it is consistent.
2. a kind of template thermal field induction manufacturing process of flexible reduced graphene patterned electrodes according to claim 1, It is characterized in that:Described metal form (1) is the metal with high thermal conductivity coefficient, including copper, stainless steel, nickel or chromium.
3. a kind of template thermal field induction manufacturing process of flexible reduced graphene patterned electrodes according to claim 1, It is characterized in that:The thickness of described graphene oxide film (4) is 0.1 micron to 100 microns.
4. a kind of template thermal field induction manufacturing process of flexible reduced graphene patterned electrodes according to claim 1, It is characterized in that:Described flexible substrate (5) is cellulose paper, cotton, polyimide film (PI films) or high temperature resistance polyester film PET film.
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